IL119672A - Method and apparatus for the laser processing of substrate surfaces - Google Patents

Method and apparatus for the laser processing of substrate surfaces

Info

Publication number
IL119672A
IL119672A IL11967296A IL11967296A IL119672A IL 119672 A IL119672 A IL 119672A IL 11967296 A IL11967296 A IL 11967296A IL 11967296 A IL11967296 A IL 11967296A IL 119672 A IL119672 A IL 119672A
Authority
IL
Israel
Prior art keywords
laser processing
substrate surfaces
substrate
laser
processing
Prior art date
Application number
IL11967296A
Other languages
English (en)
Other versions
IL119672A0 (en
Inventor
Dov Zahavi
Natalie Levinsohn
Shay Gilai
Original Assignee
Oramir Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oramir Semiconductor Ltd filed Critical Oramir Semiconductor Ltd
Priority to IL11967296A priority Critical patent/IL119672A/xx
Publication of IL119672A0 publication Critical patent/IL119672A0/xx
Priority to AU48822/97A priority patent/AU4882297A/en
Priority to KR1019997004443A priority patent/KR20000069043A/ko
Priority to EP97911418A priority patent/EP1007269A1/fr
Priority to PCT/IL1997/000365 priority patent/WO1998022254A1/fr
Priority to JP52341798A priority patent/JP2001513026A/ja
Priority to US09/314,205 priority patent/US6450180B1/en
Publication of IL119672A publication Critical patent/IL119672A/xx

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Drying Of Semiconductors (AREA)
IL11967296A 1996-11-21 1996-11-21 Method and apparatus for the laser processing of substrate surfaces IL119672A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IL11967296A IL119672A (en) 1996-11-21 1996-11-21 Method and apparatus for the laser processing of substrate surfaces
AU48822/97A AU4882297A (en) 1996-11-21 1997-11-12 Method and apparatus for the laser processing of substrate surfaces
KR1019997004443A KR20000069043A (ko) 1996-11-21 1997-11-12 기판 표면의 레이저 처리 방법 및 장치
EP97911418A EP1007269A1 (fr) 1996-11-21 1997-11-12 Procede et dispositif servant a effectuer le traitement laser de surfaces de substrats
PCT/IL1997/000365 WO1998022254A1 (fr) 1996-11-21 1997-11-12 Procede et dispositif servant a effectuer le traitement laser de surfaces de substrats
JP52341798A JP2001513026A (ja) 1996-11-21 1997-11-12 基板表面のレーザ処理方法および装置
US09/314,205 US6450180B1 (en) 1996-11-21 1999-05-19 Method and apparatus for the laser processing of substrate surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL11967296A IL119672A (en) 1996-11-21 1996-11-21 Method and apparatus for the laser processing of substrate surfaces

Publications (2)

Publication Number Publication Date
IL119672A0 IL119672A0 (en) 1997-02-18
IL119672A true IL119672A (en) 2000-02-29

Family

ID=11069507

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11967296A IL119672A (en) 1996-11-21 1996-11-21 Method and apparatus for the laser processing of substrate surfaces

Country Status (7)

Country Link
US (1) US6450180B1 (fr)
EP (1) EP1007269A1 (fr)
JP (1) JP2001513026A (fr)
KR (1) KR20000069043A (fr)
AU (1) AU4882297A (fr)
IL (1) IL119672A (fr)
WO (1) WO1998022254A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL123416A0 (en) 1998-02-23 1998-09-24 Oramir Semiconductor Ltd Multi laser surface treatment in ambient fast flowing photoreactive gases
US7009141B1 (en) * 2001-10-13 2006-03-07 General Lasertronics Corp. Rotary scanning laser head with coaxial refractive optics
GB0222341D0 (en) * 2002-09-26 2002-11-06 British Nuclear Fuels Plc Surface treatment of concrete
CN101835554B (zh) 2007-10-26 2012-08-22 松下电器产业株式会社 金属粉末烧结部件的制造装置及制造方法
CN110116117A (zh) * 2019-06-06 2019-08-13 哈尔滨工业大学 一种激光复合清洗***及方法
CN114226359B (zh) * 2021-12-10 2023-04-07 武汉凌云光电科技有限责任公司 一种用于去除电池测试探针污染物的清理***和清理方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE200089C (fr)
GB276078A (en) 1926-05-19 1927-08-19 Lewis Cary Myers Improvements in paper feeding and guiding mechanism for typewriting machines
DE3514824A1 (de) 1985-04-24 1986-11-06 Siemens Ag Verfahren zur bildung von schmalen, metallfreien streifen in der metallschicht von kunststoffolien
EP0276078A1 (fr) * 1987-01-21 1988-07-27 CMB Foodcan plc Soudage continu
US4857697A (en) 1987-01-21 1989-08-15 Metal Box Public Limited Company Continuous seam welding apparatus and methods
IL84255A (en) * 1987-10-23 1993-02-21 Galram Technology Ind Ltd Process for removal of post- baked photoresist layer
US4914270A (en) * 1988-11-08 1990-04-03 University Of Southern California Method and apparatus for shaping articles using a laser beam
US5232674A (en) * 1989-12-20 1993-08-03 Fujitsu Limited Method of improving surface morphology of laser irradiated surface
US5474549A (en) * 1991-07-09 1995-12-12 Laserscope Method and system for scanning a laser beam for controlled distribution of laser dosage
AU7682594A (en) * 1993-09-08 1995-03-27 Uvtech Systems, Inc. Surface processing

Also Published As

Publication number Publication date
KR20000069043A (ko) 2000-11-25
IL119672A0 (en) 1997-02-18
WO1998022254A1 (fr) 1998-05-28
JP2001513026A (ja) 2001-08-28
AU4882297A (en) 1998-06-10
US6450180B1 (en) 2002-09-17
EP1007269A1 (fr) 2000-06-14

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Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees