GB2570349B - Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings - Google Patents

Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings Download PDF

Info

Publication number
GB2570349B
GB2570349B GB1801106.4A GB201801106A GB2570349B GB 2570349 B GB2570349 B GB 2570349B GB 201801106 A GB201801106 A GB 201801106A GB 2570349 B GB2570349 B GB 2570349B
Authority
GB
United Kingdom
Prior art keywords
vacuum apparatus
apparatus casings
methods
casings
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1801106.4A
Other versions
GB201801106D0 (en
GB2570349A (en
Inventor
David Smith Paul
Lucchetta Emiliano
David Jones Peter
Desmond Wild Robert
Verma Mayank
Glyn Horler Richard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1801106.4A priority Critical patent/GB2570349B/en
Publication of GB201801106D0 publication Critical patent/GB201801106D0/en
Priority to PCT/GB2019/050118 priority patent/WO2019145679A1/en
Publication of GB2570349A publication Critical patent/GB2570349A/en
Application granted granted Critical
Publication of GB2570349B publication Critical patent/GB2570349B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/406—Casings; Connections of working fluid especially adapted for liquid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/514—Porosity

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB1801106.4A 2018-01-23 2018-01-23 Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings Active GB2570349B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1801106.4A GB2570349B (en) 2018-01-23 2018-01-23 Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings
PCT/GB2019/050118 WO2019145679A1 (en) 2018-01-23 2019-01-17 Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1801106.4A GB2570349B (en) 2018-01-23 2018-01-23 Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings

Publications (3)

Publication Number Publication Date
GB201801106D0 GB201801106D0 (en) 2018-03-07
GB2570349A GB2570349A (en) 2019-07-24
GB2570349B true GB2570349B (en) 2021-01-27

Family

ID=61283644

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1801106.4A Active GB2570349B (en) 2018-01-23 2018-01-23 Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings

Country Status (2)

Country Link
GB (1) GB2570349B (en)
WO (1) WO2019145679A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230092765A (en) * 2021-12-16 2023-06-26 가부시키가이샤 에바라 세이사꾸쇼 Vacuum pump apparatus and method of operating the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010051358A2 (en) * 2008-10-30 2010-05-06 Scroll Laboratories, Inc Scroll-type fluid displacement apparatus with improved cooling system
WO2010122004A2 (en) * 2009-04-21 2010-10-28 Oerlikon Leybold Vacuum Gmbh Vacuum pump housing
JP2017082767A (en) * 2015-10-23 2017-05-18 株式会社島津製作所 Vacuum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950007378B1 (en) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 Vacuum pump
JP3084622B2 (en) * 1997-08-13 2000-09-04 セイコー精機株式会社 Turbo molecular pump
EP1044334A1 (en) * 1997-12-30 2000-10-18 Ateliers Busch S.A. Cooling device
EP3070335B1 (en) * 2015-03-20 2019-07-31 Pfeiffer Vacuum GmbH Housing for a vacuum pumping and/or for a piece of a vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010051358A2 (en) * 2008-10-30 2010-05-06 Scroll Laboratories, Inc Scroll-type fluid displacement apparatus with improved cooling system
WO2010122004A2 (en) * 2009-04-21 2010-10-28 Oerlikon Leybold Vacuum Gmbh Vacuum pump housing
JP2017082767A (en) * 2015-10-23 2017-05-18 株式会社島津製作所 Vacuum pump

Also Published As

Publication number Publication date
WO2019145679A1 (en) 2019-08-01
GB201801106D0 (en) 2018-03-07
GB2570349A (en) 2019-07-24

Similar Documents

Publication Publication Date Title
GB201803170D0 (en) Optical apparatus and methods of manufacture thereof
IL281172A (en) Method and apparatus for the production of garments
IL283903B1 (en) Shielding facility and method of making thereof
EP3844606C0 (en) Audio apparatus and method of audio processing
EP3839077C0 (en) Refinement apparatus and method
GB201717744D0 (en) Apparatus and method for the manufacture of three-dimensional
ZA202101472B (en) Method of forming an article
GB201816911D0 (en) Apparatus and methods
SG11202011267XA (en) Apparatus and method of use thereof
GB201700170D0 (en) Manufacturing method and apparatus
GB2570349B (en) Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings
GB201802405D0 (en) Method of manufacturing an object
ZA202007640B (en) Method and apparatus for manufacture of dry powders
GB2588346B (en) Apparatus and methods
SG10201906930VA (en) Etching method and etching apparatus
GB202014138D0 (en) Methods and apparatus for manufacture of moment connection components
GB201910535D0 (en) Excavtion apparatus and method of manufacture and use tereof
ZA201905153B (en) Vacuum apparatus and method of using same
GB201805392D0 (en) Methods of manufacture and associated apparatus
GB2581765B8 (en) Balancing apparatus and method of manufacture thereof
GB201801653D0 (en) Suction apparatus and method of use thereof
GB201917126D0 (en) Shimming apparatus and method of manufacture thereof
EP3844079C0 (en) Bag and method of manufacture
GB201717785D0 (en) Suction apparatus and method of use thereof
GB201711142D0 (en) Suction apparatus and method of use thereof