GB2087138B - Electron lens equipped with three magnetic pole pieces - Google Patents

Electron lens equipped with three magnetic pole pieces

Info

Publication number
GB2087138B
GB2087138B GB8131187A GB8131187A GB2087138B GB 2087138 B GB2087138 B GB 2087138B GB 8131187 A GB8131187 A GB 8131187A GB 8131187 A GB8131187 A GB 8131187A GB 2087138 B GB2087138 B GB 2087138B
Authority
GB
United Kingdom
Prior art keywords
magnetic pole
pole pieces
electron lens
lens equipped
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8131187A
Other versions
GB2087138A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB2087138A publication Critical patent/GB2087138A/en
Application granted granted Critical
Publication of GB2087138B publication Critical patent/GB2087138B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
GB8131187A 1980-10-15 1981-10-15 Electron lens equipped with three magnetic pole pieces Expired GB2087138B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14389080A JPS5767272A (en) 1980-10-15 1980-10-15 Electron lens

Publications (2)

Publication Number Publication Date
GB2087138A GB2087138A (en) 1982-05-19
GB2087138B true GB2087138B (en) 1984-11-21

Family

ID=15349410

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8131187A Expired GB2087138B (en) 1980-10-15 1981-10-15 Electron lens equipped with three magnetic pole pieces

Country Status (3)

Country Link
JP (1) JPS5767272A (en)
DE (1) DE3139905C2 (en)
GB (1) GB2087138B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585942A (en) * 1983-03-17 1986-04-29 Jeol Ltd. Transmission electron microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS526073A (en) * 1975-07-04 1977-01-18 Hitachi Ltd Magnetic field type electronic lens
JPS5945171B2 (en) * 1979-12-28 1984-11-05 日本電子株式会社 electronic lens
JPS5723454A (en) * 1980-07-16 1982-02-06 Jeol Ltd Electron lens

Also Published As

Publication number Publication date
GB2087138A (en) 1982-05-19
JPS5767272A (en) 1982-04-23
DE3139905A1 (en) 1982-06-09
DE3139905C2 (en) 1984-02-16
JPS6241376B2 (en) 1987-09-02

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19931015