ID21012A - Aparatus pengangkut - Google Patents

Aparatus pengangkut

Info

Publication number
ID21012A
ID21012A IDP981324A ID981324A ID21012A ID 21012 A ID21012 A ID 21012A ID P981324 A IDP981324 A ID P981324A ID 981324 A ID981324 A ID 981324A ID 21012 A ID21012 A ID 21012A
Authority
ID
Indonesia
Prior art keywords
aparatus
transport
aparatus transport
Prior art date
Application number
IDP981324A
Other languages
English (en)
Inventor
Minoru Yoshida
Takeshi Doi
Original Assignee
Innotech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innotech Corp filed Critical Innotech Corp
Publication of ID21012A publication Critical patent/ID21012A/id

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Ventilation (AREA)
IDP981324A 1997-10-07 1998-10-05 Aparatus pengangkut ID21012A (id)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9290460A JPH11111809A (ja) 1997-10-07 1997-10-07 搬送装置

Publications (1)

Publication Number Publication Date
ID21012A true ID21012A (id) 1999-04-08

Family

ID=17756315

Family Applications (1)

Application Number Title Priority Date Filing Date
IDP981324A ID21012A (id) 1997-10-07 1998-10-05 Aparatus pengangkut

Country Status (9)

Country Link
EP (1) EP0908931A3 (id)
JP (1) JPH11111809A (id)
KR (1) KR19990036696A (id)
CN (1) CN1075665C (id)
AU (1) AU707884B2 (id)
CA (1) CA2249771A1 (id)
ID (1) ID21012A (id)
SG (1) SG67570A1 (id)
TW (1) TW447007B (id)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19900804C2 (de) * 1999-01-12 2000-10-19 Siemens Ag Fördersystem
US6135698A (en) * 1999-04-30 2000-10-24 Asyst Technologies, Inc. Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications
EP1120829A4 (en) * 1999-08-10 2009-05-27 Ibiden Co Ltd CERAMIC PLATE FOR DEVICE FOR PRODUCING SEMICONDUCTORS
JP2004356606A (ja) * 2003-04-03 2004-12-16 Seiko Epson Corp 製造装置及び製造方法
CN107673073A (zh) * 2017-09-16 2018-02-09 合肥惠科金扬科技有限公司 一种液晶面板输送装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3418243A1 (de) * 1983-05-20 1984-11-22 Varian Associates, Inc., Palo Alto, Calif. Automatisierte kassettenfoerderanlage
JPS6162739A (ja) * 1984-09-03 1986-03-31 Sanki Eng Co Ltd クリ−ントンネル
US4723480A (en) * 1985-04-19 1988-02-09 Hitachi, Ltd. Manufacturing apparatus with air cleaning device
JPH0756879B2 (ja) * 1988-03-31 1995-06-14 日鉄セミコンダクター株式会社 半導体の無塵化製造装置
US5326316A (en) * 1991-04-17 1994-07-05 Matsushita Electric Industrial Co., Ltd. Coupling type clean space apparatus
US5752796A (en) * 1996-01-24 1998-05-19 Muka; Richard S. Vacuum integrated SMIF system
JP3218425B2 (ja) * 1996-03-25 2001-10-15 東京エレクトロン株式会社 処理方法及び処理装置

Also Published As

Publication number Publication date
EP0908931A2 (en) 1999-04-14
SG67570A1 (en) 1999-09-21
TW447007B (en) 2001-07-21
CN1213637A (zh) 1999-04-14
EP0908931A3 (en) 2003-08-27
AU8788298A (en) 1999-04-29
AU707884B2 (en) 1999-07-22
CA2249771A1 (en) 1999-04-07
CN1075665C (zh) 2001-11-28
JPH11111809A (ja) 1999-04-23
KR19990036696A (ko) 1999-05-25

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