GB9901038D0 - Displacement-measuring inteferometer with deadpath-error compensation - Google Patents

Displacement-measuring inteferometer with deadpath-error compensation

Info

Publication number
GB9901038D0
GB9901038D0 GB9901038A GB9901038A GB9901038D0 GB 9901038 D0 GB9901038 D0 GB 9901038D0 GB 9901038 A GB9901038 A GB 9901038A GB 9901038 A GB9901038 A GB 9901038A GB 9901038 D0 GB9901038 D0 GB 9901038D0
Authority
GB
United Kingdom
Prior art keywords
deadpath
inteferometer
displacement
measuring
error compensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9901038A
Other versions
GB2333834A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of GB9901038D0 publication Critical patent/GB9901038D0/en
Publication of GB2333834A publication Critical patent/GB2333834A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB9901038A 1998-01-29 1999-01-18 Interferometer with deadpath error compensation Withdrawn GB2333834A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1526198A 1998-01-29 1998-01-29

Publications (2)

Publication Number Publication Date
GB9901038D0 true GB9901038D0 (en) 1999-03-10
GB2333834A GB2333834A (en) 1999-08-04

Family

ID=21770406

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9901038A Withdrawn GB2333834A (en) 1998-01-29 1999-01-18 Interferometer with deadpath error compensation

Country Status (3)

Country Link
JP (1) JPH11257915A (en)
DE (1) DE19840523A1 (en)
GB (1) GB2333834A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0206008D0 (en) * 2002-03-14 2002-04-24 Farfield Sensors Ltd Optical interferometer
CN104048596B (en) * 2014-06-12 2016-12-07 中国科学院长春光学精密机械与物理研究所 Compensator and the compensator control method coaxial with interferometer
CN104748672B (en) * 2015-03-05 2017-09-08 哈尔滨工业大学 Amount of interference separates single frequency laser interferometer nonlinearity erron modification method and device
KR101678891B1 (en) * 2015-12-24 2016-11-23 조선대학교산학협력단 Direction deterministic spectrally-resolved interferometry using a dispersive plate and measuring system using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6707681A (en) * 1967-06-02 1968-12-03
US4717250A (en) * 1986-03-28 1988-01-05 Zygo Corporation Angle measuring interferometer
JPS62233704A (en) * 1986-03-28 1987-10-14 ジゴ−　コ−ポレ−シヨン Differential plane-mirror interferometer system
JPH0587518A (en) * 1990-06-12 1993-04-06 Zygo Corp Interferometer for measuring rectilinear and up-and-down and left and right displacement
US5444532A (en) * 1992-02-25 1995-08-22 Nikon Corporation Interferometer apparatus for detecting relative movement between reflecting members

Also Published As

Publication number Publication date
DE19840523A1 (en) 1999-08-12
JPH11257915A (en) 1999-09-24
GB2333834A (en) 1999-08-04

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)