GB9901038D0 - Displacement-measuring inteferometer with deadpath-error compensation - Google Patents
Displacement-measuring inteferometer with deadpath-error compensationInfo
- Publication number
- GB9901038D0 GB9901038D0 GB9901038A GB9901038A GB9901038D0 GB 9901038 D0 GB9901038 D0 GB 9901038D0 GB 9901038 A GB9901038 A GB 9901038A GB 9901038 A GB9901038 A GB 9901038A GB 9901038 D0 GB9901038 D0 GB 9901038D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- deadpath
- inteferometer
- displacement
- measuring
- error compensation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1526198A | 1998-01-29 | 1998-01-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9901038D0 true GB9901038D0 (en) | 1999-03-10 |
GB2333834A GB2333834A (en) | 1999-08-04 |
Family
ID=21770406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9901038A Withdrawn GB2333834A (en) | 1998-01-29 | 1999-01-18 | Interferometer with deadpath error compensation |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH11257915A (en) |
DE (1) | DE19840523A1 (en) |
GB (1) | GB2333834A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0206008D0 (en) * | 2002-03-14 | 2002-04-24 | Farfield Sensors Ltd | Optical interferometer |
CN104048596B (en) * | 2014-06-12 | 2016-12-07 | 中国科学院长春光学精密机械与物理研究所 | Compensator and the compensator control method coaxial with interferometer |
CN104748672B (en) * | 2015-03-05 | 2017-09-08 | 哈尔滨工业大学 | Amount of interference separates single frequency laser interferometer nonlinearity erron modification method and device |
KR101678891B1 (en) * | 2015-12-24 | 2016-11-23 | 조선대학교산학협력단 | Direction deterministic spectrally-resolved interferometry using a dispersive plate and measuring system using the same |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL6707681A (en) * | 1967-06-02 | 1968-12-03 | ||
US4717250A (en) * | 1986-03-28 | 1988-01-05 | Zygo Corporation | Angle measuring interferometer |
JPS62233704A (en) * | 1986-03-28 | 1987-10-14 | ジゴ− コ−ポレ−シヨン | Differential plane-mirror interferometer system |
JPH0587518A (en) * | 1990-06-12 | 1993-04-06 | Zygo Corp | Interferometer for measuring rectilinear and up-and-down and left and right displacement |
US5444532A (en) * | 1992-02-25 | 1995-08-22 | Nikon Corporation | Interferometer apparatus for detecting relative movement between reflecting members |
-
1998
- 1998-09-04 DE DE1998140523 patent/DE19840523A1/en not_active Withdrawn
-
1999
- 1999-01-18 GB GB9901038A patent/GB2333834A/en not_active Withdrawn
- 1999-01-26 JP JP11017034A patent/JPH11257915A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
DE19840523A1 (en) | 1999-08-12 |
JPH11257915A (en) | 1999-09-24 |
GB2333834A (en) | 1999-08-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) | ||
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |