HK1061897A1 - Motor system for positioning a load - Google Patents

Motor system for positioning a load

Info

Publication number
HK1061897A1
HK1061897A1 HK04104873.0A HK04104873A HK1061897A1 HK 1061897 A1 HK1061897 A1 HK 1061897A1 HK 04104873 A HK04104873 A HK 04104873A HK 1061897 A1 HK1061897 A1 HK 1061897A1
Authority
HK
Hong Kong
Prior art keywords
positioning
load
motor system
motor
Prior art date
Application number
HK04104873.0A
Other languages
English (en)
Inventor
Gary Peter Widdowson
You Yong Liao
Gang Ou
Ajit S Gaunekar
Original Assignee
Asm Tech Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm Tech Singapore Pte Ltd filed Critical Asm Tech Singapore Pte Ltd
Publication of HK1061897A1 publication Critical patent/HK1061897A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
HK04104873.0A 2002-08-15 2004-07-06 Motor system for positioning a load HK1061897A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/223,229 US6713903B2 (en) 2002-08-15 2002-08-15 Motor system for positioning a load

Publications (1)

Publication Number Publication Date
HK1061897A1 true HK1061897A1 (en) 2004-10-08

Family

ID=31715134

Family Applications (1)

Application Number Title Priority Date Filing Date
HK04104873.0A HK1061897A1 (en) 2002-08-15 2004-07-06 Motor system for positioning a load

Country Status (5)

Country Link
US (1) US6713903B2 (xx)
CN (1) CN100562826C (xx)
HK (1) HK1061897A1 (xx)
SG (1) SG111127A1 (xx)
TW (1) TWI294206B (xx)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3891545B2 (ja) * 2001-07-10 2007-03-14 キヤノン株式会社 リニアモータ
ATE348438T1 (de) * 2001-11-27 2007-01-15 Rexroth Indramat Gmbh Wanderfeld synchronmotor
US20070243317A1 (en) * 2002-07-15 2007-10-18 Du Bois Dale R Thermal Processing System and Configurable Vertical Chamber
JP4617119B2 (ja) * 2004-08-30 2011-01-19 キヤノン株式会社 駆動装置、露光装置及びデバイス製造方法
US7602087B2 (en) * 2006-10-19 2009-10-13 Asm Assembly Automation Ltd. Linear motor having dual coil configuration
DE102009013353B3 (de) * 2009-03-16 2010-10-07 Siemens Aktiengesellschaft Verfahren zur Bestimmung von Rüstungen für konstante Tische von Bestückautomaten
TWI398931B (zh) * 2009-07-03 2013-06-11 Wecon Automation Corp 驅動裝置及固晶機
CN102172890A (zh) * 2011-02-01 2011-09-07 哈尔滨轴承集团公司 外沟切入磨床设备横向进给设备
JP6023334B2 (ja) 2012-08-21 2016-11-09 エーエスエムエル ネザーランズ ビー．ブイ． 電磁アクチュエータ、支持体、およびリソグラフィ装置
CN105027227B (zh) * 2013-02-26 2017-09-08 安科锐公司 电磁致动的多叶准直器
US10288117B2 (en) * 2015-01-07 2019-05-14 Hitachi, Ltd. Motor system and compressor equipped therewith
TWI779978B (zh) * 2021-12-29 2022-10-01 卓金星 載物平台裝置及包括該載物平台裝置之量測裝置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61109637A (ja) * 1984-10-31 1986-05-28 Hitachi Ltd テ−ブル装置
US4808892A (en) * 1985-12-13 1989-02-28 Kulick And Soffa Ind. Inc. Bi-directional drive motor system
US5087844A (en) * 1989-11-07 1992-02-11 Hitachi Metals, Ltd. Linear motor
US5808381A (en) * 1994-08-09 1998-09-15 Hitachi Metals, Ltd. Linear motor
JPH1110467A (ja) * 1997-06-18 1999-01-19 Yaskawa Electric Corp Ｘｙテーブル

Also Published As

Publication number Publication date
US20040032169A1 (en) 2004-02-19
TW200402924A (en) 2004-02-16
CN100562826C (zh) 2009-11-25
CN1485702A (zh) 2004-03-31
SG111127A1 (en) 2005-05-30
TWI294206B (en) 2008-03-01
US6713903B2 (en) 2004-03-30

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Legal Events

Date Code Title Description
PE Patent expired

Effective date: 20230814