GB2153042A - Vibration isolating using a bi-phase fluid - Google Patents

Vibration isolating using a bi-phase fluid Download PDF

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Publication number
GB2153042A
GB2153042A GB08429919A GB8429919A GB2153042A GB 2153042 A GB2153042 A GB 2153042A GB 08429919 A GB08429919 A GB 08429919A GB 8429919 A GB8429919 A GB 8429919A GB 2153042 A GB2153042 A GB 2153042A
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United Kingdom
Prior art keywords
vibration isolation
load support
load
casing
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08429919A
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GB2153042B (en
GB8429919D0 (en
Inventor
Dale W Schubert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hutchinson Aerospace and Industry Inc
Original Assignee
Barry Wright Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Barry Wright Corp filed Critical Barry Wright Corp
Publication of GB8429919D0 publication Critical patent/GB8429919D0/en
Publication of GB2153042A publication Critical patent/GB2153042A/en
Application granted granted Critical
Publication of GB2153042B publication Critical patent/GB2153042B/en
Expired legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Combined Devices Of Dampers And Springs (AREA)
  • Fluid-Damping Devices (AREA)

Abstract

A fluidic vibration isolator has an inverted flower-pot-shaped casing 16 clamped to a base member 12. The casing has an annular rim depending from the top to which the outside edge of an annular diaphragm 24 is clamped. The inside edge of the diaphragm is clamped to a load support member 21 formed with a tapered recess 22. A supported member 15 has a depending stem 23 that rests in the bottom of the recess. The closed chamber inside the casing contains dichlorotetrafluoroethane in the liquid state at the bottom with heating resistors 35. The supported member has a depending shutter 31 that allows electromagnetic energy to energize a photocell 33 when the supported member descends to a predetermined level to cause the delivery of electrical energy to the heating resistors. The vapour pressure in the chamber is increased and the supported load is raised to a predetermined height. The arrangement of stem 23, recess 22 and diaphragm 24 enables the load support member 21 to rock angularly, translate laterally and exhibit pendulum motion. The tip of the member 21 dips into the liquid phase to provide radial damping. Axial movement is accompanied by changes between liquid and vapour states, with resultant energy dissipation. <IMAGE>

Description

SPECIFICATION Fluidic vibration isolating The present invention relates in general to fluidic vibration isolating and more particularly concerns novel fluidic vibration isolating apparatus and techniques that are characterized by very low transmissibility and high damping both axially and radially with a relatively inexpensive compact structure.
The present invention represents an improvement over the fluidic vibration isolation system described in U.S. Patent No.
4,057,212 granted November 8, 1977 for FLUIDIC VIBRATION ISOLATOR-of Dale W.
Schubert. That patent discloses a fluidic vibration isolation system having a chamber containing a fluid in both the liquid and vapor state. A heater selectively heats the liquid to increase the amount of fluid in the vapor state and thereby the pressure in the chamber. A height sensor actuates a switch for regulating the energy to the heater so as to maintain the height of a load supported on the chamber.
As the vapor pressure in the chamber increases, the chamber expands to raise the load to a preselected height.
it is an important object of this invention to provide improved fluidic vibration isolating.
The present invention provides: Fluidic vibration isolation apparatus comprising, closed chamber means including a casing for enclosing substantially fluid-tight compressible biphase fluid, said closed chamber means including load support means for supporting a load supporting member in axial and radial vibration isoiating relationship, diaphragm means for supporting said load support means on said casing means while allowing said load support means to both rock angularly and translate relative to a predetermined vertical axis of said closed chamber means to exhibit both angular displacement and translation from said predetermined vertical axis passing through said closed chamber means to exhibit pendulum action about a point translatable in any azimuth direction, and fluid means in said closed chamber means for developing pressure on said load support means to provide vertical vibration isolation.
The invention also provides: A method of fluidic vibration isolation which method includes the steps of, enclosing a compressible biphase fluid substantially fluid-tight in a closed chamber means including a casing and load supporting means for supporting a load supporting member in axial and radial vibration isolation relationship and diaphragm means for supporting said load support means on said casing.
applying vibrational forces to said casing that may cause said load support means to both rock angularly and translate relative to a predetermined vertical axis of said closed chamber means to exhibit pendulum action about a point translatable in any azimuth direction, and developing pressure on said load support means with said compressible biphase fluid to provide vertical vibration isolation.
According to the invention, there is closed chamber means for enclosing a fluid in both vapor and liquid states. Preferably the closed chamber means includes a casing of relatively rigid material, such as metal or a high temperature thermoplastic, that remains essentiallyC constant in volume in the presence of internal vapor pressure changes and is resistant to the internal biphasal fluid. The closed chamber means also includes load support means for receiving a load supporting member. There is flexible diaphragm means intercoupling the load support means with the casing in fluidtight relationship. This diaphragm means allows both angular and translational deflection of the load support means from a normally vertical axis in all azimuth directions. The load support means may thus function as a pendulum having a translatable pivot point.There is load support platform means for supporting a load, such as a work table, having a depending load supporting member for being seated in the load support means. Preferably the load support platform means also includes depending shutter means for altering the flow of electromagnetic energy between a source of electromagnetic energy and photoelectric transducing means for selectively controlling the electrical energy delivered to heating means in the closed chamber means so as to maintain the load support platform means at a predetermined height.
Fluidic vibration isolation apparatus constructed in accordance with the invention will now be described by way of example only with reference to the accompanying drawings, in which: Figure 1 is a diametrical sectional view of a preferred embodiment of the invention; and Figure 2 is a graphical representation of isolation characteristics of the embodiment of Fig. 1.
With reference now to the drawing and more particularly Fig. 1 thereof, there is shown a diametrical sectional view of a preferred embodiment of the invention. Because of cylindrical symmetry, this view adequately illustrates this embodiment of the invention.
The isolator 11 is bolted to base structure 1 2 by means, such as nut and bolt assemblies 13, typically six being sufficient. The top 14 of a load, such as a work table, rests on vibration isolated supported member 15, a load support platform, to receive significant vibration isolation in both axial and radial directions.
An inverted flower-pot-shaped supporting member 1 6 comprises a casing having a baseplate 1 7 sealed fluid-tight with means including O-ring 21A. A central load support member 21 is formed with a tapered recess 22 for accommodating stem 23, a load supporting member that is fastened to the center of the underside of supported member 1 5. A flexible diaphragm 24 intercouples load support member 21 and supporting member 16 in fluid-tight relationship while allowing both angular and translational deflection of member 21 to complete the fluid-tight closed chamber.
A sleeve 25 force fit and bonded to member 21 secures the inside edge of diaphragm 24 to member 21. The outside edge of diaphragm 24 is clamped between clamping ring 26 and a depending rim of supporting member 1 6 with O-ring 28 to establish a fluid-tight seal therebetween. Bolts, such as 27, typically six, fasten ring 26 to supporting member 1 6 in tapped openings.
Supported member 1 5 carried a depending stud 23 with a rounded end that nests in the rounded bottom of tapered recess 22. The cross sectional area of stud 23 is slightly less than that of recess 22 at the bottom which is less than that at the top. Stud 23 is free to move in the open region including bore 29 at the top so that it freely pivots about its bottom. Surface 30 functions as a stop in case of a severe jolt.
Supported member 1 5 may also carry a depending flag-shaped shutter element 31 secured by screw 32 for allowing photoceli 33 to be selectively illuminated by an eiectromagnetic source (not visible in Fig. 1) when supporting member 1 5 drops below a predetermined level. Photocell 33 then provides a switching signal over wires 34 that causes heating resistors 35 above base 1 7 to receive electrical energy that heats the liquid component 36 of the fluid inside the closed chamber. This heating increases the vapor pressure therein and causes the load support member 21 to move upward until shutter element 31 interrupts the flow of infrared radiant energy to photocell 33 to thereby cause resistors 35 to be de-energized in substantially the manner as described in U.S. Patent No. 4,057,212.
In a typical application of the invention, a table top may have four supports of the type shown in Fig. 1 supporting the table top in four corners. Preferably, the shutter-controlled photoelectric assembiy of one of the two rear supports controls the resistors in both rear supports in accordance with known tech niques recognizing that three points determine the location of a plane surface. An "OR" circuit can contain two or four members such that the contact point is at the lowest of the two points. The "OR" circuit thus allows either switch sensing an associated corner dropping below the normal level to effect heating in both isolators until the actuating switch indicates the normal level has been reached.
The invention has a number of features and advantages. It provides high isolation both axially and radially. Load support member 21 comprises a pendulum having a pivot point that flexible diaphragm 24 allows to translate in all azimuth directions. As a result this pendulum has a lower resonant frequency for a given length than a fixed point pendulum.
Allowing the lower tip of member 21 to rest in the liquid component 36 of the enclosed fluid as shown helps provide additional radial damping. Axial movement of member 21 apd diaphragm 24 is believed to effect isothermal compression and rarefaction of the vapor component of the enclosed liquid to dissipate significant energy in effecting changes between vapor and liquid state that provides high damping in the axial direction.
Referring to Fig. 2, there is shown a graphical representation of transmissibility as a function of frequency of the embodiment of Fig. 1 for an excitation velocity of 0.3 in/sec. at resonance. Note that this compact structure is characterized by a resonance significantly below 1.0 Hz that is exceptionally broad and of very low resonant amplification because of the high damping characteristics discussed above.
Many specific materials may be used in practicing the invention. The hard structures may be made of metal or a hard plastic, such as Noryl GFN3. The vaporizable fluid enclosed in the chamber may be, for example, dichlorotetrafluoroethane. The photoelectric switch may comprise an infrared LED phototransistor switch. The resistors may comprise conventional 10 watt resistors. An actual embodi ment of the invention includes supporting and supported elements less than 4" high and 8" in diameter.
It is evident that those skilled in the art may now make numerous uses and modifications of and departures from the specific embodi ments described herein without departing from the inventive concepts. Consequently, the invention is to be construed as embracing each and every novel feature and novel com bination of features present in or possessed by the apparatus and techniques herein disclosed and limited solely by the spirit and scope of the appended claims.

Claims (11)

1. Fluidic vibration isolation apparatus comprising, closed chamber means including a casing for enclosing substantially fluid-tight compres sible biphase fluid, said closed chamber means including load support means for supporting a load support ing member in axial and radial vibration isolat ing relationship, diaphragm means for supporting said load support means on said casing means while allowing said load support means to both rock angularly and translate relative to a predetermined vertical axis of said closed chamber means to exhibit both angular displacement and translation from said predetermined vertical axis passing through said closed chamber means to exhibit pendulum action about a point translatable in any azimuth direction, and fluid means in said closed chamber means for developing pressure on said load support means to provide vertical vibration isolation.
2. Fluidic vibration isolation apparatus in accordance with claim 1 and further comprising, said load supporting member supported by said load support means at a point below said diaphragm means and having a normal vertical axis corresponding to said predetermined axis.
3. Fluidic vibration isolation apparatus in accordance with claim 1 or 2 wherein said load supporting member comprises a member formed with a tapered recess with its bottom cross sectional area that is smaller than its top cross sectional area.
4. Fluidic vibration isolation apparatus in accordance with claim 3 and further comprising, said load supporting member comprising a stud seated in said recess of cross sectional area slightly less than said bottom cross sectional area and formed with a rounded end that resides in a mating rounded bottom portion of said recess.
5. Fluidic vibration isolation apparatus in accordance with claim 1, 2, 3 or 4 wherein at least a tip portion of said load support means always resides within a liquid component of said fluid at the bottom of said closed chamber means.
6. Fluidic vibration isolation apparatus in accordance with claim 1, 2, 3, 4 or 5 wherein said diaphragm means has concentric inside and outside edges and further comprising, means for securing said inside edge to said load support means near the top thereof, and means for clamping said outside edge to said casing near the top thereof.
7. Fluidic vibration isolation apparatus in accordance with claim 6 wherein said means for clamping said inside edge comprises a sleeve secured to said load support means, and said means for clamping said outside edge comprises a clamping ring secured to a rim depending from the top of said fixed support member.
8. Fluidic vibration isolation apparatus in accordance with claim 4 or claim 5, 6 or 7 when dependent on claim 4 and further comprising a supported member above said casing, said stud depending from said supported member, shutter means depending from said supported member for selectively regulating the flow of electro-magnetic energy, a source of electromagnetic energy and photoelectric transducing means oppositely aligned for selective interruption by said shutter means and supported in fixed relationship to said casing, and electrically heated elements inside said closed chamber means for heating said fluid in response to a predetermined relationship between said shutter means and said photoelectric transducing means.
9. A method of fluidic vibration isolation which method includes the steps of, enclosing a compressible biphase fluid substantially fluid-tight in a closed chamber means including a casing and load supporting means for supporting a load supporting member in axial and radial vibration isolation relationship and diaphragm means for supporting said load support means on said casing, applying vibrational forces to said casing that may cause said load support means to both rock angularly and translate relative to a predetermined vertical axis of said closed chamber means to exhibit pendulum action about a point translatable in any azimuth direction, and developing pressure on said load support means with said compressible biphase fluid to provide vertical vibration isolation.
1 0. A method in accordance with claim 9 and further including the step of supporting said load supporting member at a point below said diaphragm means so that said load supporting member may rock freely about said point in a predetermined solid angle.
11. A method in accordance with claim 9 or 10 and further including the step of maintaining at least a tip portion of said load support means within a liquid component of said fluid.
1 2. A method in accordance with claim 9, 10 or 11 and further including the steps of sensing when said load supporting member departs from a predetermined level, and altering the temperature of said fluid to change said pressure until said predetermined level is attained.
1 3. Fluidic vibration isolation apparatus substantially as herein described with reference to, and as illustrated by, the accompanying drawings.
1 4. A method of fluidic vibration isolation substantially as herein described.
GB08429919A 1984-01-18 1984-11-27 Vibration isolating using a bi-phase fluid Expired GB2153042B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US57215984A 1984-01-18 1984-01-18

Publications (3)

Publication Number Publication Date
GB8429919D0 GB8429919D0 (en) 1985-01-03
GB2153042A true GB2153042A (en) 1985-08-14
GB2153042B GB2153042B (en) 1987-10-21

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GB08429919A Expired GB2153042B (en) 1984-01-18 1984-11-27 Vibration isolating using a bi-phase fluid

Country Status (9)

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JP (1) JPS60159429A (en)
CA (1) CA1235714A (en)
CH (1) CH670487A5 (en)
DE (1) DE3500398A1 (en)
FR (1) FR2558231B1 (en)
GB (1) GB2153042B (en)
IL (1) IL73629A0 (en)
IT (1) IT1179500B (en)
NL (1) NL8403577A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102033U (en) * 1989-01-31 1990-08-14
ITMI922979A1 (en) * 1992-12-29 1994-06-29 Vela Srl ANTI-VIBRATION ELEMENT
JPWO2005083294A1 (en) * 2004-03-01 2007-11-22 株式会社ニコン Gas spring device, vibration isolator, stage device, and exposure device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1142324A (en) * 1965-05-10 1969-02-05 Angus George Co Ltd Improvements in or relating to pressure-fluid-operated devices
GB1398189A (en) * 1971-06-25 1975-06-18 Stichting Reactor Centrum Vibration dampers
US3917201A (en) * 1974-11-07 1975-11-04 Ehrenreich Photo Optical Ind Vibration isolated table with improved mounts
GB1437525A (en) * 1973-03-19 1976-05-26 Wright Barry Corp Pneumatic isolator
GB1478071A (en) * 1974-01-11 1977-06-29 Sybron Corp Dampers
US4057212A (en) * 1975-08-15 1977-11-08 Barry Wright Corporation Fluidic vibration isolator

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1716589U (en) * 1955-12-07 1956-02-09 Dipl Ing William Gerb Wiesbaden Adjustable device for damping spring-loaded systems
JPS4914509B1 (en) * 1970-04-22 1974-04-08
IT997639B (en) * 1973-07-23 1975-12-30 Wright Barry Corp IMPROVEMENT IN VIBRATION INSULATION SUPPORT SYSTEMS
JPS5660710A (en) * 1979-10-19 1981-05-25 Tokico Ltd Car height adjuster
US4360184A (en) * 1980-02-19 1982-11-23 Technical Manufacturing Corporation Pneumatic device for attenuation of vertical, horizontal and rotational dynamic forces
JPS6047937B2 (en) * 1980-10-17 1985-10-24 村田機械株式会社 Spinning device with yarn splicing trolley
JPS57127141A (en) * 1981-01-30 1982-08-07 Sanwa Tekki Corp Multi-direction vibration-proof device
JPS5870997A (en) * 1981-10-22 1983-04-27 Nakamura Tekkosho:Kk Vibration-proof device for press machine

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1142324A (en) * 1965-05-10 1969-02-05 Angus George Co Ltd Improvements in or relating to pressure-fluid-operated devices
GB1398189A (en) * 1971-06-25 1975-06-18 Stichting Reactor Centrum Vibration dampers
GB1437525A (en) * 1973-03-19 1976-05-26 Wright Barry Corp Pneumatic isolator
GB1478071A (en) * 1974-01-11 1977-06-29 Sybron Corp Dampers
US3917201A (en) * 1974-11-07 1975-11-04 Ehrenreich Photo Optical Ind Vibration isolated table with improved mounts
US4057212A (en) * 1975-08-15 1977-11-08 Barry Wright Corporation Fluidic vibration isolator

Also Published As

Publication number Publication date
IT8449218A0 (en) 1984-11-28
IT8449218A1 (en) 1986-05-28
FR2558231B1 (en) 1990-04-13
JPS60159429A (en) 1985-08-20
IL73629A0 (en) 1985-02-28
CH670487A5 (en) 1989-06-15
FR2558231A1 (en) 1985-07-19
IT1179500B (en) 1987-09-16
CA1235714A (en) 1988-04-26
DE3500398A1 (en) 1985-07-25
GB2153042B (en) 1987-10-21
GB8429919D0 (en) 1985-01-03
NL8403577A (en) 1985-08-16

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PCNP Patent ceased through non-payment of renewal fee

Effective date: 19921127