GB9116038D0 - Sample analysis apparatus and method - Google Patents

Sample analysis apparatus and method

Info

Publication number
GB9116038D0
GB9116038D0 GB919116038A GB9116038A GB9116038D0 GB 9116038 D0 GB9116038 D0 GB 9116038D0 GB 919116038 A GB919116038 A GB 919116038A GB 9116038 A GB9116038 A GB 9116038A GB 9116038 D0 GB9116038 D0 GB 9116038D0
Authority
GB
United Kingdom
Prior art keywords
analysis apparatus
sample analysis
sample
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB919116038A
Other versions
GB2258083A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kratos Analytical Ltd
Original Assignee
Kratos Analytical Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kratos Analytical Ltd filed Critical Kratos Analytical Ltd
Priority to GB9116038A priority Critical patent/GB2258083A/en
Publication of GB9116038D0 publication Critical patent/GB9116038D0/en
Priority to JP4198275A priority patent/JPH05209849A/en
Publication of GB2258083A publication Critical patent/GB2258083A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3005—Observing the objects or the point of impact on the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2516—Secondary particles mass or energy spectrometry
    • H01J2237/2527—Ions [SIMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/304—Controlling tubes
    • H01J2237/30405—Details
    • H01J2237/30411—Details using digital signal processors [DSP]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB9116038A 1991-07-25 1991-07-25 Sample analysis apparatus and method. Withdrawn GB2258083A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9116038A GB2258083A (en) 1991-07-25 1991-07-25 Sample analysis apparatus and method.
JP4198275A JPH05209849A (en) 1991-07-25 1992-07-24 Sample analysis apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9116038A GB2258083A (en) 1991-07-25 1991-07-25 Sample analysis apparatus and method.

Publications (2)

Publication Number Publication Date
GB9116038D0 true GB9116038D0 (en) 1991-09-11
GB2258083A GB2258083A (en) 1993-01-27

Family

ID=10698940

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9116038A Withdrawn GB2258083A (en) 1991-07-25 1991-07-25 Sample analysis apparatus and method.

Country Status (2)

Country Link
JP (1) JPH05209849A (en)
GB (1) GB2258083A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4439971A1 (en) * 1993-11-09 1995-05-24 Advantest Corp Fault analysis system for integrated circuits
KR100217325B1 (en) * 1996-07-02 1999-10-01 윤종용 Fabricating process analyzing method for semiconductor device
CA2835713C (en) 2011-05-13 2023-04-04 Fibics Incorporated Microscopy imaging method and system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2081003B (en) * 1980-07-28 1984-03-07 Smith Kenneth C A Microcircuit fabrication
WO1986002581A1 (en) * 1984-10-26 1986-05-09 Ion Beam Systems, Inc. Focused substrate alteration
DE3538857A1 (en) * 1985-11-02 1987-05-07 Leybold Heraeus Gmbh & Co Kg DEVICE FOR ENTERING A SET POINT FOR THE HIT POINT OF AN ELECTRON BEAM ON A MEDIUM
JPS62195662A (en) * 1986-02-24 1987-08-28 Seiko Instr & Electronics Ltd Method and device for repairing mask
NL8602176A (en) * 1986-08-27 1988-03-16 Philips Nv ION BUNDLE DEVICE FOR PATTERN FINISHING.
NL8820330A (en) * 1987-05-11 1989-04-03 Microbeam Inc MASK REPAIR USING AN OPTIMIZED FOCUSED ION BUNDLE SYSTEM.
US4874947A (en) * 1988-02-26 1989-10-17 Micrion Corporation Focused ion beam imaging and process control
JP2842879B2 (en) * 1989-01-06 1999-01-06 株式会社日立製作所 Surface analysis method and device

Also Published As

Publication number Publication date
JPH05209849A (en) 1993-08-20
GB2258083A (en) 1993-01-27

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)