GB2171253A - A platinum resistor for the measurement of temperature - Google Patents
A platinum resistor for the measurement of temperature Download PDFInfo
- Publication number
- GB2171253A GB2171253A GB08602778A GB8602778A GB2171253A GB 2171253 A GB2171253 A GB 2171253A GB 08602778 A GB08602778 A GB 08602778A GB 8602778 A GB8602778 A GB 8602778A GB 2171253 A GB2171253 A GB 2171253A
- Authority
- GB
- United Kingdom
- Prior art keywords
- platinum
- measurement
- temperature
- film
- aluminium oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
- H01C7/021—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient formed as one or more layers or coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
- G01K7/223—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor characterised by the shape of the resistive element
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Electromagnetism (AREA)
- Thermistors And Varistors (AREA)
Abstract
A platinum resistor for the measurement of temperature, comprising an insulating substrate (1) or a conductive or semiconductive substrate coated with an insulator, a platinum film (2) formed on said substrate and a protective film (5) formed on said platinum film, said protective film being of an aluminium oxide. <IMAGE>
Description
SPECIFICATION
A platinum resistor for the measurement of temperature
This invention relates to a platinum resistor for the measurement of temperature, especially materials used for a protective film of a platinum resistor.
Platinum is chemically stable and can be readily obtained with a high degree of purity. Moreover, the electrical resistance of platinum is greatly dependent upon temperature. Thus, platinum has long been used as a material for temperature sensors, composed of an extremely thin platinum wire spirally wound around a mica insulator and a protective tube containing the said thin platinum wire therein. These temperature sensors are widely used as a resistor for the measurement of temperature, the detailed specifications of which are given in Japanese Industrial Standard (JIS) C-1604, DIN 43760 and IEC Pub 751. This resistor for the measurement of temperature is extremely accurate, but it contains such defects as:
(1) the mechanical strength is poor,
(2) the production is time-consuming,
(3) the product is large, and
(4) the product is expensive.
In order to eliminate these defects, resistors for the measurement of temperature using platinum in a thick or thin layer have been developed in recent years, and some are commercially available. However, the resistors for the measurement of temperatures which involve thick platinum layers are produced by a screen printing technique, causing problems in that the formation of a fine pattern of 100 > m or less is difficult and that quality control during production is difficult to maintain.
On the other hand, resistors for the measurement of temperatures which involve thin platinum layers have such advantages as:
(1) a fine pattern is readily achieved, which makes possible miniaturization and high resistibility, so that an increase in sensitivity of the devices can be attained.
(2) the mechanical strength is great,
(3) as these devices are produced in a wafer, quality control during production can be maintained, and mass production becomes possible, so that the production cost can be reduced.
The production process for resistors for the measurement of temperature made using thin platinum layers is as follows: A thin platinum layer having a thickness of several thousand angstroms is, first, attached to an insulating substrate by a vacuum-evaporation method, sputtering, etc. The thin platinum layer is then finely patterned by a wet etching technique, a sputtering etching technique, etc., followed by heating at a temperature of 800-1400 C in air. Trimming is then carried out to adjust resistance, and lead wires are connected to the product, which is then coated with a protective film. The protective film is made of a material such as polyimide resins, epoxy resins, glass, etc. However, resins generally have thermal resistance to only about 300"C at the highest.The adhesion of glass to platinum is poor. Moreover, the thermal conductivity of resins and glass is poor, and since both resin protective films and glass protective films are prepared by a dipping method, etc., the thickness of these films becomes high, resulting in a device wherein the rate of the thermal response is slow. Moreover, there is the possibility of the contamination of the platinum layer by the resin material or the glass material. Thus, conventional materials used for a protective film have a number of defects.
A platinum resistor for the measurement of temperature in accordance with this invention, comprises an insulating substrate or a conductive or semiconductive substrate coated with an insulator, a platinum film formed on said substrate and a protective film formed on said platinum film, said protective film being of an aluminium oxide.
The aluminium oxide film is, in a preferred embodiment, formed as a protective film on said platinum film by a vacuum evaporation method, sputtering, ion-plating, chemical vapour deposition, or an anodic oxidation method.
The aluminium oxide film has, in a preferred embodiment, a thickness in the range of several thousand angstroms to several microns.
Thus, the invention described herein makes possible the objects of (1) providing a platinum resistor for the measurement of temperature in which a protective film is made of aluminium oxide which has a high heat-conductivity, can be formed in a thin film, is chemically stable, is excellent in terms of thermal resistance and electrical insulation, and prevents contamination by impurities; and (2) providing a platinum resistor for the the measurement of temperature which is excellent in thermal response, thermal resistance and reliability since the protective film is made of aluminium oxide having the advantages mentioned above.
The invention is described further hereinafter, by way of example only, with reference to the accompanying drawings, in which:
Figure 1 is a sectional front view of one embodiment of a platinum resistor for the measurement of temperatures in accordance with the present invention; and
Figures 2 to 5 are sectional front views illustrating the production process of the platinum resistor shown in Figure 1.
A platinum resistor for the measurement of temperature of this invention is characterized in that a platinum film is formed on an insulating substrate or a conductive or semi-conductive substrate coated with an insulator, and a protective film of aluminium oxide is formed on the said platinum film.
The aluminium oxide film which functions as a protective film is formed by, for example, a vacuum evaporation method, sputtering, ion-plating, chemical vapour deposition, an anoidic oxidation method, etc. Preferably, sputtering or ion-plating is used for the reasons that excellent adhesion of the aluminium oxide film to the platinum film is attained and contamination by impurities is prevented.
The thickness of the aluminium oxide film is preferably in the range of several thousand angstroms to several microns.
The protective film in this invention can be effectively applied to not only platinum resistors for the measurement of temperatures using a thin platinum layer, but also those using a thick platinum layer.
Example
Figure 1 shows a platinum resistor for the measurement of temperature, which comprises an insulating substrate 1 made of alumina, sapphire, or the like, a platinum film 2 with a pattern formed on the substrate 1, an aluminium oxide film 5 formed as a protective film on the platinum film 2, and lead wires 4 connected to the platinum film 2.
This platinum resistor for the measurement of temperature is produced as follows: On the insulating substrate 1 made of alumina, sapphire, or the like, the platinum film 2 having a thickness of several thousand angstroms to several microns is, first, formed by sputtering or ion-plating (Figure 2), followed by the formation of a photoresist pattern 3 thereon (Figure 3). Then, the platinum film 2 is patterned according to the photo resist pattern 3 by a sputter-etching technique (Figure 4). The photoresist 3 is then removed. The product is heated at a high temperature of around 100000 in air, trimmed to adjust resistance, and the lead wires 4 are connected to the platinum film 2 by welding.
The aluminium oxide film 5 having a thickness of several thousand angstroms to several microns is formed on the platinum film 2 and the substrate 1 by sputtering or ion-plating (Figure 1), resulting in a platinum resistor for the measurement of temperature.
It is understood that various other modifications will be apparent to and can be readily made by those skilled in the art without departing from the scope of this invention as defined by the appended claims. Accordingly, it is not intended that the scope of the claims appended hereto be limited to the description as set forth herein, but rather that the claims be construed as encompassing all the features of patentable novelty which reside in the present invention, including all features which would be treated as equivalents thereof by those skilled in the art to which this invention pertains.
Claims (4)
1. A platinum resistor for the measurement of temperature, comprising an insulating substrate or a conductive or semi-conductive substrate coated with an insulator, a platinum film formed on said substrate and a protective film formed on said platinum film, said protective film being of an aluminium oxide.
2. A platinum resistor for the measurement of temperature as claimed in claim 1, wherein said aluminium oxide film is formed as a protective film on said platinum film by a vacuum evaporation method, sputtering, ion-plating, chemical vapour deposition, or an anodic oxidation method.
3. A platinum resistor for the measurement of temperature as claimed in claim 1, wherein said aluminium oxide film has a thickness in the range of several thousand angstroms to several microns.
4. A platinum resistor for the measurement of temperature, substantially as hereinbefore described with reference to and as illustrated in the accompanying drawings.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2254185A JPS61181104A (en) | 1985-02-06 | 1985-02-06 | Platinum temperature measuring resistor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB8602778D0 GB8602778D0 (en) | 1986-03-12 |
| GB2171253A true GB2171253A (en) | 1986-08-20 |
Family
ID=12085669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB08602778A Withdrawn GB2171253A (en) | 1985-02-06 | 1986-02-05 | A platinum resistor for the measurement of temperature |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS61181104A (en) |
| DE (1) | DE3603784A1 (en) |
| GB (1) | GB2171253A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2213838A (en) * | 1987-12-23 | 1989-08-23 | Plessey Co Plc | Environmental protection of superconducting thin films |
| DE3906405A1 (en) * | 1989-03-01 | 1990-09-06 | Leybold Ag | METHOD FOR PRODUCING A LAYER RESISTOR |
| WO1992015101A1 (en) * | 1991-02-15 | 1992-09-03 | Siemens Aktiengesellschaft | High temperature sensor made of metal of the platinum group |
| US6653926B1 (en) | 1999-01-14 | 2003-11-25 | Sensotherm Temperatursensorik Gmbh | Platinum temperature sensor and its method of production |
| US6762671B2 (en) | 2002-10-25 | 2004-07-13 | Delphi Technologies, Inc. | Temperature sensor and method of making and using the same |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63198240A (en) * | 1987-02-10 | 1988-08-16 | Sony Corp | Manufacture of resistor |
| JPS6480002A (en) * | 1987-09-21 | 1989-03-24 | Chichibu Cement Kk | Nonlinear resistor |
| DE4424630C2 (en) * | 1994-07-13 | 1999-07-15 | Juchheim Gmbh & Co M K | Temperature sensor with a sleeve and a measuring resistor |
| EP0905494A3 (en) * | 1997-09-26 | 2000-02-23 | SIEMENS MATSUSHITA COMPONENTS GmbH & CO. KG | High temperature sensor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB475667A (en) * | 1936-06-06 | 1937-11-24 | Elliott Brothers London Ltd | Improvements in or relating to resistance thermometer elements |
| US3845443A (en) * | 1972-06-14 | 1974-10-29 | Bailey Meter Co | Thin film resistance thermometer |
| GB1440393A (en) * | 1972-06-14 | 1976-06-23 | Bailey Meter Co | Resistance thermometer |
| GB1527386A (en) * | 1975-06-21 | 1978-10-04 | Heraeus Gmbh W C | Electrical measuring resistors |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3041952A (en) * | 1959-11-02 | 1962-07-03 | Specialties Inc | Combination camera and film developer |
| JPS5638042B2 (en) * | 1974-03-07 | 1981-09-03 | ||
| JPS5565544A (en) * | 1978-11-13 | 1980-05-17 | Yokohama Kiko Co | Protective film board |
| JPS57208108A (en) * | 1981-06-17 | 1982-12-21 | Matsushita Electric Ind Co Ltd | Thin film thermistor |
| JPS5892201A (en) * | 1981-11-27 | 1983-06-01 | 松下電器産業株式会社 | Thin film platinum temperature sensor |
| DE4104605A1 (en) * | 1991-02-12 | 1992-08-20 | Henke Maschf Gmbh | Removal of thin concrete slab from mould - using suction device which operates in two stages |
-
1985
- 1985-02-06 JP JP2254185A patent/JPS61181104A/en active Pending
-
1986
- 1986-02-04 DE DE19863603784 patent/DE3603784A1/en not_active Ceased
- 1986-02-05 GB GB08602778A patent/GB2171253A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB475667A (en) * | 1936-06-06 | 1937-11-24 | Elliott Brothers London Ltd | Improvements in or relating to resistance thermometer elements |
| US3845443A (en) * | 1972-06-14 | 1974-10-29 | Bailey Meter Co | Thin film resistance thermometer |
| GB1440393A (en) * | 1972-06-14 | 1976-06-23 | Bailey Meter Co | Resistance thermometer |
| GB1527386A (en) * | 1975-06-21 | 1978-10-04 | Heraeus Gmbh W C | Electrical measuring resistors |
Non-Patent Citations (1)
| Title |
|---|
| NOTE: US 3845443 AND GB 1440393 ARE EQUIVALENT; * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2213838A (en) * | 1987-12-23 | 1989-08-23 | Plessey Co Plc | Environmental protection of superconducting thin films |
| DE3906405A1 (en) * | 1989-03-01 | 1990-09-06 | Leybold Ag | METHOD FOR PRODUCING A LAYER RESISTOR |
| WO1992015101A1 (en) * | 1991-02-15 | 1992-09-03 | Siemens Aktiengesellschaft | High temperature sensor made of metal of the platinum group |
| US5430428A (en) * | 1991-02-15 | 1995-07-04 | Siemens Aktiengesellschaft | High-temperature sensor made of metal of the platinum group |
| US6653926B1 (en) | 1999-01-14 | 2003-11-25 | Sensotherm Temperatursensorik Gmbh | Platinum temperature sensor and its method of production |
| US7233226B2 (en) | 1999-01-14 | 2007-06-19 | Sensotherm Temperatursenorik Gmbh | Method of producing a platinum temperature sensor |
| US6762671B2 (en) | 2002-10-25 | 2004-07-13 | Delphi Technologies, Inc. | Temperature sensor and method of making and using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3603784A1 (en) | 1986-08-07 |
| GB8602778D0 (en) | 1986-03-12 |
| JPS61181104A (en) | 1986-08-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |