IT1240811B - Metodo per la deposizione di strati sottili con assistenza di ioni da plasma rf. - Google Patents

Metodo per la deposizione di strati sottili con assistenza di ioni da plasma rf.

Info

Publication number
IT1240811B
IT1240811B IT47800A IT4780090A IT1240811B IT 1240811 B IT1240811 B IT 1240811B IT 47800 A IT47800 A IT 47800A IT 4780090 A IT4780090 A IT 4780090A IT 1240811 B IT1240811 B IT 1240811B
Authority
IT
Italy
Prior art keywords
assistance
ions
deposition
plasma
thin layers
Prior art date
Application number
IT47800A
Other languages
English (en)
Other versions
IT9047800A0 (it
IT9047800A1 (it
Inventor
Mauro Varasi
Original Assignee
Selenia Ind Elettroniche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Selenia Ind Elettroniche filed Critical Selenia Ind Elettroniche
Priority to IT47800A priority Critical patent/IT1240811B/it
Publication of IT9047800A0 publication Critical patent/IT9047800A0/it
Priority to EP91104613A priority patent/EP0451587A3/en
Publication of IT9047800A1 publication Critical patent/IT9047800A1/it
Application granted granted Critical
Publication of IT1240811B publication Critical patent/IT1240811B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT47800A 1990-03-28 1990-03-28 Metodo per la deposizione di strati sottili con assistenza di ioni da plasma rf. IT1240811B (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT47800A IT1240811B (it) 1990-03-28 1990-03-28 Metodo per la deposizione di strati sottili con assistenza di ioni da plasma rf.
EP91104613A EP0451587A3 (en) 1990-03-28 1991-03-24 Method for depositing a thin film on a substrate employing radio frequency excited gaseous plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT47800A IT1240811B (it) 1990-03-28 1990-03-28 Metodo per la deposizione di strati sottili con assistenza di ioni da plasma rf.

Publications (3)

Publication Number Publication Date
IT9047800A0 IT9047800A0 (it) 1990-03-28
IT9047800A1 IT9047800A1 (it) 1991-09-28
IT1240811B true IT1240811B (it) 1993-12-17

Family

ID=11262590

Family Applications (1)

Application Number Title Priority Date Filing Date
IT47800A IT1240811B (it) 1990-03-28 1990-03-28 Metodo per la deposizione di strati sottili con assistenza di ioni da plasma rf.

Country Status (2)

Country Link
EP (1) EP0451587A3 (it)
IT (1) IT1240811B (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITRM20010060A1 (it) * 2001-02-06 2001-05-07 Carlo Misiano Perfezionamento di un metodo e apparato per la deposizione di film sottili, soprattutto in condizioni reattive.
WO2023156117A1 (en) * 2022-02-18 2023-08-24 Evatec Ag Vacuum layer deposition apparatus and method of depositing a layer on a substrate, especially on a substrate comprising indentations in the surface to be coated

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3329601A (en) * 1964-09-15 1967-07-04 Donald M Mattox Apparatus for coating a cathodically biased substrate from plasma of ionized coatingmaterial
US3772174A (en) * 1971-04-21 1973-11-13 Nasa Deposition of alloy films
US3750623A (en) * 1972-02-11 1973-08-07 Mc Donnell Douglas Corp Glow discharge coating apparatus
US4170662A (en) * 1974-11-05 1979-10-09 Eastman Kodak Company Plasma plating
IL71530A (en) * 1984-04-12 1987-09-16 Univ Ramot Method and apparatus for surface-treating workpieces
US4667620A (en) * 1985-10-29 1987-05-26 Cosden Technology, Inc. Method and apparatus for making plastic containers having decreased gas permeability
DE3700633C2 (de) * 1987-01-12 1997-02-20 Reinar Dr Gruen Verfahren und Vorrichtung zum schonenden Beschichten elektrisch leitender Gegenstände mittels Plasma
ATE98303T1 (de) * 1989-03-03 1993-12-15 Balzers Hochvakuum Verfahren zur beschichtung von hartmetallgrundkoerpern und hartmetallwerkzeug hergestellt nach dem verfahren.

Also Published As

Publication number Publication date
IT9047800A0 (it) 1990-03-28
EP0451587A3 (en) 1994-12-21
EP0451587A2 (en) 1991-10-16
IT9047800A1 (it) 1991-09-28

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Legal Events

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0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970128