HK1040568B - 多層壓電器件及其製造方法 - Google Patents
多層壓電器件及其製造方法Info
- Publication number
- HK1040568B HK1040568B HK02101936.3A HK02101936A HK1040568B HK 1040568 B HK1040568 B HK 1040568B HK 02101936 A HK02101936 A HK 02101936A HK 1040568 B HK1040568 B HK 1040568B
- Authority
- HK
- Hong Kong
- Prior art keywords
- producing
- same
- piezoelectric device
- multilayer piezoelectric
- multilayer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Compositions Of Oxide Ceramics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Fuel-Injection Apparatus (AREA)
- Micromachines (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28001699 | 1999-09-30 | ||
JP2000190654A JP3397753B2 (ja) | 1999-09-30 | 2000-06-26 | 積層型圧電素子およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
HK1040568A1 HK1040568A1 (en) | 2002-06-14 |
HK1040568B true HK1040568B (zh) | 2005-09-30 |
Family
ID=26553578
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK02101936.3A HK1040568B (zh) | 1999-09-30 | 2002-03-13 | 多層壓電器件及其製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6384517B1 (zh) |
JP (1) | JP3397753B2 (zh) |
CN (1) | CN1188916C (zh) |
HK (1) | HK1040568B (zh) |
SG (1) | SG98427A1 (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4683689B2 (ja) * | 2000-03-29 | 2011-05-18 | 京セラ株式会社 | 積層型圧電素子及び圧電アクチュエータ並びに噴射装置 |
DE10205928A1 (de) * | 2001-02-21 | 2002-08-22 | Ceramtec Ag | Verfahren zur Herstellung piezokeramischer Vielschichtaktoren |
JP3975840B2 (ja) * | 2002-06-27 | 2007-09-12 | 株式会社村田製作所 | 積層型圧電トランス |
DE10326040A1 (de) * | 2003-06-10 | 2004-12-30 | Robert Bosch Gmbh | Verfahren zur Herstellung von keramischen Grünfolien für keramische Bauteile |
US7633210B2 (en) * | 2003-07-28 | 2009-12-15 | Kyocera Corporation | Multi-layer electronic component and method for manufacturing the same, multi-layer piezoelectric element |
JP4771649B2 (ja) * | 2003-07-28 | 2011-09-14 | 京セラ株式会社 | 積層型電子部品の製造方法 |
JP4593912B2 (ja) * | 2003-12-24 | 2010-12-08 | 京セラ株式会社 | 積層型圧電素子およびその製法、並びに噴射装置 |
JP2005243677A (ja) * | 2004-02-24 | 2005-09-08 | Kyocera Corp | 積層型電子部品とその製造方法およびこれを用いた噴射装置 |
JP4610215B2 (ja) * | 2004-03-19 | 2011-01-12 | 株式会社ノリタケカンパニーリミテド | 導体ペースト |
JP4881062B2 (ja) | 2006-05-15 | 2012-02-22 | キヤノン株式会社 | 積層圧電素子、その製造方法および振動波駆動装置 |
KR100852162B1 (ko) | 2006-08-23 | 2008-08-13 | 주식회사 이노칩테크놀로지 | 압전 진동 소자 |
DE102007004813B4 (de) * | 2007-01-31 | 2016-01-14 | Continental Automotive Gmbh | Verfahren zur Herstellung eines piezokeramischen Vielschichtaktors |
JP5006354B2 (ja) * | 2009-01-29 | 2012-08-22 | 日本碍子株式会社 | 圧電/電歪共振子 |
WO2013191249A1 (ja) * | 2012-06-21 | 2013-12-27 | 日本碍子株式会社 | 圧電/電歪セラミックス組成物及び変位発生装置 |
JP5679010B2 (ja) * | 2013-05-07 | 2015-03-04 | Tdk株式会社 | 圧電素子およびその製造方法 |
CN103579492A (zh) * | 2013-11-19 | 2014-02-12 | 中国第一汽车股份有限公司无锡油泵油嘴研究所 | 压电执行元件 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6347137A (ja) * | 1986-08-15 | 1988-02-27 | 松下電工株式会社 | 圧電セラミツク体の製法 |
US4988909A (en) * | 1989-01-20 | 1991-01-29 | Mitsui Toatsu Chemicals, Inc. | Piezoelectric element with giant electrostrictive effect and ceramic composition for preparing same |
JPH03155178A (ja) * | 1989-11-14 | 1991-07-03 | Hitachi Metals Ltd | 積層型変位素子 |
JPH0496286A (ja) * | 1990-08-03 | 1992-03-27 | Toyota Motor Corp | 積層型圧電体の製造方法 |
KR100200902B1 (ko) * | 1990-09-19 | 1999-06-15 | 가나이 쓰도무 | 다층세라믹 소결체 및 그 제조방법 |
JPH04340778A (ja) * | 1991-01-30 | 1992-11-27 | Nec Corp | 積層圧電アクチュエータ素子 |
JPH05110157A (ja) | 1991-10-14 | 1993-04-30 | Nec Corp | 積層圧電アクチユエータ |
JPH06314828A (ja) * | 1993-04-28 | 1994-11-08 | Mitsubishi Kasei Corp | 積層型素子の製造方法 |
US5645753A (en) * | 1994-05-19 | 1997-07-08 | Kyocera Corporation | Piezo-electric ceramic composition |
US6140746A (en) * | 1995-04-03 | 2000-10-31 | Seiko Epson Corporation | Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film |
JPH09261978A (ja) | 1996-03-25 | 1997-10-03 | Nippon Cement Co Ltd | 積層体素子および振動駆動装置 |
JPH1056354A (ja) * | 1996-08-09 | 1998-02-24 | Fuji Electric Co Ltd | 弾性表面波フィルタおよびその製造方法 |
US5935485A (en) * | 1996-10-31 | 1999-08-10 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Piezoelectric material and piezoelectric element |
JP3596743B2 (ja) * | 1999-08-19 | 2004-12-02 | 株式会社村田製作所 | 積層セラミック電子部品の製造方法及び積層セラミック電子部品 |
-
2000
- 2000-06-26 JP JP2000190654A patent/JP3397753B2/ja not_active Expired - Fee Related
- 2000-09-27 US US09/671,351 patent/US6384517B1/en not_active Expired - Lifetime
- 2000-09-28 SG SG200005588A patent/SG98427A1/en unknown
- 2000-09-29 CN CNB001370138A patent/CN1188916C/zh not_active Expired - Fee Related
-
2002
- 2002-03-13 HK HK02101936.3A patent/HK1040568B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
HK1040568A1 (en) | 2002-06-14 |
CN1188916C (zh) | 2005-02-09 |
CN1313641A (zh) | 2001-09-19 |
JP2001168408A (ja) | 2001-06-22 |
SG98427A1 (en) | 2003-09-19 |
JP3397753B2 (ja) | 2003-04-21 |
US6384517B1 (en) | 2002-05-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20100929 |