GB2517627A - Conjugate double-pass confocal measurement device with fluorescent mirror or phase conjugate mirror - Google Patents

Conjugate double-pass confocal measurement device with fluorescent mirror or phase conjugate mirror Download PDF

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Publication number
GB2517627A
GB2517627A GB1422449.7A GB201422449A GB2517627A GB 2517627 A GB2517627 A GB 2517627A GB 201422449 A GB201422449 A GB 201422449A GB 2517627 A GB2517627 A GB 2517627A
Authority
GB
United Kingdom
Prior art keywords
mirror
conjugate
fluorescent
measurement device
confocal measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB1422449.7A
Other versions
GB2517627B (en
Inventor
Jiubin Tan
Jian Liu
Xinran Tan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN2012102448259A external-priority patent/CN102818522A/en
Priority claimed from CN201210244838.6A external-priority patent/CN102759331B/en
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Publication of GB2517627A publication Critical patent/GB2517627A/en
Application granted granted Critical
Publication of GB2517627B publication Critical patent/GB2517627B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

A conjugate double-pass confocal measurement device with a fluorescent mirror is disclosed, in which an elliptical mirror is placed along the reflected light path of a beam splitter such that a near focus of the elliptical mirror is located on a surface of a specimen which is placed on a three-axis stage, and a fluorescent mirror is placed on a far focus of the elliptical mirror.
GB1422449.7A 2012-07-05 2013-07-04 Conjugate double-pass confocal measurement device with fluorescent mirror or phase conjugate mirror Expired - Fee Related GB2517627B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN2012102448259A CN102818522A (en) 2012-07-05 2012-07-05 Phase conjugate reflection bi-pass lighting confocal microscopic device
CN201210244838.6A CN102759331B (en) 2012-07-05 2012-07-05 Conjugated bi-pass lighting confocal microscopic device of fluorescent reflecting mirror
PCT/CN2013/078831 WO2014005532A1 (en) 2012-07-05 2013-07-04 Conjugate double-pass confocal measurement device with fluorescent mirror or phase conjugate mirror

Publications (2)

Publication Number Publication Date
GB2517627A true GB2517627A (en) 2015-02-25
GB2517627B GB2517627B (en) 2018-03-21

Family

ID=49881351

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1422449.7A Expired - Fee Related GB2517627B (en) 2012-07-05 2013-07-04 Conjugate double-pass confocal measurement device with fluorescent mirror or phase conjugate mirror

Country Status (2)

Country Link
GB (1) GB2517627B (en)
WO (1) WO2014005532A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106931888B (en) * 2017-03-29 2019-07-02 浙江大学 A kind of double light path type laser displacement sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07209187A (en) * 1993-11-30 1995-08-11 Omron Corp Laser scanning type cell analyser
CN101939635A (en) * 2008-02-04 2011-01-05 皇家飞利浦电子股份有限公司 Molecular diagnostic system based on evanescent illumination and fluorescence
CN102759331A (en) * 2012-07-05 2012-10-31 哈尔滨工业大学 Conjugated bi-pass lighting confocal microscopic device of fluorescent reflecting mirror
CN102818522A (en) * 2012-07-05 2012-12-12 哈尔滨工业大学 Phase conjugate reflection bi-pass lighting confocal microscopic device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07209187A (en) * 1993-11-30 1995-08-11 Omron Corp Laser scanning type cell analyser
CN101939635A (en) * 2008-02-04 2011-01-05 皇家飞利浦电子股份有限公司 Molecular diagnostic system based on evanescent illumination and fluorescence
CN102759331A (en) * 2012-07-05 2012-10-31 哈尔滨工业大学 Conjugated bi-pass lighting confocal microscopic device of fluorescent reflecting mirror
CN102818522A (en) * 2012-07-05 2012-12-12 哈尔滨工业大学 Phase conjugate reflection bi-pass lighting confocal microscopic device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ZHAO, Weigian ct al. Tri-heterodyne eonfoeal microscope with axial superresolution and higher SNR. OPTICS EXPRESS. Oct. 2004, Vol. 12, No. 21, pages 5191-5197 *

Also Published As

Publication number Publication date
WO2014005532A1 (en) 2014-01-09
GB2517627B (en) 2018-03-21

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Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20210704