GB2594314B - High vacuum pumps their method of manufacture and use - Google Patents

High vacuum pumps their method of manufacture and use Download PDF

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Publication number
GB2594314B
GB2594314B GB2005964.8A GB202005964A GB2594314B GB 2594314 B GB2594314 B GB 2594314B GB 202005964 A GB202005964 A GB 202005964A GB 2594314 B GB2594314 B GB 2594314B
Authority
GB
United Kingdom
Prior art keywords
manufacture
high vacuum
vacuum pumps
pumps
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2005964.8A
Other versions
GB2594314A (en
GB202005964D0 (en
Inventor
James Rudge Oliver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB2005964.8A priority Critical patent/GB2594314B/en
Publication of GB202005964D0 publication Critical patent/GB202005964D0/en
Priority to PCT/GB2021/050897 priority patent/WO2021214427A1/en
Priority to EP21721160.6A priority patent/EP4139496A1/en
Publication of GB2594314A publication Critical patent/GB2594314A/en
Application granted granted Critical
Publication of GB2594314B publication Critical patent/GB2594314B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/90—Coating; Surface treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB2005964.8A 2020-04-23 2020-04-23 High vacuum pumps their method of manufacture and use Active GB2594314B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB2005964.8A GB2594314B (en) 2020-04-23 2020-04-23 High vacuum pumps their method of manufacture and use
PCT/GB2021/050897 WO2021214427A1 (en) 2020-04-23 2021-04-14 High vacuum pumps their method of manufacture and use
EP21721160.6A EP4139496A1 (en) 2020-04-23 2021-04-14 High vacuum pumps their method of manufacture and use

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2005964.8A GB2594314B (en) 2020-04-23 2020-04-23 High vacuum pumps their method of manufacture and use

Publications (3)

Publication Number Publication Date
GB202005964D0 GB202005964D0 (en) 2020-06-10
GB2594314A GB2594314A (en) 2021-10-27
GB2594314B true GB2594314B (en) 2022-06-08

Family

ID=71080073

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2005964.8A Active GB2594314B (en) 2020-04-23 2020-04-23 High vacuum pumps their method of manufacture and use

Country Status (3)

Country Link
EP (1) EP4139496A1 (en)
GB (1) GB2594314B (en)
WO (1) WO2021214427A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060034393A (en) * 2004-10-19 2006-04-24 삼성전자주식회사 Turbo molecular pump
US20190309408A1 (en) * 2016-06-03 2019-10-10 Pfeiffer Vacuum Components & Solutions Gmbh Vacuum device and method for coating components of a vacuum device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2527398B2 (en) * 1992-06-05 1996-08-21 財団法人真空科学研究所 Turbo molecular pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060034393A (en) * 2004-10-19 2006-04-24 삼성전자주식회사 Turbo molecular pump
US20190309408A1 (en) * 2016-06-03 2019-10-10 Pfeiffer Vacuum Components & Solutions Gmbh Vacuum device and method for coating components of a vacuum device

Also Published As

Publication number Publication date
EP4139496A1 (en) 2023-03-01
WO2021214427A1 (en) 2021-10-28
GB2594314A (en) 2021-10-27
GB202005964D0 (en) 2020-06-10

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