GB762365A - Improvements in and relating to ionic vacuum pumping apparatus - Google Patents
Improvements in and relating to ionic vacuum pumping apparatusInfo
- Publication number
- GB762365A GB762365A GB1926053A GB1926053A GB762365A GB 762365 A GB762365 A GB 762365A GB 1926053 A GB1926053 A GB 1926053A GB 1926053 A GB1926053 A GB 1926053A GB 762365 A GB762365 A GB 762365A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chamber
- discharge
- pump
- gas
- electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005086 pumping Methods 0.000 title 1
- 239000003989 dielectric material Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
- H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/048—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using an excitation coil
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
762,365. Discharge apparatus. EDWARDS & CO. (LONDON), Ltd., W. Oct. 8, 1954 [July 10, 1953], No. 19260/53. Class 39(1). In an ionization vacuum pump the ionization of the gas to be evacuated is effected by means of a high frequency discharge. The pump shown comprises a cylindrical discharge chamber 1 of glass or other dielectric material having good secondary emission properties connected to a metal vessel 2 which it is required to evacuate. The vessel 2 is provided with an earth connection 3. A collector electrode 5 having a lead 6 for connection to a source of high voltage is supported in a continuation 4 of the chamber 1 of reduced diameter which is connected to a backing pump (not shown). A coil 7 surrounding the discharge chamber 1 is connected to a high frequency oscillator 8. An additional steady transverse magnetic field may be supplied to increase the lengths of the paths traversed by the electrons. The coil 7 may be replaced by two coils, each embracing one half of the periphery of the chamber 1, or by two plate electrodes either inside or outside the chamber. The discharge can be started with a potential as low as 100 volts, the required large increase in the number of electrons being obtained by secondary emission from the walls of the discharge chamber. The ionized gas particles resulting from collision are attracted towards the electrode 5 thereby forming a stream of gas which passes to the backing pump.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1926053A GB762365A (en) | 1953-07-10 | 1953-07-10 | Improvements in and relating to ionic vacuum pumping apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1926053A GB762365A (en) | 1953-07-10 | 1953-07-10 | Improvements in and relating to ionic vacuum pumping apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB762365A true GB762365A (en) | 1956-11-28 |
Family
ID=10126415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1926053A Expired GB762365A (en) | 1953-07-10 | 1953-07-10 | Improvements in and relating to ionic vacuum pumping apparatus |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB762365A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3292844A (en) * | 1962-05-23 | 1966-12-20 | Robert A Cornog | Vacuum pump |
EP0499239A2 (en) * | 1991-02-12 | 1992-08-19 | Ebara Corporation | Ion pump and vacuum pumping unit using the same |
US5240381A (en) * | 1990-08-03 | 1993-08-31 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
US5480286A (en) * | 1990-08-03 | 1996-01-02 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
GB2552071A (en) * | 2016-05-31 | 2018-01-10 | Agilent Technologies Inc | Ion throughput pump and method |
-
1953
- 1953-07-10 GB GB1926053A patent/GB762365A/en not_active Expired
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3292844A (en) * | 1962-05-23 | 1966-12-20 | Robert A Cornog | Vacuum pump |
US5240381A (en) * | 1990-08-03 | 1993-08-31 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
US5480286A (en) * | 1990-08-03 | 1996-01-02 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
US5727929A (en) * | 1990-08-03 | 1998-03-17 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
EP0499239A2 (en) * | 1991-02-12 | 1992-08-19 | Ebara Corporation | Ion pump and vacuum pumping unit using the same |
EP0499239A3 (en) * | 1991-02-12 | 1993-03-03 | Ebara Corporation | Ion pump and vacuum pumping unit using the same |
GB2552071A (en) * | 2016-05-31 | 2018-01-10 | Agilent Technologies Inc | Ion throughput pump and method |
US10455683B2 (en) | 2016-05-31 | 2019-10-22 | Agilent Technologies, Inc. | Ion throughput pump and method |
GB2552071B (en) * | 2016-05-31 | 2022-11-09 | Agilent Technologies Inc | Ion throughput pump and method |
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