IT1263301B - Procedimento e apparecchiatura per l'abbattimento di gas contenuti nf3 - Google Patents
Procedimento e apparecchiatura per l'abbattimento di gas contenuti nf3Info
- Publication number
- IT1263301B IT1263301B ITTO920734A ITTO920734A IT1263301B IT 1263301 B IT1263301 B IT 1263301B IT TO920734 A ITTO920734 A IT TO920734A IT TO920734 A ITTO920734 A IT TO920734A IT 1263301 B IT1263301 B IT 1263301B
- Authority
- IT
- Italy
- Prior art keywords
- equipment
- gas containing
- removing gas
- zro2
- pass
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 abstract 3
- 239000007789 gas Substances 0.000 abstract 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 abstract 3
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000003682 fluorination reaction Methods 0.000 abstract 1
- 150000002222 fluorine compounds Chemical class 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 229910001385 heavy metal Inorganic materials 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000007858 starting material Substances 0.000 abstract 1
Landscapes
- Silicon Compounds (AREA)
Abstract
PROCEDIMENTO E APPARECCHIATURA PER L'ABBATTIMENTO DI GAS CONTENENTI NF3, IN PARTICOLARE GAS PRODOTTI DALLE REAZIONI DI FLUORURAZIONE MEDIANTE NF3 DI PRODOTTI DI PARTENZA PER LA FABBRICAZIONE DI VETRI A BASE DI FLUORURI DI METALLI PESANTI, IN CUI I GAS VENGONO FATTI PASSARE PRIMA ATTRAVERSO ZrO2, SCALDATO A TEMPERATURA SUPERIORE A 300°, PER DECOMPORRE NF3, E POI ATTRAVERSO NaOH, PER ABBATTERE OSSIDI DI AZOTO PRODOTTI DALLA REAZIONE TRA ZrO2 e NF3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITTO920734A IT1263301B (it) | 1992-09-04 | 1992-09-04 | Procedimento e apparecchiatura per l'abbattimento di gas contenuti nf3 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITTO920734A IT1263301B (it) | 1992-09-04 | 1992-09-04 | Procedimento e apparecchiatura per l'abbattimento di gas contenuti nf3 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| ITTO920734A0 ITTO920734A0 (it) | 1992-09-04 |
| ITTO920734A1 ITTO920734A1 (it) | 1994-03-04 |
| IT1263301B true IT1263301B (it) | 1996-08-05 |
Family
ID=11410706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ITTO920734A IT1263301B (it) | 1992-09-04 | 1992-09-04 | Procedimento e apparecchiatura per l'abbattimento di gas contenuti nf3 |
Country Status (1)
| Country | Link |
|---|---|
| IT (1) | IT1263301B (it) |
-
1992
- 1992-09-04 IT ITTO920734A patent/IT1263301B/it active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| ITTO920734A0 (it) | 1992-09-04 |
| ITTO920734A1 (it) | 1994-03-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 0001 | Granted | ||
| TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19971031 |