GB9525867D0 - Dual beam automatic focus system - Google Patents
Dual beam automatic focus systemInfo
- Publication number
- GB9525867D0 GB9525867D0 GBGB9525867.9A GB9525867A GB9525867D0 GB 9525867 D0 GB9525867 D0 GB 9525867D0 GB 9525867 A GB9525867 A GB 9525867A GB 9525867 D0 GB9525867 D0 GB 9525867D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- automatic focus
- dual beam
- focus system
- beam automatic
- dual
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9525867.9A GB9525867D0 (en) | 1995-12-19 | 1995-12-19 | Dual beam automatic focus system |
AU76364/96A AU7636496A (en) | 1995-12-19 | 1996-11-28 | Dual beam automatic focus system |
PCT/GB1996/002920 WO1997022900A1 (en) | 1995-12-19 | 1996-11-28 | Dual beam automatic focus system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9525867.9A GB9525867D0 (en) | 1995-12-19 | 1995-12-19 | Dual beam automatic focus system |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9525867D0 true GB9525867D0 (en) | 1996-02-21 |
Family
ID=10785625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9525867.9A Pending GB9525867D0 (en) | 1995-12-19 | 1995-12-19 | Dual beam automatic focus system |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU7636496A (en) |
GB (1) | GB9525867D0 (en) |
WO (1) | WO1997022900A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6548795B1 (en) * | 1999-10-21 | 2003-04-15 | 3M Innovative Properties Company | Autofocus Z stage |
US20080135774A1 (en) | 2006-12-08 | 2008-06-12 | Asml Netherlands B.V. | Scatterometer, a lithographic apparatus and a focus analysis method |
EP3330775B1 (en) * | 2016-12-01 | 2024-02-07 | Multiphoton Optics Gmbh | Autofocus system for detecting interfaces |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2719214A1 (en) * | 1977-04-29 | 1978-11-09 | Agfa Gevaert Ag | Automatic camera focusing system - measures light received from object illuminated at two distances from illumination source |
DE2836428A1 (en) * | 1978-08-19 | 1980-03-06 | Battelle Institut E V | Automatic focussing system with light-sensitive CCD elements - compares illumination differences to form difference signal for controlling motor assigned to lens |
DE3446727C2 (en) * | 1983-08-10 | 1986-12-04 | Fa. Carl Zeiss, 7920 Heidenheim | Auto focus device for microscopes |
EP0608448A1 (en) * | 1993-01-26 | 1994-08-03 | International Business Machines Corporation | Method and apparatus for determining position |
-
1995
- 1995-12-19 GB GBGB9525867.9A patent/GB9525867D0/en active Pending
-
1996
- 1996-11-28 WO PCT/GB1996/002920 patent/WO1997022900A1/en active Application Filing
- 1996-11-28 AU AU76364/96A patent/AU7636496A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
AU7636496A (en) | 1997-07-14 |
WO1997022900A1 (en) | 1997-06-26 |
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