IT1313766B1 - VAPORIZATION DEVICE. - Google Patents

VAPORIZATION DEVICE.

Info

Publication number: IT1313766B1
Authority: IT; Italy
Prior art keywords: vaporization device; vaporization
Prior art date: 1998-10-20

Application number

IT1999MI002081A

Other languages

Italian (it)

Inventor

Gunter Klemm

Klaus Oberle

Jurgen Krischer

Thomas Vogt

Original Assignee

Leybold Systems Gmbh

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-10-20

Filing date

1999-10-06

Publication date

2002-09-17

1999-10-06 Application filed by Leybold Systems Gmbh filed Critical Leybold Systems Gmbh

1999-10-06 Publication of ITMI992081A0 publication Critical patent/ITMI992081A0/en

2001-04-06 Publication of ITMI992081A1 publication Critical patent/ITMI992081A1/en

2002-09-17 Application granted granted Critical

2002-09-17 Publication of IT1313766B1 publication Critical patent/IT1313766B1/en

Links

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Organic Chemistry (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Engineering & Computer Science (AREA)
Health & Medical Sciences (AREA)
Medicinal Chemistry (AREA)
Polymers & Plastics (AREA)
Physical Vapour Deposition (AREA)
Chemical Vapour Deposition (AREA)
Nozzles (AREA)
Mechanical Treatment Of Semiconductor (AREA)

IT1999MI002081A 1998-10-20 1999-10-06 VAPORIZATION DEVICE. IT1313766B1 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE19848177A DE19848177A1 (en)	1998-10-20	1998-10-20	Vapor deposition of release agent for capacitor film has a closed hollow body evaporation vessel connected to the jet body with a shut off device

Publications (3)

Publication Number	Publication Date
ITMI992081A0 ITMI992081A0 (en)	1999-10-06
ITMI992081A1 ITMI992081A1 (en)	2001-04-06
IT1313766B1 true IT1313766B1 (en)	2002-09-17

Family

ID=7884969

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT1999MI002081A IT1313766B1 (en)	1998-10-20	1999-10-06	VAPORIZATION DEVICE.

Country Status (6)

Country	Link
JP (1)	JP4230068B2 (en)
KR (1)	KR100614131B1 (en)
CN (1)	CN1240872C (en)
DE (1)	DE19848177A1 (en)
GB (1)	GB2342929B (en)
IT (1)	IT1313766B1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10128091C1 (en) *	2001-06-11	2002-10-02	Applied Films Gmbh & Co Kg	Device for coating a flat substrate used in the production of flat TV screens with organic illuminating diodes comprises a fixed vaporizer source for vaporizing materials
DE10330401B3 (en) *	2003-07-04	2005-02-24	Applied Films Gmbh & Co. Kg	Method and device for the area-wise application of release agents
CN100412226C (en) *	2004-10-18	2008-08-20	中华映管股份有限公司	Method for manufacturing front substrate of plasma display, vapor deposition process and apparatus therefor
CN100491584C (en) *	2005-09-22	2009-05-27	中国科学院半导体研究所	Method for preparing different refractivity film layer
ATE520799T1 (en) *	2005-10-26	2011-09-15	Applied Materials Gmbh & Co Kg	DEVICE FOR STEAMING SUBSTRATES
EP1788113B1 (en) *	2005-10-26	2011-05-11	Applied Materials GmbH & Co. KG	Evaporator with a container for receiving the evaporation material
DE102008026001B4 (en) *	2007-09-04	2012-02-16	Von Ardenne Anlagentechnik Gmbh	Method and device for producing and processing layers on substrates under a defined process atmosphere and heating element
WO2011065998A1 (en) *	2008-12-18	2011-06-03	Veeco Instruments Inc.	Linear deposition source
WO2011065999A1 (en) *	2008-12-18	2011-06-03	Veeco Instruments Inc.	Linear deposition source
CN102712993A (en) *	2009-11-30	2012-10-03	维易科精密仪器国际贸易(上海)有限公司	Linear deposition source
FR2956412B1 (en) *	2010-02-16	2012-04-06	Astron Fiamm Safety	CONSTANT VOLUME SHUT-OFF VALVE OF A VAPOR PHASE DEPOSITION SOURCE
TWI600470B (en) *	2016-05-19	2017-10-01	康廷熊	Coating apparatus and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3922187A1 (en) *	1989-07-06	1991-01-17	Leybold Ag	DEVICE FOR PRODUCING METAL-FREE STRIPS ON FILM COATS COATED IN A VACUUM, IN PARTICULAR FOR CAPACITORS
DE4309717C2 (en) *	1993-03-25	2002-03-28	Unaxis Deutschland Holding	Process for evaporating a layer
US5863336A (en) *	1996-04-08	1999-01-26	General Electric Company	Apparatus for fabrication of superconductor

1998
- 1998-10-20 DE DE19848177A patent/DE19848177A1/en not_active Withdrawn
1999
- 1999-10-06 IT IT1999MI002081A patent/IT1313766B1/en active
- 1999-10-12 KR KR1019990043933A patent/KR100614131B1/en not_active IP Right Cessation
- 1999-10-18 GB GB9924608A patent/GB2342929B/en not_active Expired - Lifetime
- 1999-10-18 JP JP29559499A patent/JP4230068B2/en not_active Expired - Fee Related
- 1999-10-19 CN CNB991215710A patent/CN1240872C/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
CN1240872C (en)	2006-02-08
DE19848177A1 (en)	2000-04-27
ITMI992081A0 (en)	1999-10-06
CN1251866A (en)	2000-05-03
JP4230068B2 (en)	2009-02-25
GB2342929A (en)	2000-04-26
KR100614131B1 (en)	2006-08-22
JP2000129429A (en)	2000-05-09
GB2342929B (en)	2003-05-21
GB9924608D0 (en)	1999-12-22
KR20000028990A (en)	2000-05-25
ITMI992081A1 (en)	2001-04-06

Publication	Publication Date	Title
IT1307994B1 (en)	2001-11-29	RESPONDING DEVICE.
NL1014773A1 (en)	2000-10-03	Navigation device.
BR7903354Y1 (en)	2008-11-18	presentation device.
IT1310460B1 (en)	2002-02-18	GUMMATOR DEVICE.
IT1313766B1 (en)	2002-09-17	VAPORIZATION DEVICE.
IT1307732B1 (en)	2001-11-19	FILATOIO WITH CONDENSER DEVICE.
IT1305241B1 (en)	2001-04-19	INSECTICIDE DEVICE.
IT1304443B1 (en)	2001-03-19	CIGARETTE GROUP FORMING DEVICE.
IT1295221B1 (en)	1999-05-04	GUMMATOR DEVICE.
ITTO991044A0 (en)	1999-11-29	SURFACE FIXING DEVICE.
IT1312039B1 (en)	2002-04-04	FILATOIO WITH CONDENSER DEVICE.
IT1303712B1 (en)	2001-02-23	LOCKING DEVICE.
IT1307730B1 (en)	2001-11-19	FILATOIO WITH CONDENSER DEVICE.
IT248808Y1 (en)	2003-02-20	POWER DEVICE.
IT1318300B1 (en)	2003-07-28	FILATOIO WITH CONDENSER DEVICE.
IT1316312B1 (en)	2003-04-10	VAPORIZATION DEVICE
IT1307599B1 (en)	2001-11-14	VENTILATION DEVICE.
IT1307915B1 (en)	2001-11-29	FILATOIO WITH CONDENSER DEVICE.
IT1321116B1 (en)	2003-12-30	STEERING DEVICE.
IT1319274B1 (en)	2003-09-26	FILATOIO WITH CONDENSER DEVICE.
ES1043699Y (en)	2000-06-16	NEBULIZING DEVICE.
ITFO980009U1 (en)	1999-10-14	ANTI-BRUSHING DEVICE.
IT245879Y1 (en)	2002-03-26	FOOTBALL-ACCESSORY DEVICE.
IT1291240B1 (en)	1998-12-30	GUMMATOR DEVICE.
NL1008923A1 (en)	1999-10-19	Transport device.