GB882214A - Apparatus and method for gas plating with aluminium - Google Patents
Apparatus and method for gas plating with aluminiumInfo
- Publication number
- GB882214A GB882214A GB1925758A GB1925758A GB882214A GB 882214 A GB882214 A GB 882214A GB 1925758 A GB1925758 A GB 1925758A GB 1925758 A GB1925758 A GB 1925758A GB 882214 A GB882214 A GB 882214A
- Authority
- GB
- United Kingdom
- Prior art keywords
- aluminium
- compound
- coated
- diethylaluminium
- chloride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
- C23C16/20—Deposition of aluminium only
Abstract
882,214. Coating with aluminium. UNION CARBIDE CORPORATION. June 16, 1958, No. 19257/58. Class 82(2). A substrate is coated with aluminium by first cleaning it to remove foreign matter and moisture from the surface and then contacting it in a non-oxidising atmosphere free of water vapour with the vapour of an organo-aluminium compound while it is at a temperature such as to cause thermal decomposition of the compound. Surfaces of iron, steel, copper, magnesium, glass, synthetic resin, wood and paper may be coated by the decomposition of isobutyl-, triisobutyl-, tripropyl-, trimethyl- and triethyl-aluminium, dimethylaluminium chloride, diethylaluminium chloride, diethylaluminium hydride, diethylaluminium bromide, dipropylaluminium chloride, dibromoaluminium hydride and chloroaluminium dihydride. As shown, articles 26 to be coated are suspended in tube 21 and heated by oven 22. A solution of aluminium compound in heptane is injected from cylinder 18 through hypodermic needle 17 into heated container 14 where the compound is vaporised, the resulting vapour being drawn into tube 21 by vacuum pump 13. Residual compound, decomposition products and heptane are condensed in water-cooled traps 29, 30. Prior to and during coating, inert gas such as nitrogen, helium or argon is admitted to the apparatus from tank 8.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1925758A GB882214A (en) | 1958-06-16 | 1958-06-16 | Apparatus and method for gas plating with aluminium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1925758A GB882214A (en) | 1958-06-16 | 1958-06-16 | Apparatus and method for gas plating with aluminium |
Publications (1)
Publication Number | Publication Date |
---|---|
GB882214A true GB882214A (en) | 1961-11-15 |
Family
ID=10126362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1925758A Expired GB882214A (en) | 1958-06-16 | 1958-06-16 | Apparatus and method for gas plating with aluminium |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB882214A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5217756A (en) * | 1990-06-08 | 1993-06-08 | Nec Corporation | Selective chemical vapor deposition of aluminum, aluminum CVD materials and process for preparing the same |
US5492734A (en) * | 1991-02-04 | 1996-02-20 | Canon Kabushiki Kaisha | Method of forming deposition film |
GB2337765A (en) * | 1998-05-27 | 1999-12-01 | Solicitor For The Affairs Of H | Aluminium diffusion of copper coatings |
-
1958
- 1958-06-16 GB GB1925758A patent/GB882214A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5217756A (en) * | 1990-06-08 | 1993-06-08 | Nec Corporation | Selective chemical vapor deposition of aluminum, aluminum CVD materials and process for preparing the same |
US5492734A (en) * | 1991-02-04 | 1996-02-20 | Canon Kabushiki Kaisha | Method of forming deposition film |
GB2337765A (en) * | 1998-05-27 | 1999-12-01 | Solicitor For The Affairs Of H | Aluminium diffusion of copper coatings |
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