HK1147140A1 - Process for producing substrate for power module, substrate for power module, and power module - Google Patents
Process for producing substrate for power module, substrate for power module, and power moduleInfo
- Publication number
- HK1147140A1 HK1147140A1 HK11101087.9A HK11101087A HK1147140A1 HK 1147140 A1 HK1147140 A1 HK 1147140A1 HK 11101087 A HK11101087 A HK 11101087A HK 1147140 A1 HK1147140 A1 HK 1147140A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- power module
- substrate
- producing
- producing substrate
- module
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 2
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0016—Brazing of electronic components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/19—Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/15—Ceramic or glass substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/10—Aluminium or alloys thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/12—Using specific substances
- H05K2203/128—Molten metals, e.g. casting thereof, or melting by heating and excluding molten solder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0058—Laminating printed circuit boards onto other substrates, e.g. metallic substrates
- H05K3/0061—Laminating printed circuit boards onto other substrates, e.g. metallic substrates onto a metallic substrate, e.g. a heat sink
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12007—Component of composite having metal continuous phase interengaged with nonmetal continuous phase
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007299385 | 2007-11-19 | ||
PCT/JP2008/071018 WO2009066692A1 (ja) | 2007-11-19 | 2008-11-19 | パワーモジュール用基板の製造方法、パワーモジュール用基板、及びパワーモジュール |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1147140A1 true HK1147140A1 (en) | 2011-07-29 |
Family
ID=40667514
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK11101087.9A HK1147140A1 (en) | 2007-11-19 | 2011-02-01 | Process for producing substrate for power module, substrate for power module, and power module |
Country Status (7)
Country | Link |
---|---|
US (1) | US8116084B2 (ja) |
EP (1) | EP2214201B1 (ja) |
JP (1) | JP4747315B2 (ja) |
KR (1) | KR101083618B1 (ja) |
CN (1) | CN101861647B (ja) |
HK (1) | HK1147140A1 (ja) |
WO (1) | WO2009066692A1 (ja) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011119653A (ja) * | 2009-09-09 | 2011-06-16 | Mitsubishi Materials Corp | ヒートシンク付パワーモジュール用基板の製造方法、ヒートシンク付パワーモジュール用基板及びパワーモジュール |
JP5640569B2 (ja) * | 2009-09-09 | 2014-12-17 | 三菱マテリアル株式会社 | パワーモジュール用基板の製造方法 |
JP5640571B2 (ja) * | 2009-09-09 | 2014-12-17 | 三菱マテリアル株式会社 | パワーモジュール用基板の製造方法 |
KR101690820B1 (ko) | 2009-09-09 | 2016-12-28 | 미쓰비시 마테리알 가부시키가이샤 | 히트 싱크 부착 파워 모듈용 기판의 제조 방법, 히트 싱크 부착 파워 모듈용 기판 및 파워 모듈 |
JP5640570B2 (ja) * | 2009-09-09 | 2014-12-17 | 三菱マテリアル株式会社 | パワーモジュール用基板の製造方法 |
JP5724273B2 (ja) * | 2009-10-22 | 2015-05-27 | 三菱マテリアル株式会社 | パワーモジュール用基板、ヒートシンク付パワーモジュール用基板、パワーモジュール、パワーモジュール用基板の製造方法及びヒートシンク付パワーモジュール用基板の製造方法 |
JP5741793B2 (ja) * | 2009-10-22 | 2015-07-01 | 三菱マテリアル株式会社 | パワーモジュール用基板、ヒートシンク付パワーモジュール用基板、パワーモジュール、パワーモジュール用基板の製造方法及びヒートシンク付パワーモジュール用基板の製造方法 |
WO2011049067A1 (ja) | 2009-10-22 | 2011-04-28 | 三菱マテリアル株式会社 | パワーモジュール用基板、ヒートシンク付パワーモジュール用基板、パワーモジュール、パワーモジュール用基板の製造方法及びヒートシンク付パワーモジュール用基板の製造方法 |
KR101878492B1 (ko) * | 2011-02-01 | 2018-07-13 | 미쓰비시 마테리알 가부시키가이샤 | 파워 모듈용 기판의 제조 방법, 파워 모듈용 기판, 히트싱크가 부착된 파워 모듈용 기판 및 파워 모듈 |
CN102651349B (zh) * | 2011-02-25 | 2016-07-06 | 三菱综合材料株式会社 | 功率模块用基板及制法、自带散热器的该基板及功率模块 |
CN102651348B (zh) * | 2011-02-25 | 2016-08-03 | 三菱综合材料株式会社 | 功率模块用基板及制法、自带散热器的该基板及功率模块 |
JP5694094B2 (ja) * | 2011-09-01 | 2015-04-01 | Jx日鉱日石金属株式会社 | フレキシブルプリント配線板用銅箔、銅張積層板、フレキシブルプリント配線板及び電子機器 |
US8789743B2 (en) * | 2011-11-30 | 2014-07-29 | Component Re-Engineering Company, Inc. | Hermetically joined ceramic assemblies and low temperature method for hermetically joining ceramic materials |
US9624137B2 (en) * | 2011-11-30 | 2017-04-18 | Component Re-Engineering Company, Inc. | Low temperature method for hermetically joining non-diffusing ceramic materials |
JP5910166B2 (ja) * | 2012-02-29 | 2016-04-27 | 三菱マテリアル株式会社 | パワーモジュール用基板の製造方法 |
JP5947104B2 (ja) * | 2012-05-18 | 2016-07-06 | 昭和電工株式会社 | 電子素子搭載用基板 |
WO2014046130A1 (ja) | 2012-09-21 | 2014-03-27 | 三菱マテリアル株式会社 | アルミニウム部材と銅部材との接合構造 |
US9968012B2 (en) * | 2012-10-16 | 2018-05-08 | Mitsubishi Materials Corporation | Heat-sink-attached power module substrate, heat-sink-attached power module, and method for producing heat-sink-attached power module substrate |
KR101459857B1 (ko) * | 2012-12-27 | 2014-11-07 | 현대자동차주식회사 | 히트싱크 일체형 양면 냉각 파워모듈 |
US9064805B1 (en) * | 2013-03-13 | 2015-06-23 | Itn Energy Systems, Inc. | Hot-press method |
JP6079505B2 (ja) | 2013-08-26 | 2017-02-15 | 三菱マテリアル株式会社 | 接合体及びパワーモジュール用基板 |
US9969654B2 (en) * | 2014-01-24 | 2018-05-15 | United Technologies Corporation | Method of bonding a metallic component to a non-metallic component using a compliant material |
JP6264129B2 (ja) * | 2014-03-24 | 2018-01-24 | 三菱マテリアル株式会社 | パワーモジュール用基板及びその製造方法 |
KR101720921B1 (ko) * | 2014-04-25 | 2017-03-29 | 미쓰비시 마테리알 가부시키가이샤 | 파워 모듈용 기판 유닛 및 파워 모듈 |
JP6507722B2 (ja) * | 2015-03-05 | 2019-05-08 | 三菱マテリアル株式会社 | パワーモジュール用基板の製造方法 |
CN108688244A (zh) * | 2018-07-25 | 2018-10-23 | 青岛归来科技有限公司 | 陶瓷金属复合板及其制备方法 |
JP6733941B1 (ja) * | 2019-03-22 | 2020-08-05 | 大口マテリアル株式会社 | 半導体素子搭載用基板 |
CN114501820B (zh) * | 2022-02-21 | 2024-06-18 | 青州云领电子科技有限公司 | 一种陶瓷基电路板的制备工艺及产品 |
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JPH03234045A (ja) | 1990-02-09 | 1991-10-18 | Toshiba Corp | 窒化アルミニウム基板およびこれを用いた半導体モジュール |
US5213877A (en) * | 1991-05-02 | 1993-05-25 | Mitsubishi Materials Corporation | Ceramic substrate used for fabricating electric or electronic circuit |
EP0532000B1 (en) * | 1991-09-13 | 1997-07-23 | Tsuyoshi Masumoto | High strength structural member and process for producing the same |
JP3023808B2 (ja) * | 1991-09-13 | 2000-03-21 | 健 増本 | 粒子強化金属基複合部材 |
JPH07172961A (ja) * | 1993-12-17 | 1995-07-11 | Kawasaki Steel Corp | メタライズ層を有する窒化アルミニウム焼結体及びその製造方法 |
DE69517248T2 (de) * | 1994-07-15 | 2000-10-12 | Mitsubishi Materials Corp., Tokio/Tokyo | Keramik-Gehäuse mit hoher Wärmeabstrahlung |
US6033787A (en) * | 1996-08-22 | 2000-03-07 | Mitsubishi Materials Corporation | Ceramic circuit board with heat sink |
JP3864282B2 (ja) * | 1998-09-22 | 2006-12-27 | 三菱マテリアル株式会社 | パワーモジュール用基板及びその製造方法並びにこの基板を用いた半導体装置 |
JP2000340897A (ja) * | 1999-05-31 | 2000-12-08 | Denki Kagaku Kogyo Kk | 回路基板 |
US7019975B2 (en) * | 2000-08-09 | 2006-03-28 | Mitsubishi Materials Corporation | Power module and power module with heat sink |
AU2003235329A1 (en) * | 2002-04-19 | 2003-11-03 | Mitsubishi Materials Corporation | Circuit board, process for producing the same and power module |
JP4387658B2 (ja) * | 2002-10-30 | 2009-12-16 | 三菱マテリアル株式会社 | ヒートシンク付セラミック回路基板及びその製造方法 |
US20050098942A1 (en) | 2003-11-07 | 2005-05-12 | Heidelberger Druckmaschinen Ag | Pin conveyor for printed sheet material and transfer unit |
EP1737034A4 (en) * | 2004-04-05 | 2010-11-03 | Mitsubishi Materials Corp | AI / AIN CONNECTING MATERIAL, BASE PLATE FOR A POWER MODULE, POWER MODULE AND PROCESS FOR PRODUCING AN AI / AIN COMPOUND MATERIAL |
JP4682889B2 (ja) * | 2006-03-23 | 2011-05-11 | 三菱マテリアル株式会社 | パワーモジュール用基板およびパワーモジュール並びにパワーモジュール用基板の製造方法 |
-
2008
- 2008-11-18 JP JP2008294598A patent/JP4747315B2/ja active Active
- 2008-11-19 CN CN2008801161925A patent/CN101861647B/zh active Active
- 2008-11-19 KR KR1020107005373A patent/KR101083618B1/ko active IP Right Grant
- 2008-11-19 EP EP08851237.1A patent/EP2214201B1/en active Active
- 2008-11-19 WO PCT/JP2008/071018 patent/WO2009066692A1/ja active Application Filing
- 2008-11-19 US US12/734,646 patent/US8116084B2/en active Active
-
2011
- 2011-02-01 HK HK11101087.9A patent/HK1147140A1/xx unknown
Also Published As
Publication number | Publication date |
---|---|
US8116084B2 (en) | 2012-02-14 |
US20100285331A1 (en) | 2010-11-11 |
WO2009066692A1 (ja) | 2009-05-28 |
EP2214201B1 (en) | 2018-09-19 |
CN101861647A (zh) | 2010-10-13 |
JP2009147316A (ja) | 2009-07-02 |
EP2214201A1 (en) | 2010-08-04 |
EP2214201A4 (en) | 2017-02-01 |
JP4747315B2 (ja) | 2011-08-17 |
KR20100093515A (ko) | 2010-08-25 |
CN101861647B (zh) | 2012-12-05 |
KR101083618B1 (ko) | 2011-11-16 |
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