GB2081003B - Microcircuit fabrication - Google Patents
Microcircuit fabricationInfo
- Publication number
- GB2081003B GB2081003B GB8122260A GB8122260A GB2081003B GB 2081003 B GB2081003 B GB 2081003B GB 8122260 A GB8122260 A GB 8122260A GB 8122260 A GB8122260 A GB 8122260A GB 2081003 B GB2081003 B GB 2081003B
- Authority
- GB
- United Kingdom
- Prior art keywords
- microcircuit fabrication
- microcircuit
- fabrication
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
- H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0277—Electrolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Computer Hardware Design (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8122260A GB2081003B (en) | 1980-07-28 | 1981-07-20 | Microcircuit fabrication |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8024640 | 1980-07-28 | ||
GB8122260A GB2081003B (en) | 1980-07-28 | 1981-07-20 | Microcircuit fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2081003A GB2081003A (en) | 1982-02-10 |
GB2081003B true GB2081003B (en) | 1984-03-07 |
Family
ID=26276365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8122260A Expired GB2081003B (en) | 1980-07-28 | 1981-07-20 | Microcircuit fabrication |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2081003B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0081283B1 (en) * | 1981-09-30 | 1987-08-19 | Fujitsu Limited | Electron beam exposure method and apparatus |
US4426583A (en) * | 1982-05-10 | 1984-01-17 | International Business Machines Corporation | Electron beam potential switching apparatus |
JP2811073B2 (en) * | 1988-11-01 | 1998-10-15 | セイコーインスツルメンツ株式会社 | Cross section processing observation device |
GB2247345B (en) * | 1990-07-05 | 1995-04-05 | Haroon Ahmed | Integrated circuit structure analysis |
GB2258083A (en) * | 1991-07-25 | 1993-01-27 | Kratos Analytical Ltd | Sample analysis apparatus and method. |
-
1981
- 1981-07-20 GB GB8122260A patent/GB2081003B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB2081003A (en) | 1982-02-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS571256A (en) | Integrated circuit | |
JPS5710977A (en) | Semiconductor circuit | |
GB8331916D0 (en) | Semiconductor devices | |
EP0042489A3 (en) | Semiconductor devices | |
JPS5712525A (en) | Semiconductor element | |
DE3173835D1 (en) | Semiconductor devices | |
CS143481A2 (en) | Zpusob izolacebetainu z popripade invertovane melasy | |
GB8329071D0 (en) | Semiconductor | |
JPS56154424A (en) | Alkylperfluoro(2-methyl-5-oxo-3-oxahexanoate) | |
GB2089108B (en) | Semiconductor laser | |
DE3175781D1 (en) | Integrated circuit | |
JPS577159A (en) | Semiconductor element | |
JPS56122211A (en) | Integrated circuit | |
GB2081003B (en) | Microcircuit fabrication | |
CS883381A2 (en) | Zpusob vyroby n (halogenmethyl) acylamidu | |
GB8326563D0 (en) | Semiconductor devices | |
GB2079524B (en) | Semiconductor laser | |
JPS5772316A (en) | Chip type electronic part | |
DE3171754D1 (en) | Semiconductor laser | |
JPS56133396A (en) | Surfactant | |
JPS5796587A (en) | Chip part | |
JPS56106392A (en) | Rushhcurrent preventing circuit | |
JPS5784004A (en) | Case | |
JPS5743705A (en) | Brief case | |
JPS56110084A (en) | Bimetal |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
732 | Registration of transactions, instruments or events in the register (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |