IT201700082961A1 - Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione - Google Patents
Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazioneInfo
- Publication number
- IT201700082961A1 IT201700082961A1 IT102017000082961A IT201700082961A IT201700082961A1 IT 201700082961 A1 IT201700082961 A1 IT 201700082961A1 IT 102017000082961 A IT102017000082961 A IT 102017000082961A IT 201700082961 A IT201700082961 A IT 201700082961A IT 201700082961 A1 IT201700082961 A1 IT 201700082961A1
- Authority
- IT
- Italy
- Prior art keywords
- microfluid
- printing
- manufacturing
- mems device
- jet inks
- Prior art date
Links
- 239000000976 ink Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/1437—Back shooter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
- Reciprocating Pumps (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102017000082961A IT201700082961A1 (it) | 2017-07-20 | 2017-07-20 | Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione |
US16/030,630 US10703102B2 (en) | 2017-07-20 | 2018-07-09 | Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof |
CN201810790541.7A CN109278407B (zh) | 2017-07-20 | 2018-07-18 | 具有压电致动的微流体mems器件及其制造工艺 |
CN201821138534.0U CN209079461U (zh) | 2017-07-20 | 2018-07-18 | 微流体器件 |
EP18184377.2A EP3431295B1 (en) | 2017-07-20 | 2018-07-19 | Microfluidic mems device for inkjet printing with piezoelectric actuation and manufacturing process thereof |
US16/885,908 US11214061B2 (en) | 2017-07-20 | 2020-05-28 | Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102017000082961A IT201700082961A1 (it) | 2017-07-20 | 2017-07-20 | Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione |
Publications (1)
Publication Number | Publication Date |
---|---|
IT201700082961A1 true IT201700082961A1 (it) | 2019-01-20 |
Family
ID=60294335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT102017000082961A IT201700082961A1 (it) | 2017-07-20 | 2017-07-20 | Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione |
Country Status (4)
Country | Link |
---|---|
US (2) | US10703102B2 (it) |
EP (1) | EP3431295B1 (it) |
CN (2) | CN109278407B (it) |
IT (1) | IT201700082961A1 (it) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6568644B2 (ja) * | 2016-03-18 | 2019-08-28 | 株式会社日立製作所 | メンブレンデバイスの製造方法、メンブレンデバイス、および、ナノポアデバイス |
IT201700082961A1 (it) * | 2017-07-20 | 2019-01-20 | St Microelectronics Srl | Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione |
GB2566309B (en) * | 2017-09-08 | 2021-06-16 | Xaar Technology Ltd | A method for the manufacture of a MEMS device |
US11696507B2 (en) | 2018-12-14 | 2023-07-04 | Stmicroelectronics S.R.L. | Piezoelectric MEMS device with a suspended membrane having high mechanical shock resistance and manufacturing process thereof |
CN111747376B (zh) * | 2019-03-29 | 2023-06-30 | 研能科技股份有限公司 | 微流体致动器模块的制造方法 |
IT201900005794A1 (it) | 2019-04-15 | 2020-10-15 | St Microelectronics Srl | Dispositivo di eiezione di fluido con ridotto numero di componenti e metodo di fabbricazione del dispositivo di eiezione di fluido |
IT201900005804A1 (it) * | 2019-04-15 | 2020-10-15 | St Microelectronics Srl | Valvola microfluidica a membrana ad attuazione piezoelettrica e relativo procedimento di fabbricazione |
IT201900007196A1 (it) * | 2019-05-24 | 2020-11-24 | St Microelectronics Srl | Dispositivo microfluidico per l'espulsione continua di fluidi, in particolare per la stampa con inchiostri, e relativo procedimento di fabbricazione |
EP3974189B1 (en) | 2020-09-23 | 2023-12-27 | Canon Kabushiki Kaisha | Droplet jetting device |
US11940502B2 (en) | 2021-09-24 | 2024-03-26 | Analog Devices International Unlimited Company | Magnetic field sensing based on particle position within container |
ES2900841B2 (es) * | 2021-11-26 | 2023-03-02 | Kerajet S A | Dispositivo de impresion de inyeccion de tinta mems |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11309867A (ja) * | 1998-02-18 | 1999-11-09 | Seiko Epson Corp | インクジェット式記録ヘッドの製造方法 |
JP2002059555A (ja) * | 2000-08-18 | 2002-02-26 | Seiko Epson Corp | インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置 |
US6547376B1 (en) * | 1999-04-21 | 2003-04-15 | Matsushita Electric Industrial Co., Ltd. | Ink jet head and method for the manufacture thereof |
EP1506864A1 (en) * | 2003-08-11 | 2005-02-16 | Brother Kogyo Kabushiki Kaisha | Inkjet head |
US20070279456A1 (en) * | 2006-06-05 | 2007-12-06 | Seiko Epson Corporation | Liquid ejecting head, method of producing the same, and liquid ejecting apparatus |
US20170182778A1 (en) * | 2015-12-29 | 2017-06-29 | Stmicroelectronics S.R.L. | Manufacturing method for a fluid-ejection device, and fluid-ejection device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8434855B2 (en) | 2011-04-19 | 2013-05-07 | Eastman Kodak Company | Fluid ejector including MEMS composite transducer |
ITTO20130312A1 (it) * | 2013-04-18 | 2014-10-19 | St Microelectronics Srl | Metodo di fabbricazione di un dispositivo di eiezione di fluido e dispositivo di eiezione di fluido |
US9174445B1 (en) | 2014-06-20 | 2015-11-03 | Stmicroelectronics S.R.L. | Microfluidic die with a high ratio of heater area to nozzle exit area |
IT201700082961A1 (it) * | 2017-07-20 | 2019-01-20 | St Microelectronics Srl | Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione |
-
2017
- 2017-07-20 IT IT102017000082961A patent/IT201700082961A1/it unknown
-
2018
- 2018-07-09 US US16/030,630 patent/US10703102B2/en active Active
- 2018-07-18 CN CN201810790541.7A patent/CN109278407B/zh active Active
- 2018-07-18 CN CN201821138534.0U patent/CN209079461U/zh not_active Withdrawn - After Issue
- 2018-07-19 EP EP18184377.2A patent/EP3431295B1/en active Active
-
2020
- 2020-05-28 US US16/885,908 patent/US11214061B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11309867A (ja) * | 1998-02-18 | 1999-11-09 | Seiko Epson Corp | インクジェット式記録ヘッドの製造方法 |
US6547376B1 (en) * | 1999-04-21 | 2003-04-15 | Matsushita Electric Industrial Co., Ltd. | Ink jet head and method for the manufacture thereof |
JP2002059555A (ja) * | 2000-08-18 | 2002-02-26 | Seiko Epson Corp | インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置 |
EP1506864A1 (en) * | 2003-08-11 | 2005-02-16 | Brother Kogyo Kabushiki Kaisha | Inkjet head |
US20070279456A1 (en) * | 2006-06-05 | 2007-12-06 | Seiko Epson Corporation | Liquid ejecting head, method of producing the same, and liquid ejecting apparatus |
US20170182778A1 (en) * | 2015-12-29 | 2017-06-29 | Stmicroelectronics S.R.L. | Manufacturing method for a fluid-ejection device, and fluid-ejection device |
Also Published As
Publication number | Publication date |
---|---|
US20200290355A1 (en) | 2020-09-17 |
CN109278407B (zh) | 2021-06-25 |
US11214061B2 (en) | 2022-01-04 |
CN209079461U (zh) | 2019-07-09 |
CN109278407A (zh) | 2019-01-29 |
US20190023014A1 (en) | 2019-01-24 |
US10703102B2 (en) | 2020-07-07 |
EP3431295A1 (en) | 2019-01-23 |
EP3431295B1 (en) | 2023-09-27 |
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