GB2168340B - Contacting an integrated circuit with a metallisation pattern - Google Patents

Contacting an integrated circuit with a metallisation pattern

Info

Publication number
GB2168340B
GB2168340B GB08529383A GB8529383A GB2168340B GB 2168340 B GB2168340 B GB 2168340B GB 08529383 A GB08529383 A GB 08529383A GB 8529383 A GB8529383 A GB 8529383A GB 2168340 B GB2168340 B GB 2168340B
Authority
GB
United Kingdom
Prior art keywords
contacting
integrated circuit
metallisation pattern
metallisation
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08529383A
Other versions
GB2168340A (en
GB8529383D0 (en
Inventor
Peter Denis Scovell
Stephen Robert Jennings
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
STC PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB848431525A external-priority patent/GB8431525D0/en
Application filed by STC PLC filed Critical STC PLC
Priority to GB08529383A priority Critical patent/GB2168340B/en
Publication of GB8529383D0 publication Critical patent/GB8529383D0/en
Publication of GB2168340A publication Critical patent/GB2168340A/en
Application granted granted Critical
Publication of GB2168340B publication Critical patent/GB2168340B/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23DENAMELLING OF, OR APPLYING A VITREOUS LAYER TO, METALS
    • C23D13/00After-treatment of the enamelled articles
    • C23D13/02Removing defects by local re-melting of the enamel; Adjusting the shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105After-treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
GB08529383A 1984-12-13 1985-11-29 Contacting an integrated circuit with a metallisation pattern Expired GB2168340B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08529383A GB2168340B (en) 1984-12-13 1985-11-29 Contacting an integrated circuit with a metallisation pattern

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB848431525A GB8431525D0 (en) 1984-12-13 1984-12-13 Forming glass layers
GB08529383A GB2168340B (en) 1984-12-13 1985-11-29 Contacting an integrated circuit with a metallisation pattern

Publications (3)

Publication Number Publication Date
GB8529383D0 GB8529383D0 (en) 1986-01-08
GB2168340A GB2168340A (en) 1986-06-18
GB2168340B true GB2168340B (en) 1988-11-02

Family

ID=26288570

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08529383A Expired GB2168340B (en) 1984-12-13 1985-11-29 Contacting an integrated circuit with a metallisation pattern

Country Status (1)

Country Link
GB (1) GB2168340B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6514876B1 (en) 1999-09-07 2003-02-04 Steag Rtp Systems, Inc. Pre-metal dielectric rapid thermal processing for sub-micron technology
GB0123744D0 (en) 2001-10-03 2001-11-21 Qinetiq Ltd Coated optical components

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4349584A (en) * 1981-04-28 1982-09-14 Rca Corporation Process for tapering openings in ternary glass coatings

Also Published As

Publication number Publication date
GB2168340A (en) 1986-06-18
GB8529383D0 (en) 1986-01-08

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19991129