GB2326160B - Nitride crystal fabricating method - Google Patents
Nitride crystal fabricating methodInfo
- Publication number
- GB2326160B GB2326160B GB9812653A GB9812653A GB2326160B GB 2326160 B GB2326160 B GB 2326160B GB 9812653 A GB9812653 A GB 9812653A GB 9812653 A GB9812653 A GB 9812653A GB 2326160 B GB2326160 B GB 2326160B
- Authority
- GB
- United Kingdom
- Prior art keywords
- nitride crystal
- fabricating method
- crystal fabricating
- nitride
- fabricating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B9/00—Single-crystal growth from melt solutions using molten solvents
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/0602—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with two or more other elements chosen from metals, silicon or boron
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/0632—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with gallium, indium or thallium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0722—Preparation by direct nitridation of aluminium
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B27/00—Single-crystal growth under a protective fluid
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B7/00—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B7/00—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions
- C30B7/005—Epitaxial layer growth
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/60—Optical properties, e.g. expressed in CIELAB-values
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9909954A GB2333520B (en) | 1997-06-11 | 1998-06-11 | GaN crystal growth method |
GB9909959A GB2333521B (en) | 1997-06-11 | 1998-06-11 | Nitride crystal growth method |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15375597 | 1997-06-11 | ||
JP22162897A JP3622440B2 (en) | 1997-08-18 | 1997-08-18 | Method for growing nitride crystal and method for growing GaN crystal |
JP29256197 | 1997-10-24 |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9812653D0 GB9812653D0 (en) | 1998-08-12 |
GB2326160A GB2326160A (en) | 1998-12-16 |
GB2326160B true GB2326160B (en) | 1999-11-03 |
Family
ID=27320530
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9812061.1A Pending GB9812061D0 (en) | 1997-06-11 | 1998-06-04 | Method of fabricating nitride crystal,liquid phase growth method,nitride crystal,nitride crystal powders,and vapor phase growth method |
GB9812653A Expired - Fee Related GB2326160B (en) | 1997-06-11 | 1998-06-11 | Nitride crystal fabricating method |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9812061.1A Pending GB9812061D0 (en) | 1997-06-11 | 1998-06-04 | Method of fabricating nitride crystal,liquid phase growth method,nitride crystal,nitride crystal powders,and vapor phase growth method |
Country Status (4)
Country | Link |
---|---|
KR (4) | KR100322374B1 (en) |
DE (1) | DE19826003A1 (en) |
GB (2) | GB9812061D0 (en) |
TW (1) | TW519551B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7750355B2 (en) | 2001-10-26 | 2010-07-06 | Ammono Sp. Z O.O. | Light emitting element structure using nitride bulk single crystal layer |
US7871843B2 (en) | 2002-05-17 | 2011-01-18 | Ammono. Sp. z o.o. | Method of preparing light emitting device |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2796657B1 (en) * | 1999-07-20 | 2001-10-26 | Thomson Csf | PROCESS FOR THE SYNTHESIS OF SOLID MONOCRYSTALLINE MATERIALS IN NITRIDES OF ELEMENTS OF COLUMN III OF THE TABLE OF THE PERIODIC CLASSIFICATION |
PL207400B1 (en) | 2001-06-06 | 2010-12-31 | Ammono Społka Z Ograniczoną Odpowiedzialnością | Method of and apparatus for obtaining voluminous, gallium containing, monocrystalline nitride |
EP1770189B1 (en) | 2001-06-06 | 2013-07-10 | Ammono S.A. | Apparatus for obtaining bulk monocrystalline gallium-containing nitride |
IL161420A0 (en) | 2001-10-26 | 2004-09-27 | Ammono Sp Zoo | Substrate for epitaxy |
US7063741B2 (en) * | 2002-03-27 | 2006-06-20 | General Electric Company | High pressure high temperature growth of crystalline group III metal nitrides |
WO2003098757A1 (en) | 2002-05-17 | 2003-11-27 | Ammono Sp.Zo.O. | Light emitting element structure having nitride bulk single crystal layer |
AU2002354463A1 (en) | 2002-05-17 | 2003-12-02 | Ammono Sp.Zo.O. | Bulk single crystal production facility employing supercritical ammonia |
CN100339512C (en) | 2002-06-26 | 2007-09-26 | 波兰商艾蒙诺公司 | Improvemrnt of process for obtaining of bulk monocrystallline gallium-containing nitride |
KR101088991B1 (en) | 2002-12-11 | 2011-12-01 | 니치아 카가쿠 고교 가부시키가이샤 | Process for obtaining bulk monocrystalline gallium-containing nitride |
PL224991B1 (en) | 2002-12-11 | 2017-02-28 | Ammono Spółka Z Ograniczoną Odpowiedzialnością | A substrate for epitaxy and a method of preparing the same |
EP1734158B1 (en) * | 2004-03-31 | 2012-01-04 | NGK Insulators, Ltd. | Gallium nitride single crystal growing method |
WO2005111278A1 (en) * | 2004-05-19 | 2005-11-24 | Sumitomo Electric Industries, Ltd. | Group iii nitride semiconductor crystal, method for producing same, and group iii nitride semiconductor device |
PL1769105T3 (en) | 2004-06-11 | 2014-11-28 | Ammono S A | Bulk mono-crystalline gallium nitride and method for its preparation |
PL371405A1 (en) | 2004-11-26 | 2006-05-29 | Ammono Sp.Z O.O. | Method for manufacture of volumetric monocrystals by their growth on crystal nucleus |
CA2608102C (en) | 2005-05-12 | 2011-03-15 | Seiji Sarayama | Method of producing group iii nitride crystal, apparatus for producing group iii nitride crystal, and group iii nitride crystal |
KR20140053184A (en) * | 2011-07-13 | 2014-05-07 | 더 리전츠 오브 더 유니버시티 오브 캘리포니아 | Growth of bulk group-iii nitride crystals |
KR102271060B1 (en) * | 2018-05-18 | 2021-06-29 | 연세대학교 산학협력단 | Layered AlN, manufacturing method thereof and exfoliated AlN nanosheet therefrom |
CN112899784B (en) * | 2021-01-20 | 2022-06-17 | 中国科学院苏州纳米技术与纳米仿生研究所 | Gallium nitride (11-22) single crystal substrate and method for producing same |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1551403A (en) * | 1975-06-13 | 1979-08-30 | Philips Electronic Associated | Method of manufacturing single crystals of gallium nitride |
GB2127709A (en) * | 1982-10-06 | 1984-04-18 | Univ Edinburgh | Manufacture of aluminium nitride |
JPH01145309A (en) * | 1987-11-30 | 1989-06-07 | Idemitsu Petrochem Co Ltd | Production of metallic nitride and device therefor |
JPH04154607A (en) * | 1990-10-17 | 1992-05-27 | Showa Alum Corp | Method for producing aluminum nitride powder |
JPH07277897A (en) * | 1994-04-04 | 1995-10-24 | Katsutoshi Yoneya | Synthesis of aluminum nitride single crystal |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04124097A (en) * | 1990-09-14 | 1992-04-24 | Fujitsu Ltd | Crystal growth process |
-
1998
- 1998-06-03 TW TW087108742A patent/TW519551B/en not_active IP Right Cessation
- 1998-06-04 GB GBGB9812061.1A patent/GB9812061D0/en active Pending
- 1998-06-10 KR KR1019980021404A patent/KR100322374B1/en not_active IP Right Cessation
- 1998-06-10 DE DE19826003A patent/DE19826003A1/en not_active Withdrawn
- 1998-06-11 GB GB9812653A patent/GB2326160B/en not_active Expired - Fee Related
-
2001
- 2001-05-10 KR KR1020010025395A patent/KR100384728B1/en not_active IP Right Cessation
- 2001-05-10 KR KR1020010025393A patent/KR100419285B1/en not_active IP Right Cessation
- 2001-05-10 KR KR1020010025394A patent/KR100338360B1/en not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1551403A (en) * | 1975-06-13 | 1979-08-30 | Philips Electronic Associated | Method of manufacturing single crystals of gallium nitride |
GB2127709A (en) * | 1982-10-06 | 1984-04-18 | Univ Edinburgh | Manufacture of aluminium nitride |
JPH01145309A (en) * | 1987-11-30 | 1989-06-07 | Idemitsu Petrochem Co Ltd | Production of metallic nitride and device therefor |
JPH04154607A (en) * | 1990-10-17 | 1992-05-27 | Showa Alum Corp | Method for producing aluminum nitride powder |
JPH07277897A (en) * | 1994-04-04 | 1995-10-24 | Katsutoshi Yoneya | Synthesis of aluminum nitride single crystal |
Non-Patent Citations (3)
Title |
---|
WPI abstract 89-209371 & JP 01 145 309 A * |
WPI abstract 92-230418 & JP 04 154 607 A * |
WPI abstract 95-400839 & JP 07 277 897 A * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7750355B2 (en) | 2001-10-26 | 2010-07-06 | Ammono Sp. Z O.O. | Light emitting element structure using nitride bulk single crystal layer |
US7935550B2 (en) | 2001-10-26 | 2011-05-03 | Ammono Sp. Z O.O. | Method of forming light-emitting device using nitride bulk single crystal layer |
US7871843B2 (en) | 2002-05-17 | 2011-01-18 | Ammono. Sp. z o.o. | Method of preparing light emitting device |
Also Published As
Publication number | Publication date |
---|---|
DE19826003A1 (en) | 1998-12-24 |
GB9812061D0 (en) | 1998-08-05 |
GB9812653D0 (en) | 1998-08-12 |
KR100384728B1 (en) | 2003-05-23 |
KR100322374B1 (en) | 2002-05-09 |
KR100419285B1 (en) | 2004-02-19 |
GB2326160A (en) | 1998-12-16 |
TW519551B (en) | 2003-02-01 |
KR19990006823A (en) | 1999-01-25 |
KR100338360B1 (en) | 2002-05-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20050611 |