ITMI20110698A1 - Struttura di fissaggio per micro dispositivi oscillanti - Google Patents
Struttura di fissaggio per micro dispositivi oscillantiInfo
- Publication number
- ITMI20110698A1 ITMI20110698A1 IT000698A ITMI20110698A ITMI20110698A1 IT MI20110698 A1 ITMI20110698 A1 IT MI20110698A1 IT 000698 A IT000698 A IT 000698A IT MI20110698 A ITMI20110698 A IT MI20110698A IT MI20110698 A1 ITMI20110698 A1 IT MI20110698A1
- Authority
- IT
- Italy
- Prior art keywords
- fixing structure
- micro oscillating
- oscillating devices
- devices
- micro
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Gyroscopes (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010029074.2A DE102010029074B4 (de) | 2010-05-18 | 2010-05-18 | Anbindungsstruktur für Mikroschwingeneinrichtungen |
Publications (1)
Publication Number | Publication Date |
---|---|
ITMI20110698A1 true ITMI20110698A1 (it) | 2011-11-19 |
Family
ID=44898707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT000698A ITMI20110698A1 (it) | 2010-05-18 | 2011-04-27 | Struttura di fissaggio per micro dispositivi oscillanti |
Country Status (6)
Country | Link |
---|---|
US (1) | US8462415B2 (it) |
JP (1) | JP5832143B2 (it) |
CN (1) | CN102313986B (it) |
DE (1) | DE102010029074B4 (it) |
IT (1) | ITMI20110698A1 (it) |
TW (1) | TWI582038B (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012219660B4 (de) * | 2012-10-26 | 2023-10-12 | Robert Bosch Gmbh | Mechanisches Bauteil |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3204784B2 (ja) * | 1993-03-23 | 2001-09-04 | オリンパス光学工業株式会社 | 集積型spmセンサー、及び、その駆動回路、及び、それを有する走査型プローブ顕微鏡 |
US5488862A (en) * | 1993-10-18 | 1996-02-06 | Armand P. Neukermans | Monolithic silicon rate-gyro with integrated sensors |
US5614678A (en) | 1996-02-05 | 1997-03-25 | Kulite Semiconductor Products, Inc. | High pressure piezoresistive transducer |
JP4185089B2 (ja) * | 1998-08-07 | 2008-11-19 | エスアイアイ・ナノテクノロジー株式会社 | 自己検知型spmプローブ |
JP4776779B2 (ja) * | 1998-09-02 | 2011-09-21 | カイロス・インク | 捩り撓みヒンジで連結されて相対的に回転する微細加工部材 |
DE19941045A1 (de) | 1999-08-28 | 2001-04-12 | Bosch Gmbh Robert | Mikroschwingvorrichtung |
JP2002116403A (ja) * | 2000-10-10 | 2002-04-19 | Univ Tokyo | 光スキャナ装置 |
US7446911B2 (en) | 2002-11-26 | 2008-11-04 | Brother Kogyo Kabushiki Kaisha | Optical scanning apparatus and image forming apparatus |
US7443569B2 (en) * | 2003-04-24 | 2008-10-28 | Jds Uniphase Corporation | Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays |
JP2005088188A (ja) * | 2003-08-12 | 2005-04-07 | Fujitsu Ltd | マイクロ揺動素子およびマイクロ揺動素子駆動方法 |
US7442918B2 (en) * | 2004-05-14 | 2008-10-28 | Microvision, Inc. | MEMS device having simplified drive |
US20090250853A1 (en) | 2006-04-24 | 2009-10-08 | Fraunhofer-Gesellschaft Zur Forderung Der Angewand | Torsion resilient element for hanging micromechanical elements which can be deflected |
KR100868758B1 (ko) | 2007-01-15 | 2008-11-13 | 삼성전기주식회사 | 압저항 센서를 구비한 회전형 mems 디바이스 |
JP5233221B2 (ja) * | 2007-09-21 | 2013-07-10 | セイコーエプソン株式会社 | アクチュエータ、光スキャナ、および画像形成装置 |
JP2009151013A (ja) * | 2007-12-19 | 2009-07-09 | Canon Inc | 揺動体装置及びその製造方法、揺動体装置によって構成される光学機器 |
JP2009210955A (ja) * | 2008-03-06 | 2009-09-17 | Brother Ind Ltd | 光スキャナ |
-
2010
- 2010-05-18 DE DE102010029074.2A patent/DE102010029074B4/de active Active
-
2011
- 2011-04-27 IT IT000698A patent/ITMI20110698A1/it unknown
- 2011-05-12 US US13/106,453 patent/US8462415B2/en active Active
- 2011-05-16 TW TW100116984A patent/TWI582038B/zh active
- 2011-05-18 CN CN201110133059.4A patent/CN102313986B/zh active Active
- 2011-05-18 JP JP2011111704A patent/JP5832143B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
CN102313986A (zh) | 2012-01-11 |
TW201204625A (en) | 2012-02-01 |
US8462415B2 (en) | 2013-06-11 |
JP5832143B2 (ja) | 2015-12-16 |
DE102010029074B4 (de) | 2018-03-08 |
DE102010029074A1 (de) | 2011-11-24 |
JP2011242780A (ja) | 2011-12-01 |
TWI582038B (zh) | 2017-05-11 |
US20110286069A1 (en) | 2011-11-24 |
CN102313986B (zh) | 2015-07-29 |
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