HK1213863A1 - Floating transport device, transport rail, and floating transport method - Google Patents

Floating transport device, transport rail, and floating transport method

Info

Publication number
HK1213863A1
HK1213863A1 HK16101774.2A HK16101774A HK1213863A1 HK 1213863 A1 HK1213863 A1 HK 1213863A1 HK 16101774 A HK16101774 A HK 16101774A HK 1213863 A1 HK1213863 A1 HK 1213863A1
Authority
HK
Hong Kong
Prior art keywords
transport
floating
rail
floating transport
transport device
Prior art date
Application number
HK16101774.2A
Other languages
Chinese (zh)
Inventor
佐藤光
安田貴裕
伊藤彰彥
Original Assignee
Oiles Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Industry Co Ltd filed Critical Oiles Industry Co Ltd
Publication of HK1213863A1 publication Critical patent/HK1213863A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/066—Transporting devices for sheet glass being suspended; Suspending devices, e.g. clamps, supporting tongs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
HK16101774.2A 2013-02-14 2016-02-18 Floating transport device, transport rail, and floating transport method HK1213863A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013027000A JP6147521B2 (en) 2013-02-14 2013-02-14 Levitation conveyance device, conveyance rail, and levitation conveyance method
PCT/JP2013/080377 WO2014125686A1 (en) 2013-02-14 2013-11-11 Floating transport device, transport rail, and floating transport method

Publications (1)

Publication Number Publication Date
HK1213863A1 true HK1213863A1 (en) 2016-07-15

Family

ID=51353705

Family Applications (1)

Application Number Title Priority Date Filing Date
HK16101774.2A HK1213863A1 (en) 2013-02-14 2016-02-18 Floating transport device, transport rail, and floating transport method

Country Status (7)

Country Link
JP (1) JP6147521B2 (en)
KR (1) KR20150118989A (en)
CN (1) CN104995113A (en)
HK (1) HK1213863A1 (en)
IL (1) IL239806A0 (en)
TW (1) TW201441128A (en)
WO (1) WO2014125686A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6861198B2 (en) * 2018-12-12 2021-04-21 株式会社Ｓｃｒｅｅｎホールディングス Substrate transfer device and coating device
CN113652909A (en) * 2021-09-24 2021-11-16 江西理工大学 Magnetic suspension track and magnetic suspension system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116630A (en) * 1980-02-20 1981-09-12 Hitachi Ltd Work offering feeding mechanism
JPS61169101U (en) * 1985-04-04 1986-10-20
JPH06228901A (en) * 1993-01-21 1994-08-16 Kichisho Chin Joint structure of rail
JP2004210490A (en) * 2003-01-06 2004-07-29 Yuutekku:Kk Pneumatic conveyor and its conveyance direction changing method
JP3882819B2 (en) * 2004-01-16 2007-02-21 三菱マテリアルテクノ株式会社 Airflow alignment cap feeder
JP4501713B2 (en) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 Air levitation transfer device
JP2007238193A (en) * 2006-03-06 2007-09-20 Kanto Auto Works Ltd Conveying device for article
CN101190748B (en) * 2006-12-01 2011-09-07 台湾积体电路制造股份有限公司 Automatization materials conveying system
JP5406852B2 (en) * 2008-11-18 2014-02-05 オイレス工業株式会社 Non-contact transfer device
KR101064893B1 (en) * 2009-04-21 2011-09-16 금오공과대학교 산학협력단 Plate flotation system
TWM412155U (en) * 2011-04-29 2011-09-21 M U Technologies Corp Equipment with air bearing table

Also Published As

Publication number Publication date
CN104995113A (en) 2015-10-21
TW201441128A (en) 2014-11-01
JP6147521B2 (en) 2017-06-14
JP2014156297A (en) 2014-08-28
IL239806A0 (en) 2015-08-31
KR20150118989A (en) 2015-10-23
WO2014125686A1 (en) 2014-08-21

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