ITUB20159729A1 - Metodo di fabbricazione di un dispositivo di eiezione di fluido migliorato, e dispositivo di eiezione di fluido - Google Patents

Metodo di fabbricazione di un dispositivo di eiezione di fluido migliorato, e dispositivo di eiezione di fluido

Info

Publication number
ITUB20159729A1
ITUB20159729A1 ITUB2015A009729A ITUB20159729A ITUB20159729A1 IT UB20159729 A1 ITUB20159729 A1 IT UB20159729A1 IT UB2015A009729 A ITUB2015A009729 A IT UB2015A009729A IT UB20159729 A ITUB20159729 A IT UB20159729A IT UB20159729 A1 ITUB20159729 A1 IT UB20159729A1
Authority
IT
Italy
Prior art keywords
ejection device
fluid ejection
manufacturing
improved
improved fluid
Prior art date
Application number
ITUB2015A009729A
Other languages
English (en)
Inventor
Mauro Cattaneo
Lorenzo Colombo
Carlo Luigi Prelini
Dino Faralli
Alessandra Sciutti
Lorenzo Tentori
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITUB2015A009729A priority Critical patent/ITUB20159729A1/it
Priority to US15/179,096 priority patent/US9849674B2/en
Priority to CN201910116519.9A priority patent/CN109910435B/zh
Priority to CN201610490773.1A priority patent/CN106926582B/zh
Publication of ITUB20159729A1 publication Critical patent/ITUB20159729A1/it
Priority to US15/812,960 priority patent/US10245834B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
ITUB2015A009729A 2015-12-29 2015-12-29 Metodo di fabbricazione di un dispositivo di eiezione di fluido migliorato, e dispositivo di eiezione di fluido ITUB20159729A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
ITUB2015A009729A ITUB20159729A1 (it) 2015-12-29 2015-12-29 Metodo di fabbricazione di un dispositivo di eiezione di fluido migliorato, e dispositivo di eiezione di fluido
US15/179,096 US9849674B2 (en) 2015-12-29 2016-06-10 Manufacturing method for a fluid-ejection device, and fluid-ejection device
CN201910116519.9A CN109910435B (zh) 2015-12-29 2016-06-28 喷嘴板、流体喷射装置及它们的制造方法
CN201610490773.1A CN106926582B (zh) 2015-12-29 2016-06-28 用于流体喷射装置的改进的制造方法以及流体喷射装置
US15/812,960 US10245834B2 (en) 2015-12-29 2017-11-14 Manufacturing method for a fluid-ejection device, and fluid-ejection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUB2015A009729A ITUB20159729A1 (it) 2015-12-29 2015-12-29 Metodo di fabbricazione di un dispositivo di eiezione di fluido migliorato, e dispositivo di eiezione di fluido

Publications (1)

Publication Number Publication Date
ITUB20159729A1 true ITUB20159729A1 (it) 2017-06-29

Family

ID=55588500

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUB2015A009729A ITUB20159729A1 (it) 2015-12-29 2015-12-29 Metodo di fabbricazione di un dispositivo di eiezione di fluido migliorato, e dispositivo di eiezione di fluido

Country Status (3)

Country Link
US (2) US9849674B2 (it)
CN (2) CN109910435B (it)
IT (1) ITUB20159729A1 (it)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITUB20159729A1 (it) 2015-12-29 2017-06-29 St Microelectronics Srl Metodo di fabbricazione di un dispositivo di eiezione di fluido migliorato, e dispositivo di eiezione di fluido
IT201700082961A1 (it) * 2017-07-20 2019-01-20 St Microelectronics Srl Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione
IT201800001152A1 (it) * 2018-01-17 2019-07-17 St Microelectronics Srl Metodo di fabbricazione di un dispositivo di eiezione di fluido con migliorata frequenza di risonanza e velocita' di eiezione del fluido, e dispositivo di eiezione di fluido
JP7068924B2 (ja) * 2018-05-23 2022-05-17 東芝テック株式会社 インクジェットヘッド及びインクジェットプリンタ
IT201800005778A1 (it) 2018-05-28 2019-11-28 Dispositivo microfluidico per l'espulsione di fluidi, in particolare per la stampa con inchiostri, e relativo procedimento di fabbricazione
TWI695120B (zh) * 2019-01-15 2020-06-01 研能科技股份有限公司 微流體致動器
US11818957B2 (en) * 2019-01-21 2023-11-14 Stmicroelectronics S.R.L. Piezoelectrically actuated MEMS optical device having a protected chamber and manufacturing process thereof
IT201900005794A1 (it) 2019-04-15 2020-10-15 St Microelectronics Srl Dispositivo di eiezione di fluido con ridotto numero di componenti e metodo di fabbricazione del dispositivo di eiezione di fluido
IT201900007196A1 (it) * 2019-05-24 2020-11-24 St Microelectronics Srl Dispositivo microfluidico per l'espulsione continua di fluidi, in particolare per la stampa con inchiostri, e relativo procedimento di fabbricazione
BR112022001234A2 (pt) 2019-07-30 2022-03-15 Hewlett Packard Development Co Revestimento uniforme da superfície de cabeça de impressão
CN111361153B (zh) * 2020-03-23 2020-11-06 合肥洁诺无纺布制品有限公司 多型号喷头替换型生物3d打印装置
IT202000010264A1 (it) * 2020-05-07 2021-11-07 St Microelectronics Srl Attuatore piezoelettrico avente un sensore di deformazione e relativo procedimento di fabbricazione
IT202000010261A1 (it) 2020-05-07 2021-11-07 St Microelectronics Srl Attuatore piezoelettrico dotato di una struttura deformabile avente migliorate proprieta' meccaniche e relativo procedimento di fabbricazione
US11623236B2 (en) * 2020-08-07 2023-04-11 Stmicroelectronics (Research & Development) Limited Fluidic ejection device with optical blockage detector
US20230110175A1 (en) 2021-09-29 2023-04-13 Stmicroelectronics S.R.L. Microfluidic mems device comprising a buried chamber and manufacturing process thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005021269A1 (ja) * 2003-08-29 2005-03-10 Sharp Kabushiki Kaisha ノズルプレートおよびその製造方法
US20140313264A1 (en) * 2013-04-18 2014-10-23 Stmicroelectronics S.R.L. Method for manufacturing a fluid ejection device and fluid ejection device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7086154B2 (en) * 2002-06-26 2006-08-08 Brother Kogyo Kabushiki Kaisha Process of manufacturing nozzle plate for ink-jet print head
KR101153562B1 (ko) * 2006-01-26 2012-06-11 삼성전기주식회사 압전 방식의 잉크젯 프린트헤드 및 그 제조방법
JP2009023334A (ja) * 2007-06-21 2009-02-05 Ricoh Co Ltd 液体吐出装置用ヘッドのノズル板及び液体吐出装置用ヘッド、並びに液体吐出装置及び液体吐出方法、インクジェット記録装置及びインクジェット記録方法
US20120274707A1 (en) * 2011-04-29 2012-11-01 Xiaorong Cai Ejection devices for inkjet printers and method for fabricating ejection devices
ITTO20120426A1 (it) * 2012-05-11 2013-11-12 St Microelectronics Srl Processo di fabbricazione di una piastra degli ugelli, piastra degli ugelli, e dispositivo di eiezione di liquido dotato della piastra degli ugelli
ITUB20159729A1 (it) * 2015-12-29 2017-06-29 St Microelectronics Srl Metodo di fabbricazione di un dispositivo di eiezione di fluido migliorato, e dispositivo di eiezione di fluido

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005021269A1 (ja) * 2003-08-29 2005-03-10 Sharp Kabushiki Kaisha ノズルプレートおよびその製造方法
US20140313264A1 (en) * 2013-04-18 2014-10-23 Stmicroelectronics S.R.L. Method for manufacturing a fluid ejection device and fluid ejection device

Also Published As

Publication number Publication date
US10245834B2 (en) 2019-04-02
CN109910435A (zh) 2019-06-21
CN106926582B (zh) 2019-03-12
CN106926582A (zh) 2017-07-07
CN109910435B (zh) 2022-04-05
US20170182778A1 (en) 2017-06-29
US9849674B2 (en) 2017-12-26
US20180065371A1 (en) 2018-03-08

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