GB995609A - Improvements in or relating to the vaporization of metals - Google Patents

Improvements in or relating to the vaporization of metals

Info

Publication number
GB995609A
GB995609A GB3141560A GB3141560A GB995609A GB 995609 A GB995609 A GB 995609A GB 3141560 A GB3141560 A GB 3141560A GB 3141560 A GB3141560 A GB 3141560A GB 995609 A GB995609 A GB 995609A
Authority
GB
United Kingdom
Prior art keywords
wire
metal
al2o3
hearth
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3141560A
Inventor
Brian Alan Probyn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum International Ltd
Original Assignee
Edwards High Vacuum International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum International Ltd filed Critical Edwards High Vacuum International Ltd
Priority to GB3141560A priority Critical patent/GB995609A/en
Publication of GB995609A publication Critical patent/GB995609A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

<PICT:0995609/C6-C7/1> In vapour deposition apparatus for depositing metals of Group VIII of the Periodic Table, or their alloys, the support for the source metal is a sintered cermet consisting of a metal or metal carbide compounded with a refractory metal oxide. A preferred composition of the cermet is 80% Mo with 20% Al2O3 although Al2O3 and Cr may be used. As shown in Fig. 1, a Ni/Cr wire 1 is continuously fed in a vacuum chamber to a sintered cermet disc 14. The tip of the wire is heated by electron bombardment generated from a cathode filament 16 and anode hearth 13, and the Ni/Cr wire is continuously vaporized. The wire may alternatively be fed to the hearth through a water cooled copper tube, Fig. 4 (not shown). The electrons may also be supplied from an electron gun placed at an angle to and a short distance away from the source material, which may also be in the form of a pellet rather than a wire. Heating may also take the form of resistance or H.F. heating. Specifications 770,753 and 821,518 are referred to.
GB3141560A 1960-09-12 1960-09-12 Improvements in or relating to the vaporization of metals Expired GB995609A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3141560A GB995609A (en) 1960-09-12 1960-09-12 Improvements in or relating to the vaporization of metals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3141560A GB995609A (en) 1960-09-12 1960-09-12 Improvements in or relating to the vaporization of metals

Publications (1)

Publication Number Publication Date
GB995609A true GB995609A (en) 1965-06-23

Family

ID=10322776

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3141560A Expired GB995609A (en) 1960-09-12 1960-09-12 Improvements in or relating to the vaporization of metals

Country Status (1)

Country Link
GB (1) GB995609A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3136465A1 (en) * 1981-09-15 1983-03-31 Siemens AG, 1000 Berlin und 8000 München Appliance and method for coating substrates by vapour deposition
WO2009010468A1 (en) * 2007-07-19 2009-01-22 Applied Materials, Inc. Vacuum evaporation apparatus for solid materials

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3136465A1 (en) * 1981-09-15 1983-03-31 Siemens AG, 1000 Berlin und 8000 München Appliance and method for coating substrates by vapour deposition
WO2009010468A1 (en) * 2007-07-19 2009-01-22 Applied Materials, Inc. Vacuum evaporation apparatus for solid materials
EP2025773A1 (en) * 2007-07-19 2009-02-18 Applied Materials, Inc. Vacuum evaporation apparatus for solid materials

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