GB2453529A - Cantilever sensor for atomic force microscopes - Google Patents

Cantilever sensor for atomic force microscopes Download PDF

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Publication number
GB2453529A
GB2453529A GB0719108A GB0719108A GB2453529A GB 2453529 A GB2453529 A GB 2453529A GB 0719108 A GB0719108 A GB 0719108A GB 0719108 A GB0719108 A GB 0719108A GB 2453529 A GB2453529 A GB 2453529A
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United Kingdom
Prior art keywords
detection
sensor
tip
detection tip
detection probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0719108A
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GB0719108D0 (en
Inventor
Marcus Matthias Schafer
Hendrik Holscher
Jan-Erik Schmutz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WESFAELISCHE WILHELMS UNI MUEN
Westfaelische Wilhelms Universitaet Muenster
Original Assignee
WESFAELISCHE WILHELMS UNI MUEN
Westfaelische Wilhelms Universitaet Muenster
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Application filed by WESFAELISCHE WILHELMS UNI MUEN, Westfaelische Wilhelms Universitaet Muenster filed Critical WESFAELISCHE WILHELMS UNI MUEN
Priority to GB0719108A priority Critical patent/GB2453529A/en
Publication of GB0719108D0 publication Critical patent/GB0719108D0/en
Priority to PCT/EP2007/010596 priority patent/WO2009043368A1/en
Publication of GB2453529A publication Critical patent/GB2453529A/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N37/00—Details not covered by any other group of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G01Q60/42—Functionalisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/60—SECM [Scanning Electro-Chemical Microscopy] or apparatus therefor, e.g. SECM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention comprises a sensor for use in an atomic force microscope, with a cantilever (20) having at least one detection tip (30) and a detection probe (40). The detection probe (40) is attached to the at least one detection tip (30) and has a detection tip contact surface (32) shaped to substantially mate to at least a portion of the detection probe (40). The invention also provides a method for the manufacture of a sensor in which a cantilever (20) with at least one detection tip (30) is truncated such that the at least one detection tip (30) has a detection tip contact surface (32) shaped to substantially mate to at least a portion of the detection probe (40). Finally the detection probe (40) is attached to the substantially mating detection tip contact surface (32).

Description

24352g 4.'
Description
The present invention relates to sensors. In particular, the present invention relates to cantilever sensors for use in atomic force microscopes and to a method for the production thereof.
Background of the invention
Atomic Force Microscopy (AFM) is a method for sensing surfaces using a detection tip that is mounted to a cantilever (Binnig, G., Quate, C. F., Gerber, Ch. (1986). "Atomic Force Microscope". Phys. Rev. Lett. 56, pp. 93 0-933). Physical properties of a sample such as the : . surfaces topography, friction or surface elasticity can be measured using the AFM. It is . * ,is important for some applications of the AFM to use a well defined detection probe at the 1.1.
detection tip of the cantilever.
* : The AFM can be used in different modes. Examples that are widely known and used in the art are the static mode or the dynamic mode. In the static mode, the detection tip is brought into *2o direct contact with a sample. *.*** * .
The static mode is often used for measuring friction between the detection tip and the surface of a sample. The friction is measured by the torsion of the cantilever when the cantilever is moved over the surface of the sample. This technique is sometimes also called Friction Force Microscopy (FFM) (Mate, C. M., McClelland, G. M., Erlandsson, R., Chiang, S. (1987).
"Atomic-scale friction of a tungsten tip on a graphite surface." Phys. Rev. Lett. 59, 1942-1945).
It is valuable to use cantilevers with a well defined spherical shape of the detection probe for the measurement of friction as well as for various other applications using the AFM (Schwarz, U. D., Hölscher, H. (1998). "Reibung aufder Nanometerskala -Nanotribologie mit dem Rasterkraftmilcroskop". Physikalische Blätter 54, pp. 1127-1130).
In the dynamic mode, the cantilever and thus the detection tip and the detection probe are excited to oscillate in close proximity to the surface of the sample. This technique is referred to as dynamic force microscopy (DFM). The oscillation amplitude, the oscillation excitation amplitude, the phase difference between the excitation and the oscillation and/or the change of resonance frequency can be determined (GarcIa, R., Perez, R. (2002). "Dynamic atomic force microscopy methods." Surf. Sci. Rep. 47, pp. 197-301 (2002); Holscher, H., Schirmeisen, A. (2005). "Dynamic Force Microscopy and Spectroscopy." Advances in Imaging and Electron Physics 135, pp. 41-101). The oscillation of the cantilever close to or within a dense medium, such as air, water or the like, is strongly dampened if the cantilever comes close to the surface of the sample. This damping effect is caused by the compression of the medium between the cantilever and the surface of the sample (Gunther, P., Fischer, U. Ch., Dransfeld, K. (1989). "Scanning near-field acoustic microscopy." Appi. Phys. B 48, pp. 89-92; Hosaka, H., Itao, K. Kuroda, S. (1995). "Damping characteristics of beam-shaped micro-oscillators." Sensors and Acuators A 49, pp. 87-95; Vinogradova, 0. I., Butt, H.-J., :. Yukabov, G. E., Feuillebois, F. (2001). "Dynamic effects on force measurements. I. Viscous *:: drag on the atomic force microscope cantilever." Rev. Sci. Instrum. 72, pp. 2330-2338) and *: depends on the surface properties and the shape of the detection tip mounted to the cantilever.
*...S.
* *20 The damping is considerably increased when using colloid sensors having small detection *** probe diameters. **S.
S
S..... * .
For both the static mode and the dynamic mode, small spheres of some micrometers in diameter can be attached as detection probes directly to the cantilever of the AFM (Ducker, W. A., Senden, T. J., Pashley, R. M. (1991). "Direct measurement of colloidal forces using an atomic force microscope". Nature 353, pp. 239-241; Mak, L. H., Knoll, M., Weiner, D., Gorschluter, A., Schirmeisen, A., Fuchs, H. (2006). "Reproducible attachment of micrometer sized particles to atomic force microscopy cantilevers". Rev. Sd. Instruxn. 77, 046104). The small sphezes form a well-defined spherical detection tip also termed a colloid sensor.
The manufacturing method for the colloidal sensor employs only an optical microscope, a micromanipulator, and a laser-pulled micropipette.
Although this approach is now standard for various applications, some drawbacks have been observed if the size of the sphere is considerably smaller than the typical detection tip length of l0-15p.m. It has been found that the effective detection tip length influences the sensitivity in friction force microscopy (FFM) and the cantilever damping in dynamic force microscopy (DFM).
However, gluing the sphere as the detection tip directly to the cantilever has several disadvantages. If small ones of the spheres are used, the cantilever has to be brought very close to the surface of the sample. The gap between the cantilever and the sample surface is, for geometrical reasons, defined by the diameter of the sphere which in the case of small spheres leads to strong damping. The strong damping, however, limits measurements with the small spheres as detection probes.
US patent application 2006/0163767 teaches a method for producing polymer-based cantilevers for use in atomic force microscopy. The plastic cantilevers are formed in PDMS molds from a plastic material. A probe tip, such a 10 jim nickel sphere, is attached to the end * of the cantilever. However, this US patent application does not disclose how the nickel sphere *.
* is attached to the plastic cantilever.
:20 Japanese patent application JP 1017053 OA teaches AFM cantilevers comprising a probe part * *.. onto which a spherical tip part is formed. Globular endpoints are formed on the tip or probe S...
made from silicon and silicon nitride material. This application does not describe how the *S.S..
* spherical tip part is formed and how it is attached to the AFM probe.
Furthermore current manufacturing methods have the disadvantage that it is very difficult to precisely and reproducibly position and attach the sphere on the cantilever. Furthermore, it is extremely difficult to measure the exact amount of glue frequently used to attach the sphere to the cantilever. Excess glue often contaminates the surface of the sphere in methods used in the art.
Summary of the invention
It is therefore an object of the Invention to provide an improved colloid sensor. It is also an object of the invention to provide an improved method for the production of a colloid sensor.
These and other objects of the invention are solved by a sensor comprising a cantilever having at least one detection tip and a detection probe, wherein the detection probe is attached to the at least one detection tip, and wherein the at least one detection tip has a detection tip contact surface shaped to substantially mate to at least a portion of the detection probe. The substantially mating detection tip contact surface allows an easy and reproducible positioning of the detection probe at the detection tip attached to or formed at the cantilever.
The invention also comprises a method for the manufacture of a sensor. The method comprises: providing a detection probe; providing a cantilever with at least one detection tip, truncating the detection tip such that the at least one detection tip has a detection tip contact surface shaped to substantially mate to at least a portion of the detection probe; and attaching the detection probe to the substantially mating detection tip contact surface.
The sensor may be an atomic force microscope (AFM) sensor. The AFM may be used in :. static mode or dynamic mode. For example, the AFM may be employed as a friction force ".* microscope (FFM) or as a dynamic force microscope (DFM). The cantilever may be shaped S...
as known to a person skilled in the art in order to be mounted to an AFM apparatus. The AFM * .*.: apparatus may be a commercially available AFM apparatus but the invention may also be :: usedwithotherAFMs. *5** * S
The detection probe may be made from glass, iron, copper, titanium, PMMA (polymethyl *SS*..
* methacrylate), or any other material. The detection probe may be substantially spherically shaped. The detection probe can be a sphere having a diameter in the range of 10 tm or less.
In particular, sphere diameters of about 5 j.im or even below 3tm can be used. Using the detection tip allows the use of even smaller detection probes that can not be used with conventional techniques.
The detection tip contact surface may be thus adapted so as to substantially mate a spherical surface. A spherically shaped detection probe may thus be easily attached to the detection tip contact surface allowing a precise positioning of the detection probe at the detection tip on the cantilever. For example, the detection tip contact surface may be substantially curve-shaped or substantially concave-shaped.
The detection tip contact surface may exactly correspond to the mating portion of the detection probe in order to ensure precise positioning of the detection probe with respect to the cantilever. However, deviations between the detection tip contact surface and the mating portion of the detection probe may be provided in order to increase adhesion or to facilitate the manufacture of the surfaces. For example a simple hole or cavity may be formed in the truncated detection tip. The cavity may be for easier fabrication of rectangular shape or the like. The dimension of the cavity may be adjusted to the size of the mating portion of the detection probe.
The detection tip may have substantially the shape of a frustum of a pyramid or a truncated cone. The detection tips having the shape of a pyramid or a cone are widely used in the field.
According to the invention, the detection tip may be truncated by about 2/3 or about 1/3 of its original length, but any other length is possible. The surface contacted to the detection tip may be formed on the truncated side of the frustum of the pyramid or of the truncated cone.
Truncating may be performed by a focused ion beam (FIB) or by wet etching or dry etching * technique as known in the art.
* :*.: The detection tip may be made from a material comprising at least silicon. For example the detection tip may be made form silicon dioxide Si02 or siliconnitride SiNX. The detection tip * *.. may be made from the same material as the cantilever. The detection tip may also be integrally formed in the cantilever.
**S.** * . The sensor may further comprise a glue by which the detection probe is attached to the at least one detection tip. Attaching the detection probe to the substantially mating detection tip contact surface may thus comprise gluing the detection probe to the substantially mating detection tip contact surface.
Upon gluing, excess glue may exit from an interface between the detection tip contact surface and the detection probe.
The detection tip may therefore comprise at least one overflow. The excess glue can thus exit the interface via the at least one overflow. The at least one overflow may therefore be arranged at an edge of the detection tip contact surface. This allows the excess glue to exit from the interfaces to the exterior of the detection tip. The at least one overflow may be substantially groove-shaped to improve the overflow properties.
The method may therefore further comprise a step of comprising forming at least one overflow or tines in the detection tip. The overflow may be formed using a FIB, wet etching or dry etching techniques known in the art.
Descrii,tion of the drawings Further features and advantages of the present invention may become evident when reading the following description of an embodiment that is given by way of example only and that is not intended to limit the invention in any way. The following description refers to the accompanying figures wherein: Figs. la and lb show a colloid sensor according to prior art and according to the invention, respectively. S... * S
Figs. 2a and 2b show the torsion of cantilevers of the sensor of Figs la and lb. * respectively. * 20
s **. Fig. 3 shows an example of a tipless cantilever according prior art. *..
*.S...
* Fig. 4a shows an example of a colloid sensor according to the present invention with a detection probe attached to a detection tip. Fig 4b shows the colloid sensor of Fig. 4a in more detailed and without the detection probe attached to the detection tip.
Detailed description
In the following description, identical reference numbers refer to the identical or similar objects.
Fig. I a) shows an example of a prior art colloid sensor and Fig. I b) shows a colloid sensor 10 according to this invention. The colloid sensor 10 comprises a cantilever 20 to which is attached a detection tip 30 and a detection probe 40 For various applications in atomic force microscopy it is valuable to use cantilevers with a well defined spherical tip shape. In the prior art, a sphere is glued on a tipless cantilever resulting in a colloid probe as illustrated in Figs la, 2a, and 3. Figure 3 shows a prior art example in which a glass sphere with a diameter of 2.8 I.Lm is attached to a rectangular silicon cantilever. Although this approach is now standard for various researchers some drawbacks have been observed when the size of the glued sphere is considerably smaller than the typical tip length of 10-1 5tm. One observation is that the effective tip length influences the sensitivity of friction force microscopy (FFM) and the cantilever damping in dynamic force microscopy (DFM). For spheres with a diameter below 5 pm these effects need to be taken into account.
In friction force microscopy the detection probe is in direct contact with the sample surface.
The frictional forces between the detection probe 40 and the sample surface cause a torsion of the cantilever 20. The torsional spring constant (c) depends on the width (w), the thickness (t), and the length (1) of the cantilever 20 shown in Figs. I a and lb and can be calculated from I... * *
** . - Ctor -
S
*S*.*. * S
*....20 wherein G is the shear modulus, which is in the case of silicon GSI = 0.68 x lOll N/rn. The S...
height h is the height of the detection probe 40 with respect to the cantilever 20 and is especially important because its square stands in the denominator. For example, a difference in height (h) from 3 un and 5 j.tm as for a colloidal sensor 10 in Fig. I a and 1 b, respectively results in torsional spring constants differing by a factor of 25.
Another effect to be considered is the geometrical constraint illustrated in Figs. 2a and 2b.
The risk that an edge 25 of the cantilever 20 might touch a sample surface 50 is reduced with increasing tip length 35. In other words, if the detection probe 40 such as sphere is directly attached to the cantilever 20, torsion of the cantilever 20 is limited at least to an angle, where an edge 25 of the cantilever 20 touches the surface of the sample 50 as shown in dotted lines in Fig. 2a.
Fig. lb and 2b show the detection tip 30 attached to the cantilever 20. The detection probe 40 is attached to the detection tip 30, thereby increasing the distance between the cantilever 20 and the surface of the sample 50. In Fig. 2b, the sensor 10 is shown twisted in dotted lines by the same angle as in Fig 2a. However, the edge 25 of the cantilever 25 is still far away from the surface of the sample 50 due to the tip length 35 of the detection tip 30, as can be seen from the Fig. 2b.
The tip length 35 is also to be taken into account if the AFM is used in dynamic mode, where the cantilever 20 oscillates near the sample surface 50. While the oscillating detection probe 40 approaches the sample surface 50 the amplitude already decreases if the detection tip 40 is at a distance of some micrometers due to the additional damping of the cantilever 20 by the air squeezed between the cantilever 20 and the sample surface 50. l'his is especially pronounced for rough surfaces 50 or samples with high step edges on the surface 50.
Fig. 3 shows a prior art example wherein a sphere as detection probe is directly attached to a rectangular cantilever. S... * S **..
The spherical detection probe 40 may be a glass sphere and have diameter of about 5 tm or less. The spherical detection probe 40 may be used equally with the present invention.
S... S. * *20 However, the invention is not limited by a particular size of the sphere and the invention may be used with any size of the detection probe. The invention is also not limited to a particular S...
material of the sphere.
S..... * .
The starting point for the manufacture of the colloidal sensor 10 of the invention is a standard silicon cantilever with an integrated tip. The example shown in Figs. 3, 4a and 4b shows a PPP-NCH cantilever 20 that is commercially available form Nanosensors, Neuchatel, Switzerland. However, the invention may be equally used with other types of cantilevers 20.
The detection tip 30 of the cantilever 20 has been modified using a focused ion beam (FIB XB 1540 EsB, Zeiss) In a first step the detection tip 30 has been cut perpendicular to its axis resulting in a frustum of a pyramid.
-I
Figs. 4a and 4b show the sensor 10 according to the present invention. A detection tip 30 of pyramidal shape is formed at the outer edge of the cantilever 20. The detection tip 30 is truncated, thus forming a frustum of pyramid, as can be seen in the figures. Fig. 4a shows the sensor 10 with a colloidal or spherical detection probe 40 attached to the truncated side of the pyramidal detection tip 30.
A portion of the spherical detection probe 40 is inserted in the detection tip 30 when the detection probe 40 is attached to the truncated side of the pyramidal detection tip 30 as shown in Fig. 4a. A hole or cavity is milled into the blunt apex as shown in Fig. 4b. The cavity may have the shape of a square, circle, triangle or a sphere. The cavity form a detection tip contact surface 32 substantially mating to the detection probe 40. It has been observed that a square shape is the easiest way to create the cavity. The diameter of the cavity and thus of the a detection tip contact surface 32 has to be adjusted to the size of the sphere used as detection probe 40 which may be glued to the detection tip 30. In the example shown in Fig. 4a, a glass sphere with a nominal diameter of 3 jtm � 10% has been used as the detection probe 40.
Therefore, the length of the cavity forming the detection tip contact surface 32 is adjusted to *::::* approx. 1.5 j.tm in this example. The sphere may be glued into the cavity following the procedure described by Mak et al. (Mak, L. H., Knoll, M., Weiner, D., GorschlUter, A., . .: Schirmeisen, A., Fuchs, H. (2006). "Reproducible attachment of micrometer sized particles to ::2O atomic force microscopy cantilevers." Rev. Sci. Instrum. 77, 046104.). I... * . *.S*
*:h. An overflow 34 is provided at the edges of the cavity forming the detection tip contact surface 32. The overflow 34 may be formed by the focused ion beam and may have the shape of a groove. One or more overflows 34 may be provided. In the example shown in Fig. 4a and 4b, the overflows 34 are provided in each side of the truncated pyramid. The overflows 34 allow dispensable excess glue to flow away during gluing the detection probe 40 to the detection tip contact surface 32, thus preventing that some excess glue covers the outer surface of the detection probe 40.
The cavity allows a precise attachment of the glue inside the cavity prior to the attachment of the detection probe 40 to the detection tip 30. The shape of detection tip contact surface 32 further allows a precise and reproducible positioning of the detection probe 40 to the detection tip 30. ko
It is obvious to a person skilled in the art that the teachings of the present invention are not limited to the use of spherical detection probes 40 or to a particular shape of the detection tip and the cantilever 20. The present invention is also not limited to AFM sensor but may be applied with other surface sensors. * * * *** S... * S *SSs ** . * S* *
</p>..DTD: <p>S
*.S.SS * S 5.. * S S...
S
**.SS.

Claims (20)

  1. Claims 1. A sensor (10) comprising: a cantilever (20) having at least one detection tip (30); and a detection probe (40), wherein the detection probe (40) is attached to the at least one detection tip (30), and wherein the at least one detection tip (30) has a detection tip contact surface (32) shaped to substantially mate to at least a portion of the detection probe (40).
  2. 2. The sensor of claim 1, wherein the sensor (10) is an atomic force microscope sensor. S. * S
  3. 3. The sensor of claim I or 2, wherein the detection probe (40) is made from a material S...
    *:*. selected from glass, iron, copper, titanium and polymethyl methacrylate.
    *
  4. 4. The sensor of any of the preceding claims, wherein the detection probe (40) is * * ** substantially spherically shaped. * 20
    *..S..
    *
  5. 5. The sensor of claim 4, wherein the detection probe (40) has a diameter in the range of pm or less.
  6. 6. The sensor of any of claim 4 or 5, wherein the detection tip contact surface (32) is adapted so as to substantially mate a spherical surface.
  7. 7. The sensor of any of claim 4 to 6, wherein the detection tip contact surfaces (32) is substantially curve-shaped.
  8. 8. The sensor of any of claim 4 to 7, wherein the detection tip contact surfaces (32) is substantially concave-shaped. \L
  9. 9. The sensor of any of the preceding claims, wherein the detection tip (30) has substantially the shape of a frustum of a pyramid or a truncated cone.
  10. 10. The sensor of any of the preceding claims, wherein the detection tip (30) is made from a material comprising at least silicon.
  11. 11. The sensor of any of the preceding claims, further comprising a glue by which the detection probe (40) is attached to the at least one detection tip (30).
  12. 12. The sensor of any of the preceding claims, wherein the detection tip (30) comprises at least one overflow (34).
  13. 13. The sensor of claim 12, wherein the at least one overflow (34) is arranged at an edge of the detection tip contact surface (32).
  14. 14. The sensor of clai.m 12 or 13, wherein the at least one overflow (34) is substantially *: :: :* groove-shaped.
  15. 15. A method for the manufacture of a sensor (10): providing a detection probe (40); providing a cantilever (20) with at least one detection tip (30), truncating the at least one detection tip (30) such that the at least one detection tip (30) has a detection tip contact surface (32) shaped to substantially mate to at least a portion of the detection probe (40); and attaching the detection probe (40) to the substantially mating detection tip contact surface (32).
  16. 16. The method of claim 15, wherein the truncating is performed by a focused ion beam or by etching.
  17. 17. The method of any of claims 15 to 16, further comprising forming at least one overflow (34) in the detection tip (30).
  18. 18. The method of any one of claims 15 to 17, wherein the attaching comprises gluing the detection probe (40) to the substantially mating detection tip contact surface (32).
  19. 19. The method of claim 18, wherein upon gluing excess glue exits from an interface between the detection tip contact surface (32) and the detection probe (40).
  20. 20. An atomic force microscope comprising the sensor (10) of at least one of claims ito 14. * * * I.. ***. * * **.. ** * * S * * S.
    S..... * I I... * S
    SSIS
    *SIS.. I *
GB0719108A 2007-10-01 2007-10-01 Cantilever sensor for atomic force microscopes Withdrawn GB2453529A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0719108A GB2453529A (en) 2007-10-01 2007-10-01 Cantilever sensor for atomic force microscopes
PCT/EP2007/010596 WO2009043368A1 (en) 2007-10-01 2007-12-06 Colloid-sensor for afm

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GB0719108A GB2453529A (en) 2007-10-01 2007-10-01 Cantilever sensor for atomic force microscopes

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GB2453529A true GB2453529A (en) 2009-04-15

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JP2014178148A (en) * 2013-03-13 2014-09-25 Seiko Instruments Inc Probe and probe microscope

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RU2481590C2 (en) * 2010-08-17 2013-05-10 Закрытое Акционерное Общество "Нанотехнология Мдт" Manufacturing method of colloidal probe for atomic-force microscope
RU2631529C2 (en) * 2016-03-18 2017-09-25 Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" Method for analysing surface on atomic-power microscope using fluorescent quantum dots
RU2635345C1 (en) * 2016-06-14 2017-11-10 Федеральное государственное бюджетное образовательное учреждение высшего образования "Рязанский государственный радиотехнический университет" Atomic-force microscope probe with programmable spectral portrait of radiating element based on quantum dots of core-shell structure
RU170927U1 (en) * 2016-06-21 2017-05-15 Федеральное государственное бюджетное образовательное учреждение высшего образования "Рязанский государственный радиотехнический университет" ATOMICALLY POWER MICROSCOPE PROBE WITH PROGRAMMABLE SPECTRAL PORTRAIT OF A RADIATING ELEMENT BASED ON QUANTUM POINTS OF THE NUCLEAR SHELL STRUCTURE
RU2647512C1 (en) * 2017-03-29 2018-03-16 Федеральное государственное бюджетное образовательное учреждение высшего образования "Рязанский государственный радиотехнический университет" Atomic force microscope probe with programmable dynamics of doped radiant element spectral portraits change, by quantum dots of core-sheath structure

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