HK1161580A1 - Air floatation conveyance device and method of conveyance using air - Google Patents

Air floatation conveyance device and method of conveyance using air

Info

Publication number
HK1161580A1
HK1161580A1 HK12102151.7A HK12102151A HK1161580A1 HK 1161580 A1 HK1161580 A1 HK 1161580A1 HK 12102151 A HK12102151 A HK 12102151A HK 1161580 A1 HK1161580 A1 HK 1161580A1
Authority
HK
Hong Kong
Prior art keywords
air
conveyance
floatation
conveyance device
air floatation
Prior art date
Application number
HK12102151.7A
Other languages
Chinese (zh)
Inventor
北澤保良須田佳雅
Original Assignee
翔風技術有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2006315498A external-priority patent/JP2008130892A/en
Priority claimed from JP2007210201A external-priority patent/JP5119561B2/en
Application filed by 翔風技術有限公司 filed Critical 翔風技術有限公司
Publication of HK1161580A1 publication Critical patent/HK1161580A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
HK12102151.7A 2006-11-22 2012-03-02 Air floatation conveyance device and method of conveyance using air HK1161580A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006315498A JP2008130892A (en) 2006-11-22 2006-11-22 Air float carrying apparatus and air carrying method
JP2007210201A JP5119561B2 (en) 2007-08-10 2007-08-10 Air levitation transport device, air levitation unit, air levitation transport method

Publications (1)

Publication Number Publication Date
HK1161580A1 true HK1161580A1 (en) 2012-07-27

Family

ID=39429760

Family Applications (1)

Application Number Title Priority Date Filing Date
HK12102151.7A HK1161580A1 (en) 2006-11-22 2012-03-02 Air floatation conveyance device and method of conveyance using air

Country Status (5)

Country Link
KR (1) KR101470660B1 (en)
CN (1) CN102267630B (en)
HK (1) HK1161580A1 (en)
TW (1) TWI458036B (en)
WO (1) WO2008062831A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4638931B2 (en) * 2008-09-12 2011-02-23 東京エレクトロン株式会社 Substrate processing equipment
JP5540496B2 (en) * 2008-11-20 2014-07-02 株式会社Ｉｈｉ Levitation transport device and levitation unit
IT1400493B1 (en) * 2010-06-09 2013-06-11 Mec Di Prec E G3 Di Gamba Walter & C S N C Off DEVICE AND METHOD FOR THE PRECISELY POSITIONING OF A MINIATURIZED PIECE IN A POSITIONING SEAT.

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870548A (en) * 1981-10-22 1983-04-27 Fujitsu Ltd Substrate transfer system
JP2001010724A (en) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk Floating carrier device
JP4171293B2 (en) * 2002-12-16 2008-10-22 株式会社日本設計工業 Method and apparatus for conveying thin plate material
TWI327128B (en) * 2003-07-08 2010-07-11 Daifuku Kk Plate-shaped work piece transporting apparatus
JP4613800B2 (en) * 2004-12-01 2011-01-19 株式会社Ｉｈｉ Levitation device and transfer device
JP4501713B2 (en) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 Air levitation transfer device

Also Published As

Publication number Publication date
CN102267630B (en) 2013-12-25
TWI458036B (en) 2014-10-21
KR101470660B1 (en) 2014-12-09
KR20090094083A (en) 2009-09-03
CN102267630A (en) 2011-12-07
WO2008062831A1 (en) 2008-05-29
TW200832593A (en) 2008-08-01

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20171121