GB785878A - A method of carrying out industrial processes in a glow discharge - Google Patents

A method of carrying out industrial processes in a glow discharge

Info

Publication number
GB785878A
GB785878A GB4499/54A GB449954A GB785878A GB 785878 A GB785878 A GB 785878A GB 4499/54 A GB4499/54 A GB 4499/54A GB 449954 A GB449954 A GB 449954A GB 785878 A GB785878 A GB 785878A
Authority
GB
United Kingdom
Prior art keywords
cathodes
glow
discharge
fringes
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4499/54A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB785878A publication Critical patent/GB785878A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • C21D1/38—Heating by cathodic discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

785,878. Coating by sputtering. BERGHAUS, B. Feb. 16, 1954 [Feb. 17, 1953], No. 4499/54. Class 82(2) [Also in Groups XI and XL(a)] Industrial processes such as metallizing, annealing, hardening, nitriding, carburizing, and the production of ammonia, are carried out in a glow discharge using at least two cathodes, the energy of the discharge between two cathodes being increased by choosing the distance between them so that their glow fringes overlap but so that their dark spaces do not overlap. The discharge may be operated with direct or alternating current and is preferably supplied periodically with maximum energy, e.g. by intermittent electric supply or by changing the discharge pressure. The overlapping of the glow fringes is effected (a) with a given distance between the cathodes, by regulating the gas pressure (which is preferably 1 mm. Hg. or more) or, if the distance is too great, by using auxiliary cathodes which are sufficiently near the cathodes to produce a glow fringe overlapping the glow fringes of the cathodes, and (b) with a given gas pressure, by selecting the distance between the cathodes or by using auxiliary cathodes. Fig. 1 shows an arrangement for producing a coating of tungsten on a tubular iron workpiece 5, in which glow fringes are established on auxiliary cathode 7, which is the source of the tungsten, and on the interior of the workpiece, which is at the same cathode potential as the auxiliary cathode, the discharge gas being hydrogen at a pressure of 2.5 mm. Hg. The coating with tantalum of the front edges of turbine blades is also described (Figs. 3 and 4, not shown).
GB4499/54A 1953-02-17 1954-02-16 A method of carrying out industrial processes in a glow discharge Expired GB785878A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH785878X 1953-02-17

Publications (1)

Publication Number Publication Date
GB785878A true GB785878A (en) 1957-11-06

Family

ID=4536581

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4499/54A Expired GB785878A (en) 1953-02-17 1954-02-16 A method of carrying out industrial processes in a glow discharge

Country Status (7)

Country Link
US (1) US2955998A (en)
BE (1) BE526527A (en)
CH (1) CH314340A (en)
DE (1) DE976529C (en)
FR (1) FR1097674A (en)
GB (1) GB785878A (en)
NL (2) NL83318C (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256818A (en) * 1955-11-26 1966-06-21 Berghaus Bernhard Method of reducing barrel wear
DE3029339A1 (en) * 1979-09-14 1981-03-26 Hitachi, Ltd., Tokio/Tokyo Glow discharge heat treatment plant - with vacuum furnace and auxiliary electrodes initiating discharge
GB2170350A (en) * 1984-12-13 1986-07-30 Stc Plc Plasma reactor vessel and process
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
US9212416B2 (en) 2009-08-07 2015-12-15 Swagelok Company Low temperature carburization under soft vacuum
US9617632B2 (en) 2012-01-20 2017-04-11 Swagelok Company Concurrent flow of activating gas in low temperature carburization

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3231484A (en) * 1956-10-27 1966-01-25 Berghaus Elektrophysik Anst Method of sustaining a glow discharge in a high pressure area
CH404010A (en) * 1961-03-30 1965-12-15 Berghaus Elektrophysik Anst Method and device for carrying out technical processes under the influence of an electric glow discharge
DE1271267B (en) * 1961-04-14 1968-06-27 Litton Systems Inc Low pressure mercury vapor discharge tubes
US3239368A (en) * 1962-04-26 1966-03-08 Nra Inc Method of preparing thin films on substrates by an electrical discharge
GB1052029A (en) * 1962-09-20
US3314873A (en) * 1962-11-28 1967-04-18 Western Electric Co Method and apparatus for cathode sputtering using a cylindrical cathode
US3423562A (en) * 1965-06-24 1969-01-21 Gen Electric Glow discharge apparatus
CH551496A (en) * 1970-09-21 1974-07-15 Berghaus Bernhard Elektrophysi PROCESS FOR STRENGTHENING THE SURFACE OF WORKPIECES MADE OF IRON AND STEEL.
FR2119930B1 (en) * 1970-12-31 1974-08-19 Ibm
US3723289A (en) * 1971-08-12 1973-03-27 Celanese Corp Method and apparatus for plasma treatment of substrates
DE2811942C2 (en) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Furnace for the ionic nitriding treatment of metallic workpieces
CH659346A5 (en) * 1983-05-10 1987-01-15 Balzers Hochvakuum DEVICE FOR TREATING THE INTERNAL WALL OF A TUBE.
DE19652633A1 (en) * 1996-09-13 1998-03-19 Euromat Gmbh Method and device for internally coating metallic components
DE19722056A1 (en) * 1997-05-27 1998-12-03 Roland Dr Gesche Method and apparatus for production of thin layers by low pressure gas discharge in a hollow cathode

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1162149A (en) * 1914-10-22 1915-11-30 Engelhardt A Eckhardt Process of making wear-withstanding coat.
US2164595A (en) * 1936-12-07 1939-07-04 Siemens Ag Method of coating electrodes
DE722131C (en) * 1937-08-15 1942-07-01 Bernhard Berghaus Arrangement and method for metallizing objects by means of cathode sputtering
FR841904A (en) * 1937-08-26 1939-06-01 Method for metallizing or coating articles with a thermally vaporized material
US2237328A (en) * 1938-02-19 1941-04-08 Birdseye Electric Corp Metal-coating bulbs or the like
US2438561A (en) * 1942-04-30 1948-03-30 Gen Electric Electrothermal deposition apparatus
US2434931A (en) * 1944-12-01 1948-01-27 Bell Telephone Labor Inc Method and apparatus for ionic discharge coating
NL91406C (en) * 1950-08-03

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256818A (en) * 1955-11-26 1966-06-21 Berghaus Bernhard Method of reducing barrel wear
DE3029339A1 (en) * 1979-09-14 1981-03-26 Hitachi, Ltd., Tokio/Tokyo Glow discharge heat treatment plant - with vacuum furnace and auxiliary electrodes initiating discharge
GB2170350A (en) * 1984-12-13 1986-07-30 Stc Plc Plasma reactor vessel and process
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
US9212416B2 (en) 2009-08-07 2015-12-15 Swagelok Company Low temperature carburization under soft vacuum
US10156006B2 (en) 2009-08-07 2018-12-18 Swagelok Company Low temperature carburization under soft vacuum
US10934611B2 (en) 2009-08-07 2021-03-02 Swagelok Company Low temperature carburization under soft vacuum
US9617632B2 (en) 2012-01-20 2017-04-11 Swagelok Company Concurrent flow of activating gas in low temperature carburization
US10246766B2 (en) 2012-01-20 2019-04-02 Swagelok Company Concurrent flow of activating gas in low temperature carburization
US11035032B2 (en) 2012-01-20 2021-06-15 Swagelok Company Concurrent flow of activating gas in low temperature carburization

Also Published As

Publication number Publication date
DE976529C (en) 1963-10-24
US2955998A (en) 1960-10-11
FR1097674A (en) 1955-07-08
BE526527A (en)
CH314340A (en) 1956-06-15
NL83318C (en)
NL178001B (en)

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