IT9048389A0 - Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau - Google Patents
Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateauInfo
- Publication number
- IT9048389A0 IT9048389A0 IT4838990A IT4838990A IT9048389A0 IT 9048389 A0 IT9048389 A0 IT 9048389A0 IT 4838990 A IT4838990 A IT 4838990A IT 4838990 A IT4838990 A IT 4838990A IT 9048389 A0 IT9048389 A0 IT 9048389A0
- Authority
- IT
- Italy
- Prior art keywords
- cycle
- control
- lapping machine
- post process
- pieces processed
- Prior art date
Links
- FBJUTZMAUXJMMH-UHFFFAOYSA-N azane;5-methyl-2-(4-methyl-5-oxo-4-propan-2-yl-1h-imidazol-2-yl)pyridine-3-carboxylic acid Chemical compound [NH4+].N1C(=O)C(C(C)C)(C)N=C1C1=NC=C(C)C=C1C([O-])=O FBJUTZMAUXJMMH-UHFFFAOYSA-N 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/03—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent according to the final size of the previously ground workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT04838990A IT1243537B (it) | 1990-10-19 | 1990-10-19 | Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau |
EP19910830440 EP0481935A3 (en) | 1990-10-19 | 1991-10-16 | Method and apparatus for the post-process check of the workpieces in a double-plate lapping machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT04838990A IT1243537B (it) | 1990-10-19 | 1990-10-19 | Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau |
Publications (3)
Publication Number | Publication Date |
---|---|
IT9048389A0 true IT9048389A0 (it) | 1990-10-19 |
IT9048389A1 IT9048389A1 (it) | 1992-04-19 |
IT1243537B IT1243537B (it) | 1994-06-16 |
Family
ID=11266266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT04838990A IT1243537B (it) | 1990-10-19 | 1990-10-19 | Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0481935A3 (it) |
IT (1) | IT1243537B (it) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6594542B1 (en) * | 1996-10-04 | 2003-07-15 | Applied Materials, Inc. | Method and system for controlling chemical mechanical polishing thickness removal |
US6146248A (en) * | 1997-05-28 | 2000-11-14 | Lam Research Corporation | Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher |
US6111634A (en) * | 1997-05-28 | 2000-08-29 | Lam Research Corporation | Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing |
US6108091A (en) | 1997-05-28 | 2000-08-22 | Lam Research Corporation | Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing |
US6068539A (en) | 1998-03-10 | 2000-05-30 | Lam Research Corporation | Wafer polishing device with movable window |
US7125313B2 (en) | 2003-02-25 | 2006-10-24 | Novellus Systems, Inc. | Apparatus and method for abrading a workpiece |
JP2020015105A (ja) * | 2018-07-23 | 2020-01-30 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5715668A (en) * | 1980-06-27 | 1982-01-27 | Fujikoshi Kikai Kogyo Kk | Lapping process and lapping device |
JPS57168109A (en) * | 1981-04-10 | 1982-10-16 | Shinetsu Eng Kk | Device for measuring thickness of work piece in lapping plate |
IT1190231B (it) * | 1986-03-07 | 1988-02-16 | Melchiorre Off Mecc | Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti |
US4860498A (en) * | 1988-08-15 | 1989-08-29 | General Signal Corp. | Automatic workpiece thickness control for dual lapping machines |
-
1990
- 1990-10-19 IT IT04838990A patent/IT1243537B/it active IP Right Grant
-
1991
- 1991-10-16 EP EP19910830440 patent/EP0481935A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
IT1243537B (it) | 1994-06-16 |
EP0481935A3 (en) | 1992-09-02 |
EP0481935A2 (en) | 1992-04-22 |
IT9048389A1 (it) | 1992-04-19 |
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