IT201700103058A1 - Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems - Google Patents
Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio memsInfo
- Publication number
- IT201700103058A1 IT201700103058A1 IT102017000103058A IT201700103058A IT201700103058A1 IT 201700103058 A1 IT201700103058 A1 IT 201700103058A1 IT 102017000103058 A IT102017000103058 A IT 102017000103058A IT 201700103058 A IT201700103058 A IT 201700103058A IT 201700103058 A1 IT201700103058 A1 IT 201700103058A1
- Authority
- IT
- Italy
- Prior art keywords
- mems gyroscope
- circuit
- driving method
- gyroscope
- mems
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5649—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102017000103058A IT201700103058A1 (it) | 2017-09-14 | 2017-09-14 | Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems |
EP18188832.2A EP3460397B1 (en) | 2017-09-14 | 2018-08-14 | Driving circuit and method for a mems gyroscope and corresponding mems gyroscope |
US16/123,849 US10955244B2 (en) | 2017-09-14 | 2018-09-06 | Driving circuit, method for driving a MEMS gyroscope and a corresponding MEMS gyroscope |
CN201811050424.3A CN109506639B (zh) | 2017-09-14 | 2018-09-10 | 驱动电路、用于驱动mems陀螺仪的方法和对应的mems陀螺仪 |
CN201821473474.8U CN208847194U (zh) | 2017-09-14 | 2018-09-10 | 用于微机电***陀螺仪的驱动电路和微机电***陀螺仪 |
US17/179,225 US11841229B2 (en) | 2017-09-14 | 2021-02-18 | Driving circuit, method for driving a MEMS gyroscope and a corresponding MEMS gyroscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102017000103058A IT201700103058A1 (it) | 2017-09-14 | 2017-09-14 | Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems |
Publications (1)
Publication Number | Publication Date |
---|---|
IT201700103058A1 true IT201700103058A1 (it) | 2019-03-14 |
Family
ID=60813899
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT102017000103058A IT201700103058A1 (it) | 2017-09-14 | 2017-09-14 | Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems |
Country Status (4)
Country | Link |
---|---|
US (2) | US10955244B2 (it) |
EP (1) | EP3460397B1 (it) |
CN (2) | CN208847194U (it) |
IT (1) | IT201700103058A1 (it) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT201700103058A1 (it) * | 2017-09-14 | 2019-03-14 | St Microelectronics Srl | Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems |
DE102019210305A1 (de) * | 2019-07-11 | 2021-01-14 | Infineon Technologies Ag | Steuern eines Oszillationssystems |
CN111246336B (zh) * | 2020-02-27 | 2022-03-08 | 深迪半导体(绍兴)有限公司 | 耳机和电子设备 |
EP3882571B1 (en) * | 2020-03-16 | 2022-08-24 | Murata Manufacturing Co., Ltd. | Gyroscope with locked secondary oscillation frequency |
IT202100016880A1 (it) | 2021-06-28 | 2022-12-28 | St Microelectronics Srl | Giroscopio microelettromeccanico con anello risonante di pilotaggio ad ampiezza di oscillazione controllata e metodo per controllare un giroscopio microelettromeccanico |
IT202100016877A1 (it) * | 2021-06-28 | 2022-12-28 | St Microelectronics Srl | Circuito di pilotaggio per il controllo di un oscillatore mems di tipo risonante |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040088127A1 (en) * | 2002-06-25 | 2004-05-06 | The Regents Of The University Of California | Integrated low power digital gyro control electronics |
US20090217757A1 (en) * | 2008-02-29 | 2009-09-03 | Seiko Epson Corporation | Physical quantity measuring apparatus and electronic device |
US20170097245A1 (en) * | 2014-03-14 | 2017-04-06 | Northrop Grumman Litef Gmbh | Method for optimizing the switch-on time of a coriolis gyroscope and coriolis gyroscope suitable thereof |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1394898B1 (it) * | 2009-06-03 | 2012-07-20 | St Microelectronics Rousset | Giroscopio microelettromeccanico con attuazione a controllo di posizione e metodo per il controllo di un giroscopio microelettromeccanico |
US8539834B2 (en) * | 2010-02-15 | 2013-09-24 | Stmicroelectronics S.R.L. | Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope |
JP5638419B2 (ja) * | 2011-02-25 | 2014-12-10 | セイコーエプソン株式会社 | 信号処理回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器 |
ITTO20110685A1 (it) * | 2011-07-28 | 2013-01-29 | St Microelectronics Srl | Giroscopio microelettromeccanico con stadio di lettura perfezionato, e metodo |
ITTO20110979A1 (it) * | 2011-10-27 | 2013-04-28 | St Microelectronics Srl | Circuito di pilotaggio per un giroscopio microelettromeccanico e relativo giroscopio microelettromeccanico |
EP2647952B1 (en) * | 2012-04-05 | 2017-11-15 | Fairchild Semiconductor Corporation | Mems device automatic-gain control loop for mechanical amplitude drive |
WO2014006437A1 (en) * | 2012-07-04 | 2014-01-09 | Freescale Semiconductor, Inc. | A digital sample clock generator, a vibration gyroscope circuitry comprising such digital sample clock generator, an associated apparatus, an associated semiconductor device and associated methods |
US9146109B2 (en) * | 2012-11-26 | 2015-09-29 | Stmicroelectronics S.R.L. | Microelectromechanical gyroscope with improved start-up phase, system including the microelectromechanical gyroscope, and method for speeding-up the start up phase |
CN105899910B (zh) * | 2013-11-22 | 2019-01-18 | 恩智浦美国有限公司 | Mems陀螺仪的带内跳动去除 |
US9618533B2 (en) * | 2014-06-26 | 2017-04-11 | Lumedyne Technologies Incorporated | Systems and methods for determining rotation from nonlinear periodic signals |
US9644965B2 (en) * | 2014-10-09 | 2017-05-09 | Nxp Usa, Inc. | System comprising a mechanical resonator and method therefor |
US9835454B2 (en) * | 2015-02-09 | 2017-12-05 | Invensense, Inc. | High-Q MEMS gyroscope |
JP6589333B2 (ja) * | 2015-03-30 | 2019-10-16 | セイコーエプソン株式会社 | 回路装置、電子機器及び移動体 |
ITUB20152221A1 (it) * | 2015-07-15 | 2017-01-15 | St Microelectronics Srl | Circuito sfasatore di 90° e relativo metodo di sfasamento di 90° |
IT201700103058A1 (it) * | 2017-09-14 | 2019-03-14 | St Microelectronics Srl | Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems |
-
2017
- 2017-09-14 IT IT102017000103058A patent/IT201700103058A1/it unknown
-
2018
- 2018-08-14 EP EP18188832.2A patent/EP3460397B1/en active Active
- 2018-09-06 US US16/123,849 patent/US10955244B2/en active Active
- 2018-09-10 CN CN201821473474.8U patent/CN208847194U/zh active Active
- 2018-09-10 CN CN201811050424.3A patent/CN109506639B/zh active Active
-
2021
- 2021-02-18 US US17/179,225 patent/US11841229B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040088127A1 (en) * | 2002-06-25 | 2004-05-06 | The Regents Of The University Of California | Integrated low power digital gyro control electronics |
US20090217757A1 (en) * | 2008-02-29 | 2009-09-03 | Seiko Epson Corporation | Physical quantity measuring apparatus and electronic device |
US20170097245A1 (en) * | 2014-03-14 | 2017-04-06 | Northrop Grumman Litef Gmbh | Method for optimizing the switch-on time of a coriolis gyroscope and coriolis gyroscope suitable thereof |
Also Published As
Publication number | Publication date |
---|---|
CN109506639B (zh) | 2023-01-31 |
EP3460397B1 (en) | 2020-09-30 |
US10955244B2 (en) | 2021-03-23 |
US11841229B2 (en) | 2023-12-12 |
US20190078889A1 (en) | 2019-03-14 |
CN208847194U (zh) | 2019-05-10 |
CN109506639A (zh) | 2019-03-22 |
EP3460397A1 (en) | 2019-03-27 |
US20210172738A1 (en) | 2021-06-10 |
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