IT8420726A0 - Procedimento per produrre dispositivi semiconduttori. - Google Patents
Procedimento per produrre dispositivi semiconduttori.Info
- Publication number
- IT8420726A0 IT8420726A0 IT8420726A IT2072684A IT8420726A0 IT 8420726 A0 IT8420726 A0 IT 8420726A0 IT 8420726 A IT8420726 A IT 8420726A IT 2072684 A IT2072684 A IT 2072684A IT 8420726 A0 IT8420726 A0 IT 8420726A0
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- semiconductor devices
- producing semiconductor
- producing
- devices
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
- C07F7/1804—Compounds having Si-O-C linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07J—STEROIDS
- C07J51/00—Normal steroids with unmodified cyclopenta(a)hydrophenanthrene skeleton not provided for in groups C07J1/00 - C07J43/00
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/489,796 US4551416A (en) | 1981-05-22 | 1983-04-29 | Process for preparing semiconductors using photosensitive bodies |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8420726A0 true IT8420726A0 (it) | 1984-04-27 |
IT1206143B IT1206143B (it) | 1989-04-14 |
Family
ID=23945301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8420726A IT1206143B (it) | 1983-04-29 | 1984-04-27 | Procedimento per produrre dispositivi semiconduttori. |
Country Status (8)
Country | Link |
---|---|
US (1) | US4551416A (it) |
JP (2) | JPS6017445A (it) |
CA (1) | CA1219686A (it) |
DE (1) | DE3415791A1 (it) |
FR (1) | FR2545232A1 (it) |
GB (1) | GB2140929B (it) |
IT (1) | IT1206143B (it) |
NL (1) | NL8401365A (it) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4666820A (en) * | 1983-04-29 | 1987-05-19 | American Telephone And Telegraph Company, At&T Laboratories | Photosensitive element comprising a substrate and an alkaline soluble mixture |
DE3642184A1 (de) * | 1986-12-10 | 1988-06-23 | Basf Ag | Copolymerisate mit o-nitrocarbinolestergruppierungen und deren verwendung |
DE3701569A1 (de) * | 1987-01-21 | 1988-08-04 | Basf Ag | Copolymerisate mit o-nitrocarbinolestergruppierungen, deren verwendung sowie verfahren zur herstellung von halbleiterbauelementen |
DE3702035A1 (de) * | 1987-01-24 | 1988-08-04 | Basf Ag | Copolymerisate mit o-nitrocarbinolestergruppierungen und verfahren zur herstellung von zweilagenresisten sowie von halbleiterbauelementen |
JP2540199B2 (ja) * | 1988-02-25 | 1996-10-02 | アメリカン テレフォン アンド テレグラフ カムパニー | デバイスの製造方法 |
GB8812235D0 (en) * | 1988-05-24 | 1988-06-29 | Jones B L | Manufacturing electronic devices |
DE69029104T2 (de) * | 1989-07-12 | 1997-03-20 | Fuji Photo Film Co Ltd | Polysiloxane und positiv arbeitende Resistmasse |
US5397665A (en) * | 1990-04-27 | 1995-03-14 | Dai Nippon Printing Co., Ltd. | Photomask with pellicle and method of treating and storing the same |
JP2904948B2 (ja) * | 1991-03-28 | 1999-06-14 | コニカ株式会社 | ハロゲン化銀カラー写真感光材料の処理方法及び安定液 |
US5449834A (en) * | 1994-07-13 | 1995-09-12 | Ppg Industries, Inc. | Method of synthesizing 2,6-dinitro benzyl compounds |
US5600035A (en) * | 1994-07-13 | 1997-02-04 | Ppg Industries, Inc. | Positive photoactive compounds based on 2,6-dinitro benzyl groups and 2,5-dinitro benzyl groups |
KR970011972A (ko) * | 1995-08-11 | 1997-03-29 | 쯔지 하루오 | 투과형 액정 표시 장치 및 그 제조 방법 |
KR20010009339A (ko) * | 1999-07-09 | 2001-02-05 | 박찬구 | 카르복시산 유도체 및 그 제조방법 |
CN104471483A (zh) * | 2012-03-22 | 2015-03-25 | 科罗拉多大学董事会 | 液体沉积光刻 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1158843A (en) * | 1966-05-27 | 1969-07-23 | Agfa Gevaert Nv | Light-Sensitive Copying Material |
DE2150691C2 (de) * | 1971-10-12 | 1982-09-09 | Basf Ag, 6700 Ludwigshafen | Lichtempfindliches Gemisch und Verwendung eines lichtempfindlichen Gemisches zur Herstellung einer Flachdruckplatte |
GB1418169A (en) * | 1972-02-25 | 1975-12-17 | Hitachi Chemical Co Ltd | Resist image formation process and resin compositions and materials for use in said process |
DE2242394A1 (de) * | 1972-08-29 | 1974-03-14 | Basf Ag | Unter lichteinwirkung haertbare stoffgemische |
US3949143A (en) * | 1973-02-09 | 1976-04-06 | American Can Company | Epoxy resin coatings cured with phototropic aromatic nitro compounds |
US4086210A (en) * | 1976-05-10 | 1978-04-25 | Eastman Kodak Company | Radiation sensitive polymeric o-nitrophenyl acetals |
US4108839A (en) * | 1977-01-21 | 1978-08-22 | E. I. Du Pont De Nemours And Company | Photosensitive polyaldehydes and use in photoimaging |
DE2922746A1 (de) * | 1979-06-05 | 1980-12-11 | Basf Ag | Positiv arbeitendes schichtuebertragungsmaterial |
US4400461A (en) * | 1981-05-22 | 1983-08-23 | Bell Telephone Laboratories, Incorporated | Process of making semiconductor devices using photosensitive bodies |
FR2510275A1 (fr) * | 1981-07-27 | 1983-01-28 | Toyo Boseki | Composition de resine photosensible |
-
1983
- 1983-04-29 US US06/489,796 patent/US4551416A/en not_active Expired - Lifetime
-
1984
- 1984-04-16 CA CA000452061A patent/CA1219686A/en not_active Expired
- 1984-04-19 GB GB08410200A patent/GB2140929B/en not_active Expired
- 1984-04-25 FR FR8406505A patent/FR2545232A1/fr active Pending
- 1984-04-27 NL NL8401365A patent/NL8401365A/nl not_active Application Discontinuation
- 1984-04-27 DE DE19843415791 patent/DE3415791A1/de not_active Withdrawn
- 1984-04-27 IT IT8420726A patent/IT1206143B/it active
- 1984-04-28 JP JP59085205A patent/JPS6017445A/ja active Pending
- 1984-04-28 JP JP59085206A patent/JPS59208547A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
GB8410200D0 (en) | 1984-05-31 |
US4551416A (en) | 1985-11-05 |
JPS59208547A (ja) | 1984-11-26 |
DE3415791A1 (de) | 1984-10-31 |
GB2140929B (en) | 1986-02-19 |
FR2545232A1 (fr) | 1984-11-02 |
IT1206143B (it) | 1989-04-14 |
NL8401365A (nl) | 1984-11-16 |
CA1219686A (en) | 1987-03-24 |
JPS6017445A (ja) | 1985-01-29 |
GB2140929A (en) | 1984-12-05 |
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