GB766119A - Improved means for coating of surfaces by vapour deposition - Google Patents

Improved means for coating of surfaces by vapour deposition

Info

Publication number
GB766119A
GB766119A GB222453A GB222453A GB766119A GB 766119 A GB766119 A GB 766119A GB 222453 A GB222453 A GB 222453A GB 222453 A GB222453 A GB 222453A GB 766119 A GB766119 A GB 766119A
Authority
GB
United Kingdom
Prior art keywords
baffle
vapour
outlet passage
passage
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB222453A
Inventor
Tzu En Shen
John Philip Huggett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BRITISH DIELECTRIC RES Ltd
Original Assignee
BRITISH DIELECTRIC RES Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL85130D priority Critical patent/NL85130C/xx
Priority to NLAANVRAGE8102730,B priority patent/NL184420B/en
Application filed by BRITISH DIELECTRIC RES Ltd filed Critical BRITISH DIELECTRIC RES Ltd
Priority to GB222453A priority patent/GB766119A/en
Priority to FR1091369D priority patent/FR1091369A/en
Priority to ES0213308A priority patent/ES213308A1/en
Publication of GB766119A publication Critical patent/GB766119A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Abstract

766,119. Coating by vapour deposition. BRITISH DIELECTRIC RESEARCH, Ltd. Jan. 25, 1954 [Jan. 26, 1953], No. 2224/53. Class 82(2) Vacuum - evaporation, vapour - deposition apparatus comprises a container, for the material to be vaporized, having a non-restricting outlet passage for directing the free flow of vapour from the evaporating material in the container towards the surface to be coated and a baffle positioned within the container to cut off the straight line paths extending through the passage between the evaporating material and the surface to be coated and to provide, in conjunction with the entrance to the passage, paths for the free flow of vapour around the baffle. A crucible, Fig. 1, heated at 3, comprises a heated outlet passage 4 and a horizontal baffle 7. In another form, Fig. 2, the outlet passage 13 is detachable from the crucible 11 and the baffle is in the form of a bar 17. Baffle and outlet passage may form a unitary structure.
GB222453A 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition Expired GB766119A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL85130D NL85130C (en) 1953-01-26
NLAANVRAGE8102730,B NL184420B (en) 1953-01-26 N-TRIFLUORACETYLADRIAMYCINE DERIVATIVES AND METHOD FOR PREPARING A PHARMACEUTICAL PREPARATION CONTAINING THEY.
GB222453A GB766119A (en) 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition
FR1091369D FR1091369A (en) 1953-01-26 1954-01-13 Advanced device for the deposition of materials by evapocation in a vacuum
ES0213308A ES213308A1 (en) 1953-01-26 1954-01-25 Improved means for coating of surfaces by vapour deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB222453A GB766119A (en) 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition

Publications (1)

Publication Number Publication Date
GB766119A true GB766119A (en) 1957-01-16

Family

ID=9735777

Family Applications (1)

Application Number Title Priority Date Filing Date
GB222453A Expired GB766119A (en) 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition

Country Status (4)

Country Link
ES (1) ES213308A1 (en)
FR (1) FR1091369A (en)
GB (1) GB766119A (en)
NL (2) NL184420B (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3001892A (en) * 1958-03-26 1961-09-26 Gen Electric Evaporation method and apparatus
US3244857A (en) * 1963-12-23 1966-04-05 Ibm Vapor deposition source
US3245674A (en) * 1960-04-25 1966-04-12 Nat Res Corp Crucible coated with reaction product of aluminum and boron nitride coating
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3603285A (en) * 1968-11-05 1971-09-07 Massachusetts Inst Technology Vapor deposition apparatus
US3690638A (en) * 1970-05-15 1972-09-12 Republic Steel Corp Apparatus and method for vaporizing molten metal
US4094269A (en) 1974-06-14 1978-06-13 Zlafop Pri Ban Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
EP0510259A1 (en) * 1991-04-03 1992-10-28 Mitsubishi Jukogyo Kabushiki Kaisha Apparatus for vacuum deposition of a sublimable substance
EP1130129A1 (en) 2000-03-03 2001-09-05 Eastman Kodak Company Source for thermal physical vapor deposition of organic electroluminescent layers
CN107254663A (en) * 2017-07-13 2017-10-17 安徽省宁国市海伟电子有限公司 A kind of anti-oxidative vacuum coater
CN109321878A (en) * 2017-07-31 2019-02-12 三星显示有限公司 Equipment for manufacturing display device
GB2574400A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device
GB2574401A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920003591B1 (en) * 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 Continuous vacuum vapor deposition device
WO1996035822A1 (en) * 1995-05-10 1996-11-14 Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie Device and plant for coating a steel band

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3001892A (en) * 1958-03-26 1961-09-26 Gen Electric Evaporation method and apparatus
US3245674A (en) * 1960-04-25 1966-04-12 Nat Res Corp Crucible coated with reaction product of aluminum and boron nitride coating
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3244857A (en) * 1963-12-23 1966-04-05 Ibm Vapor deposition source
US3603285A (en) * 1968-11-05 1971-09-07 Massachusetts Inst Technology Vapor deposition apparatus
US3690638A (en) * 1970-05-15 1972-09-12 Republic Steel Corp Apparatus and method for vaporizing molten metal
US4094269A (en) 1974-06-14 1978-06-13 Zlafop Pri Ban Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
EP0510259A1 (en) * 1991-04-03 1992-10-28 Mitsubishi Jukogyo Kabushiki Kaisha Apparatus for vacuum deposition of a sublimable substance
US5272298A (en) * 1991-04-03 1993-12-21 Mitsubishi Jukogyo Kabushiki Kaisha Apparatus for vacuum deposition of sublimative substance
JP2001291589A (en) * 2000-03-03 2001-10-19 Eastman Kodak Co Thermal physical vapor deposition source
EP1130129A1 (en) 2000-03-03 2001-09-05 Eastman Kodak Company Source for thermal physical vapor deposition of organic electroluminescent layers
JP4520059B2 (en) * 2000-03-03 2010-08-04 イーストマン コダック カンパニー Thermal physical vapor deposition source
CN107254663A (en) * 2017-07-13 2017-10-17 安徽省宁国市海伟电子有限公司 A kind of anti-oxidative vacuum coater
CN109321878A (en) * 2017-07-31 2019-02-12 三星显示有限公司 Equipment for manufacturing display device
CN109321878B (en) * 2017-07-31 2022-11-15 三星显示有限公司 Apparatus for manufacturing display device
GB2574400A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device
GB2574401A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device
GB2574400B (en) * 2018-06-04 2022-11-23 Dyson Technology Ltd A Device
GB2574401B (en) * 2018-06-04 2022-11-23 Dyson Technology Ltd A Device
US11613804B2 (en) 2018-06-04 2023-03-28 Dyson Technology Limited Vapour deposition evaporator device

Also Published As

Publication number Publication date
NL85130C (en)
ES213308A1 (en) 1954-03-16
NL184420B (en)
FR1091369A (en) 1955-04-12

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