IT1263789B - Metodo e apparecchio comprendente due sensori magnetici ed un misuratore laser per misurare lo spessore di un film - Google Patents
Metodo e apparecchio comprendente due sensori magnetici ed un misuratore laser per misurare lo spessore di un filmInfo
- Publication number
- IT1263789B IT1263789B ITMI930092A ITMI930092A IT1263789B IT 1263789 B IT1263789 B IT 1263789B IT MI930092 A ITMI930092 A IT MI930092A IT MI930092 A ITMI930092 A IT MI930092A IT 1263789 B IT1263789 B IT 1263789B
- Authority
- IT
- Italy
- Prior art keywords
- film
- thickness
- magnetic sensors
- measure
- distance
- Prior art date
Links
- 239000010408 film Substances 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Per misurare lo spessore di un film sottile l'invenzione prevede un'apparecchiatura comprendente un cilindro metallico sul quale viene fatto passare il film ed una testa di scansione che si muove lungo un percorso parallelo all'asse del cilindro e che comprende una coppia di sensori magnetici accoppiati ad un sensore laser posto fra di essi. I sensori magnetici rilevano la distanza della superficie del cilindro mentre il laser rileva la distanza della superficie del film. Dalle letture dei sensori magnetici si ricava, per interpolazione, la distanza della superficie del cilindro nella posizione in corrispondenza della quale si effettua la lettura laser e dalla differenza fra questa e il valore precedente si ricava lo spessore del film.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI930092A IT1263789B (it) | 1993-01-22 | 1993-01-22 | Metodo e apparecchio comprendente due sensori magnetici ed un misuratore laser per misurare lo spessore di un film |
AT94100712T ATE158075T1 (de) | 1993-01-22 | 1994-01-19 | Verfahren und vorrichtung, zwei magnetische sensoren und eine laser-messeinrichtung enthaltend, für das messen der dicke eines filmes |
EP94100712A EP0607938B1 (en) | 1993-01-22 | 1994-01-19 | Method and apparatus comprising two magnetic sensors and one laser meter for measuring the thickness of a film |
DE69405415T DE69405415T2 (de) | 1993-01-22 | 1994-01-19 | Verfahren und Vorrichtung, zwei magnetische Sensoren und eine Laser-Messeinrichtung enthaltend, für das Messen der Dicke eines Filmes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI930092A IT1263789B (it) | 1993-01-22 | 1993-01-22 | Metodo e apparecchio comprendente due sensori magnetici ed un misuratore laser per misurare lo spessore di un film |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI930092A0 ITMI930092A0 (it) | 1993-01-22 |
ITMI930092A1 ITMI930092A1 (it) | 1994-07-22 |
IT1263789B true IT1263789B (it) | 1996-08-29 |
Family
ID=11364718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI930092A IT1263789B (it) | 1993-01-22 | 1993-01-22 | Metodo e apparecchio comprendente due sensori magnetici ed un misuratore laser per misurare lo spessore di un film |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0607938B1 (it) |
AT (1) | ATE158075T1 (it) |
DE (1) | DE69405415T2 (it) |
IT (1) | IT1263789B (it) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1283347B1 (it) * | 1996-07-29 | 1998-04-17 | Electronic Systems Spa | Metodo ed apperecchiatura per misurare con precisione un film che avanza,su tutta la sua superficie |
AT408580B (de) * | 1997-11-21 | 2002-01-25 | Bierbaumer Hans Peter Dr | Messvorrichtung zumindest zur ermittlung der dicke einer bahn sowie verfahren hierfür |
US20020190710A1 (en) * | 2001-02-13 | 2002-12-19 | Asm Automation Sensorik Messtechnik Gmbh | Magnetic length measuring device |
EP2837484B1 (en) | 2013-08-14 | 2020-10-21 | Electronic Systems S.p.A. | Apparatus for automatically analyzing extruded films |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61254812A (ja) * | 1985-05-08 | 1986-11-12 | Meisan Kk | 非磁性体シ−ト厚さ連続測定装置 |
JPH0648185B2 (ja) * | 1988-10-12 | 1994-06-22 | 明産株式会社 | シート厚さ測定装置 |
US4977853A (en) * | 1989-06-01 | 1990-12-18 | E. I. Du Pont De Nemours And Company | Non-contact wet or dry film thickness measuring device |
US5485082A (en) * | 1990-04-11 | 1996-01-16 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Method of calibrating a thickness measuring device and device for measuring or monitoring the thickness of layers, tapes, foils, and the like |
-
1993
- 1993-01-22 IT ITMI930092A patent/IT1263789B/it active IP Right Grant
-
1994
- 1994-01-19 EP EP94100712A patent/EP0607938B1/en not_active Expired - Lifetime
- 1994-01-19 AT AT94100712T patent/ATE158075T1/de not_active IP Right Cessation
- 1994-01-19 DE DE69405415T patent/DE69405415T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69405415T2 (de) | 1998-01-22 |
ITMI930092A0 (it) | 1993-01-22 |
ITMI930092A1 (it) | 1994-07-22 |
EP0607938A1 (en) | 1994-07-27 |
ATE158075T1 (de) | 1997-09-15 |
EP0607938B1 (en) | 1997-09-10 |
DE69405415D1 (de) | 1997-10-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970122 |