IT1295031B1 - Procedimento per la fabbricazione di un dispositivo di misura di pressione dotato di elemento risonante - Google Patents

Procedimento per la fabbricazione di un dispositivo di misura di pressione dotato di elemento risonante

Info

Publication number
IT1295031B1
IT1295031B1 IT97MI002121A ITMI972121A IT1295031B1 IT 1295031 B1 IT1295031 B1 IT 1295031B1 IT 97MI002121 A IT97MI002121 A IT 97MI002121A IT MI972121 A ITMI972121 A IT MI972121A IT 1295031 B1 IT1295031 B1 IT 1295031B1
Authority
IT
Italy
Prior art keywords
procedure
manufacturing
measuring device
pressure measuring
device equipped
Prior art date
Application number
IT97MI002121A
Other languages
English (en)
Inventor
Bortoli Eros De
Original Assignee
Abb Kent Taylor Spa
Consorz Abb Sviluppo Tecnol
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abb Kent Taylor Spa, Consorz Abb Sviluppo Tecnol filed Critical Abb Kent Taylor Spa
Priority to IT97MI002121A priority Critical patent/IT1295031B1/it
Priority to EP98203175A priority patent/EP0903568A3/en
Priority to US09/186,647 priority patent/US6207470B1/en
Publication of ITMI972121A1 publication Critical patent/ITMI972121A1/it
Application granted granted Critical
Publication of IT1295031B1 publication Critical patent/IT1295031B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
IT97MI002121A 1997-09-18 1997-09-18 Procedimento per la fabbricazione di un dispositivo di misura di pressione dotato di elemento risonante IT1295031B1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT97MI002121A IT1295031B1 (it) 1997-09-18 1997-09-18 Procedimento per la fabbricazione di un dispositivo di misura di pressione dotato di elemento risonante
EP98203175A EP0903568A3 (en) 1997-09-18 1998-09-18 Method for manufacturing a pressure measure device equipped with a resonating element
US09/186,647 US6207470B1 (en) 1997-09-18 1998-11-06 Method for manufacturing a pressure-measuring device equipped with a resonating element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT97MI002121A IT1295031B1 (it) 1997-09-18 1997-09-18 Procedimento per la fabbricazione di un dispositivo di misura di pressione dotato di elemento risonante
US09/186,647 US6207470B1 (en) 1997-09-18 1998-11-06 Method for manufacturing a pressure-measuring device equipped with a resonating element

Publications (2)

Publication Number Publication Date
ITMI972121A1 ITMI972121A1 (it) 1999-03-18
IT1295031B1 true IT1295031B1 (it) 1999-04-27

Family

ID=26331540

Family Applications (1)

Application Number Title Priority Date Filing Date
IT97MI002121A IT1295031B1 (it) 1997-09-18 1997-09-18 Procedimento per la fabbricazione di un dispositivo di misura di pressione dotato di elemento risonante

Country Status (3)

Country Link
US (1) US6207470B1 (it)
EP (1) EP0903568A3 (it)
IT (1) IT1295031B1 (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6498086B1 (en) * 2001-07-26 2002-12-24 Intel Corporation Use of membrane properties to reduce residual stress in an interlayer region
DE102004006197B4 (de) * 2003-07-04 2013-10-17 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Drucksensors
JP2006228776A (ja) * 2005-02-15 2006-08-31 Advantest Corp 荷電粒子ビーム露光装置及び荷電粒子ビーム露光方法
US7042230B1 (en) 2005-02-28 2006-05-09 Alain Izadnegahdar Multi-parameter sensing system
US7069790B1 (en) * 2005-05-17 2006-07-04 Honeywell International Inc. Systems and methods for measuring relative thermal expansion coefficient of low thermal coefficient of expansion materials
DE102009002990A1 (de) * 2009-05-11 2010-11-18 Robert Bosch Gmbh Hochdrucksensor
KR102207928B1 (ko) 2014-08-13 2021-01-26 삼성전자주식회사 음향 센싱 소자 및 주파수 정보 획득 방법
JP6465097B2 (ja) * 2016-11-21 2019-02-06 横河電機株式会社 振動式トランスデューサ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69105809T2 (de) * 1990-05-10 1995-05-11 Yokogawa Electric Corp Druckaufnehmer mit schwingendem Element.
DE4333099A1 (de) * 1993-09-29 1995-03-30 Bosch Gmbh Robert Kraftsensor und Verfahren zur Herstellung eines Kraftsensors
JP3551527B2 (ja) * 1994-04-27 2004-08-11 株式会社デンソー 半導体感歪センサの製造方法
US5646072A (en) * 1995-04-03 1997-07-08 Motorola, Inc. Electronic sensor assembly having metal interconnections isolated from adverse media
AU4801297A (en) * 1996-10-07 1998-05-05 Lucas Novasensor Silicon at least 5 micron high acute cavity with channel by oxidizing fusion bonding and stop etching
IT1287123B1 (it) * 1996-10-31 1998-08-04 Abb Kent Taylor Spa Dispositivo per la misura di una pressione
US6069392A (en) * 1997-04-11 2000-05-30 California Institute Of Technology Microbellows actuator
US5994161A (en) * 1997-09-03 1999-11-30 Motorola, Inc. Temperature coefficient of offset adjusted semiconductor device and method thereof
US5945605A (en) * 1997-11-19 1999-08-31 Sensym, Inc. Sensor assembly with sensor boss mounted on substrate
TW374197B (en) * 1997-12-11 1999-11-11 Ind Tech Res Inst Manufacturing process of integrated micro-flow control module
JPH11201846A (ja) * 1998-01-12 1999-07-30 Mitsubishi Electric Corp 半導体圧力検出装置

Also Published As

Publication number Publication date
EP0903568A2 (en) 1999-03-24
ITMI972121A1 (it) 1999-03-18
US6207470B1 (en) 2001-03-27
EP0903568A3 (en) 1999-12-01

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Legal Events

Date Code Title Description
0001 Granted