GB9525867D0 - Dual beam automatic focus system - Google Patents

Dual beam automatic focus system

Info

Publication number
GB9525867D0
GB9525867D0 GBGB9525867.9A GB9525867A GB9525867D0 GB 9525867 D0 GB9525867 D0 GB 9525867D0 GB 9525867 A GB9525867 A GB 9525867A GB 9525867 D0 GB9525867 D0 GB 9525867D0
Authority
GB
United Kingdom
Prior art keywords
automatic focus
dual beam
focus system
beam automatic
dual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9525867.9A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bio Rad Micromeasurements Ltd
Original Assignee
Bio Rad Micromeasurements Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bio Rad Micromeasurements Ltd filed Critical Bio Rad Micromeasurements Ltd
Priority to GBGB9525867.9A priority Critical patent/GB9525867D0/en
Publication of GB9525867D0 publication Critical patent/GB9525867D0/en
Priority to AU76364/96A priority patent/AU7636496A/en
Priority to PCT/GB1996/002920 priority patent/WO1997022900A1/en
Pending legal-status Critical Current

Links

GBGB9525867.9A 1995-12-19 1995-12-19 Dual beam automatic focus system Pending GB9525867D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GBGB9525867.9A GB9525867D0 (en) 1995-12-19 1995-12-19 Dual beam automatic focus system
AU76364/96A AU7636496A (en) 1995-12-19 1996-11-28 Dual beam automatic focus system
PCT/GB1996/002920 WO1997022900A1 (en) 1995-12-19 1996-11-28 Dual beam automatic focus system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9525867.9A GB9525867D0 (en) 1995-12-19 1995-12-19 Dual beam automatic focus system

Publications (1)

Publication Number Publication Date
GB9525867D0 true GB9525867D0 (en) 1996-02-21

Family

ID=10785625

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9525867.9A Pending GB9525867D0 (en) 1995-12-19 1995-12-19 Dual beam automatic focus system

Country Status (3)

Country Link
AU (1) AU7636496A (en)
GB (1) GB9525867D0 (en)
WO (1) WO1997022900A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6548795B1 (en) * 1999-10-21 2003-04-15 3M Innovative Properties Company Autofocus Z stage
US20080135774A1 (en) 2006-12-08 2008-06-12 Asml Netherlands B.V. Scatterometer, a lithographic apparatus and a focus analysis method
EP3330775B1 (en) * 2016-12-01 2024-02-07 Multiphoton Optics Gmbh Autofocus system for detecting interfaces

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2719214A1 (en) * 1977-04-29 1978-11-09 Agfa Gevaert Ag Automatic camera focusing system - measures light received from object illuminated at two distances from illumination source
DE2836428A1 (en) * 1978-08-19 1980-03-06 Battelle Institut E V Automatic focussing system with light-sensitive CCD elements - compares illumination differences to form difference signal for controlling motor assigned to lens
DE3446727C2 (en) * 1983-08-10 1986-12-04 Fa. Carl Zeiss, 7920 Heidenheim Auto focus device for microscopes
EP0608448A1 (en) * 1993-01-26 1994-08-03 International Business Machines Corporation Method and apparatus for determining position

Also Published As

Publication number Publication date
AU7636496A (en) 1997-07-14
WO1997022900A1 (en) 1997-06-26

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