CN104748672B - Amount of interference separates single frequency laser interferometer nonlinearity erron modification method and device - Google Patents
Amount of interference separates single frequency laser interferometer nonlinearity erron modification method and device Download PDFInfo
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Abstract
Amount of interference separates single frequency laser interferometer nonlinearity erron modification method and device belongs to laser measuring technique field, the present invention realizes the separating and measuring to reference light and measurement luminous intensity using photoswitch, and then the nonlinearity erron parameter in relative light signal is extracted, the direct current biasing error and amplitude unequal error of final quadrature signal are corrected；The start that the present invention realizes nonlinearity erron parameter in single frequency laser interferometer signal extracts, the quick technique effect corrected in real time is made to the nonlinearity erron in single frequency laser interferometer.
Description
Technical field
The invention belongs to laser measuring technique field, a kind of single frequency laser interferometer nonlinearity erron amendment side is related generally to
Method and device.
Background technology
The today developed rapidly in ultra precise measurement, quick ultraprecise displacement measurement has obtained extensive concern and research,
Higher requirement is wherein proposed to the precision of measurement in the application of space industry.Single frequency laser interferometer is compared to double-frequency laser
Interferometer have simple in construction, processing of circuit easily, the more low a variety of advantages of the requirement to environment, its measuring speed is in principle
It is unrestricted, thus be the Main Means in high speed length and displacement measurement field.However, nonlinearity erron is always limitation single-frequency
The key issue of laser interferometer precision.
1981, Heydemann proposed to obtain the non-thread in interference signal using the ellipse fitting method of least square method
Property error parameter and then (P.L.M.Heydemann, Determination and is modified to nonlinearity erron
correction of quadrature fringe measurement errors in
Interferometers.Appl.Opt.1981,20：3382-3384)；The graduate Dai of German federal physical technique proposes profit
The peak-to-valley value extract real-time nonlinearity erron parameter of each channel signal of four-way single frequency laser interferometer is detected with ADC and it is done
Go out amendment (Dai, G.-L.；Pohlenz, F.；Danzebrink, H.-U.；Hasche, K.；Wilkening, G.Improving
the performance of interferometers in metrological scanning probe
Microscopes.Meas.Sci.Technol.2004,15：444-450), real-time Heydemann modification methods are called.So
And these above-mentioned methods are typically necessary target mirror displacement and reach that λ/2 just can make accurate to signal nonlinearity erron parameter
Identification, when target mirror displacement is less than λ/2, the data discrete measured is higher, it is impossible to which nonlinearity erron parameter is made accurately
Identification, thus the effect of amendment is bad.
2012, Rerucha proposed the method by modulating LASER Light Source frequency, realized that single frequency laser interferometer is quiet in standard
Identification (Rerucha S, Buchta Z, Sarbort M, the et al.Detection of of nonlinearity erron parameter under state
interference phase by digital computation of quadrature signals in homodyne
Laser interferometry.Sensors, 2012,12 (10)：14095-14112), however this method need it is additional can
LASER Light Source is modulated, and identification needs the regular hour.
The content of the invention
For above-mentioned Heydemann modification methods nonlinearity erron can not be accurately proposed when target mirror displacement is less than λ/2
Parameter is simultaneously corrected, and modulation of source method identification nonlinearity erron need modulated LASER Light Source the problem of, the present invention propose and
A kind of amount of interference separation single frequency laser interferometer nonlinearity erron modification method and device are have developed, reaching can realize that single-frequency swashs
Optical interferometer start obtains nonlinearity erron parameter and the purpose of amendment is made in displacement measurement.
The purpose of the present invention is achieved through the following technical solutions：
A kind of amount of interference separates single frequency laser interferometer nonlinearity erron modification method, and this method step is as follows：
(1) single frequency laser interferometer, the photoswitch S in reference path and optical path are openedr、SmSwitch to simultaneously
Open mode；Frequency stabilized carbon dioxide laser launches laser, and reference beam and measuring beam are separated into by polarization splitting prism, first per road light beam
Afterwards by quarter wave plate, photoswitch, then backtracking after the reflection of reflected mirror, incident polarization point again after polarization state is rotated by 90 °
Light prism；The polarised light of orthogonal level and vertical polarization from polarization splitting prism outgoing is separated into by four-way detection system
Phase differs the coherent light of pi/2 successively；
(2) S is maderOpen mode is switched to, while SmSwitch to closed mode；Now measuring beam is by photoswitch SmBlock,
Reference light produces photo-signal normal through original optical path irradiation No. four detector, stores the strength signal I of No. four detectorsr1、
Ir2、Ir3、Ir4；
(3) S is maderClosed mode is switched to, while SmSwitch to open mode；Now reference beam is by photoswitch SrBlock,
Measure light and produce photo-signal normal through original optical path irradiation No. four detector, store the strength signal I of No. four detectorsm1、
Im2、Im3、Im4；
(4) two photoswitch S are made againr、SmOpen mode is switched to simultaneously, now reference beam and measuring beam all may be used
Normal through photoswitch Sr、Sm, single frequency laser interferometer normal work, measurement of the completion to target；Now on No. four detectors
Signal is the superposition of direct current signal and AC signal, the coherent signal I of storage detector output1、I2、I3、I4。
(5) following computing is done to the strength signal of No. four detectors and the coherent signal of output of storage
The DC component of each passage in four-way single frequency laser interferometer is removed, Amplitude Ration is corrected, obtained without direct current biasing
Error etc. amplitude orthogonal signalling.
A kind of amount of interference separates single frequency laser interferometer nonlinearity erron correcting device, in the emitting light path of frequency stabilized carbon dioxide laser
On configure polarization splitting prism A, quarter wave plate B and measurement speculum successively, the quarter wave plate B is located at x, in y plane, and with it is inclined
The Amici prism A that shakes is coaxial, and quarter wave plate B quick shaft directions are at 45 ° counterclockwise with y-axis；In the reflected light of the polarization splitting prism A
Configure quarter wave plate A and reference mirror on road successively, the quarter wave plate A is located at y, in z-plane, and with polarization splitting prism A
Coaxially, quarter wave plate A quick shaft directions and y-axis are at 45 ° clockwise；In the phase positioned at reference mirror of the polarization splitting prism A
1/2 wave plate, depolarization Amici prism and polarization splitting prism B are configured at counter-lateral quadrents successively, 1/2 wave plate is located at y, z-plane
Interior and coaxial with polarization splitting prism A, 1/2 wave plate quick shaft direction is with y-axis clockwise into 22.5 °；The polarization splitting prism B
It is parallel to each other and coaxially, distinguishes on the transmitted light path and reflected light path of the polarization splitting prism B with depolarization Amici prism
Photodetector A and photodetector device B；1/4 ripple is once configured on the reflected light path of the depolarization Amici prism
Piece C and polarization splitting prism C, the quarter wave plate C are in x, y plane, and, quarter wave plate C coaxial with depolarization Amici prism
Quick shaft direction is at 45 ° counterclockwise with y-axis；Photodetector C and photodetector D are arranged respectively at polarization splitting prism C transmissions
In light path and reflected light path；Described polarization splitting prism A, B, C and depolarization Amici prism bottom surface are respectively positioned on x, in z-plane,
And it is coplanar；It is characterized in that：Photoswitch A, which is parallel to each other with reference mirror and is coaxially arranged at quarter wave plate A and refers to, to be reflected
Between mirror；Photoswitch B and measurement speculum are parallel to each other and are coaxially arranged between quarter wave plate B and measurement speculum.
The invention has the characteristics that and good result：
(1) compared to Heydemann modification methods, nonlinearity erron ginseng can be obtained due to need to only switch optical switch status
Number, thus start is that can extract nonlinearity erron parameter and then nonlinearity erron is modified.
(2) error correcting method of nonlinearity erron parameter is extracted compared to modulated light source, without being carried out to LASER Light Source
Modulation, reduces the requirement to light source.
(3) due to the parameter of nonlinearity erron, and then the orthogonal signalling of reconstruction single frequency laser interferometer can be extracted in advance,
Complex mathematical operation is done again without the data to acquisition, reduces requirement of the system to hardware.
Brief description of the drawings
Fig. 1 is amount of interference separation single frequency laser interferometer nonlinearity erron correcting device General allocation structure schematic diagram；
Fig. 2 is amount of interference separation single frequency laser interferometer nonlinearity erron modification method FB(flow block)；
Fig. 3 is the correction effect figure of the present invention
Piece number explanation in figure：1st, frequency stabilized carbon dioxide laser, 2, polarization splitting prism A, 3, quarter wave plate A, 4, photoswitch A, 5 references
Speculum, 6, quarter wave plate B, 7, photoswitch B, 8 measurement speculums, 9,1/2 wave plate, 10 depolarization Amici prisms, 11, polarization point
Light prism B, 12, photodetector A, 13, photodetector B, 14, quarter wave plate C, 15, polarization splitting prism C, 16, photoelectricity are visited
Survey device C, 17, photodetector D.
Embodiment
The embodiment of the present invention is described in detail below in conjunction with the accompanying drawings.
A kind of amount of interference separates single frequency laser interferometer nonlinearity erron correcting device, in the emergent light of frequency stabilized carbon dioxide laser 1
Polarization splitting prism A2, quarter wave plate B6 and measurement speculum 8 are configured on road successively, the quarter wave plate B6 is located at x, in y plane,
And it is coaxial with polarization splitting prism A2, quarter wave plate B6 quick shaft directions are at 45 ° counterclockwise with y-axis；In the polarization splitting prism A2
Reflected light path on configure quarter wave plate A3 and reference mirror 5 successively, the quarter wave plate A3 is located at y, in z-plane, and with it is inclined
The Amici prism A2 that shakes is coaxial, and quarter wave plate A3 quick shaft directions are at 45 ° clockwise with y-axis；In being located at for the polarization splitting prism A2
1/2 wave plate 9, depolarization Amici prism 10 and polarization splitting prism B11, institute are configured at the opposite side portion of reference mirror 5 successively
1/2 wave plate 9 is stated positioned at y, in z-plane, and coaxial with polarization splitting prism A2, the quick shaft direction of 1/2 wave plate 9 and y-axis it is clockwise into
22.5°；The polarization splitting prism B11 and depolarization Amici prism 10 are parallel to each other and coaxially, in the polarization splitting prism
Photodetector A12 and photodetector device B13 are respectively configured on B11 transmitted light path and reflected light path；In the depolarization
The reflected light path last time configuration quarter wave plate C14 and polarization splitting prism C15 of Amici prism 10, the quarter wave plate C14 are located at
In x, y plane, and it is coaxial with depolarization Amici prism 10, quarter wave plate C14 quick shaft directions are at 45 ° counterclockwise with y-axis；Photoelectricity is visited
Device C16 and photodetector D17 is surveyed to be arranged respectively on polarization splitting prism C15 transmitted light paths and reflected light path；The polarization
The bottom surface of Amici prism A2, B11, C15 and depolarization Amici prism 10 is respectively positioned on x, in z-plane, and coplanar；Photoswitch A4 and ginseng
Speculum 5 is examined to be parallel to each other and be coaxially arranged between quarter wave plate A3 and reference mirror 5；Photoswitch B7 reflects with measurement
Mirror 8 is parallel to each other and is coaxially arranged between quarter wave plate B6 and measurement speculum 8；Wherein 1/2 wave plate 9 and quarter wave plate C14
Position can exchange, quick shaft direction is constant；Described measurement speculum (8) and reference mirror (5) include level crossing, pyramid
Prism.
A kind of amount of interference separates single frequency laser interferometer nonlinearity erron modification method, and this method step is as follows：
(1) single frequency laser interferometer is opened so that it can normal work.During interference, the Electric Field Distributions of two beam laser can be with
It is expressed as follows：
(2) Sr is caused to switch to open mode, while Sm switches to closed mode.Now measuring beam is hindered by photoswitch Sm
Disconnected, reference light is produced in the signal on photo-signal, No. four detectors only normal through original optical path irradiation No. four detector
Reference optical signal, be：
α is detector photoelectric transformation efficiency in formula；K represents probe access, k=1,2,3,4；Cosine square in laser
The average value in optical frequency cycle is 1/2, then final output photoelectric current can be expressed as
(3) S is causedrClosed mode is switched to, while SmSwitch to open mode.Now reference beam is by photoswitch SrResistance
Disconnected, measurement light is produced in the signal on photo-signal, No. four detectors only normal through original optical path irradiation No. four detector
Optical signal is measured, is：
(4) two photoswitches are caused to switch to open mode simultaneously again, now reference beam and measuring beam all can be just
Usually through photoswitch, single frequency laser interferometer normal work completes the measurement to target.Now the signal on No. four detectors is joined
The global radiation field examined on the coherent signal of light and measurement light, detector photosensitive unit is：
Light detecting device is all square-law detector, and the photoelectric current of the output of detector is：
First and second DC component equivalent to detector output in formula；Section 3 be reference light with measurement light and frequency
, its average value is zero；Section 4 is difference frequency term, and two light frequencies are equal, thus final output photoelectric current can be expressed as
Section 3 in formula is the AC signal needed for single frequency laser interferometer is measured, the detection in contrast (1) (2) step
Device photoelectric current expression formula can be seen that by controlling optical switch status to obtain the DC component in final coherent light signal,
Finally the AC signal of each road detector acquisition is：
AC signal after normalization is：
(5) final quadrature signal does following computing
Then can remove the DC component of each passage in four-way single frequency laser interferometer, obtain without direct current biasing error etc.
Amplitude orthogonal signalling.As shown in figure 3, the Lissajou figure centre coordinate of single frequency laser interferometer output orthogonal signalling is before amendment
(0.1,0.15), has direct current biasing error, the Amplitude Ration of two-way orthogonal signalling is 1.06；Revised orthogonal signalling Lee Sa such as song
Line centre coordinate is (0,0), eliminates direct current biasing error, and the Amplitude Ration of two-way orthogonal signalling is 1.02, orthogonal signalling width
Value difference is different smaller.
Claims (4)
1. a kind of amount of interference separates single frequency laser interferometer nonlinearity erron modification method, this method step is as follows, and its feature exists
In：
Methods described step is as follows：
(1) single frequency laser interferometer, the photoswitch S in reference path and optical path are openedr、SmSwitch to opening simultaneously
State；Frequency stabilized carbon dioxide laser launches laser, and reference beam and measuring beam are separated into by polarization splitting prism, successively logical per road light beam
Cross quarter wave plate, photoswitch, then backtracking after the reflection of reflected mirror, incident polarization light splitting rib again after polarization state is rotated by 90 °
Mirror；Phase is separated into from the orthogonal level of polarization splitting prism outgoing and the polarised light of vertical polarization by four-way detection system
The coherent light of pi/2 is differed successively；
(2) S is maderOpen mode is switched to, while SmSwitch to closed mode；Now measuring beam is by photoswitch SmBlock, reference
Light produces photo-signal normal through original optical path irradiation No. four detector, stores the strength signal I of No. four detectorsr1、Ir2、
Ir3、Ir4；
(3) S is maderClosed mode is switched to, while SmSwitch to open mode；Now reference beam is by photoswitch SrBlock, measurement
Light produces photo-signal normal through original optical path irradiation No. four detector, stores the strength signal I of No. four detectorsm1、Im2、
Im3、Im4；
(4) two photoswitch S are made againr、SmOpen mode is switched to simultaneously, now reference beam and measuring beam all can be normal
Pass through photoswitch Sr、Sm, single frequency laser interferometer normal work, measurement of the completion to target；The now signal on No. four detectors
For the superposition of direct current signal and AC signal, the coherent signal I of storage detector output1、I2、I3、I4；
(5) following computing is done to the strength signal of No. four detectors and the coherent signal of output of storage
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The DC component of each passage in four-way single frequency laser interferometer is can remove, Amplitude Ration is corrected, obtains and is missed without direct current biasing
Difference etc. amplitude orthogonal signalling.
2. a kind of amount of interference separates single frequency laser interferometer nonlinearity erron correcting device, the emergent light in frequency stabilized carbon dioxide laser (1)
Configured successively on road polarization splitting prism A (2), quarter wave plate B (6) and measurement speculum (8), the quarter wave plate B (6) be located at x,
In y plane, and, quarter wave plate B (6) quick shaft directions and y-axis are at 45 ° counterclockwise, the measurement with polarization splitting prism A (2) coaxially
Speculum (8) is parallel with quarter wave plate B (6)；Quarter wave plate A is configured successively on the reflected light path of the polarization splitting prism A (2)
(3) and reference mirror (5), the quarter wave plate A (3) is located at y, in z-plane, and, 1/4. with polarization splitting prism A (2) coaxially
Wave plate A (3) quick shaft directions and y-axis are at 45 ° clockwise, and the reference mirror (5) is parallel with quarter wave plate A (3)；Described inclined
That shakes Amici prism A (2) configures 1/2 wave plate (9), depolarization light splitting rib successively at the opposite side portion of reference mirror (5)
Mirror (10) and polarization splitting prism B (11), 1/2 wave plate (9) are located at y, in z-plane, and same with polarization splitting prism A (2)
Axle, 1/2 wave plate (9) quick shaft direction is with y-axis clockwise into 22.5 °；The polarization splitting prism B (11) and depolarization Amici prism
(10) it is parallel to each other and coaxially, photoelectricity is respectively configured on the transmitted light path and reflected light path of the polarization splitting prism B (11)
Detector A (12) and photodetector device B (13)；In the reflected light path last time configuration 1/ of the depolarization Amici prism (10)
4 wave plate C (14) and polarization splitting prism C (15), the quarter wave plate C (14) is located at x, in y plane, and with depolarization light splitting rib
Coaxially, quarter wave plate C (14) quick shaft directions and y-axis are at 45 ° counterclockwise for mirror (10)；Photodetector C (16) and photodetector D
(17) it is arranged respectively on polarization splitting prism C (15) transmitted light path and reflected light path；Described polarization splitting prism A, B, C (2,
11st, 15) it is respectively positioned on the bottom surface of depolarization Amici prism (10) x, in z-plane, and it is coplanar；It is characterized in that：Photoswitch A (4)
It is parallel to each other and is coaxially arranged between quarter wave plate A (3) and reference mirror (5) with reference mirror (5)；Photoswitch B
(7) it is parallel to each other and is coaxially arranged between quarter wave plate B (6) and measurement speculum (8) with measurement speculum (8).
3. amount of interference according to claim 2 separates single frequency laser interferometer nonlinearity erron correcting device, its feature exists
In：1/2 wave plate (9) and quarter wave plate C (14) position can be exchanged, and quick shaft direction is constant.
4. amount of interference according to claim 2 separates single frequency laser interferometer nonlinearity erron correcting device, its feature exists
In：Described measurement speculum (8) and reference mirror (5) can be level crossing or prism of corner cube.
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| CN109539975A (en) * | 2018-11-14 | 2019-03-29 | 哈尔滨工业大学 | Single frequency laser interferometer nonlinearity erron modification method and device |
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