GB1595548A - Method for preparing a substrate surface of and a method of making a semiconductor device - Google Patents
Method for preparing a substrate surface of and a method of making a semiconductor device Download PDFInfo
- Publication number
- GB1595548A GB1595548A GB19043/80A GB1904380A GB1595548A GB 1595548 A GB1595548 A GB 1595548A GB 19043/80 A GB19043/80 A GB 19043/80A GB 1904380 A GB1904380 A GB 1904380A GB 1595548 A GB1595548 A GB 1595548A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- oxide
- angstroms
- portions
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 43
- 239000000758 substrate Substances 0.000 title claims description 40
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 52
- 229920005591 polysilicon Polymers 0.000 claims description 52
- 238000005530 etching Methods 0.000 claims description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 230000005669 field effect Effects 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000002019 doping agent Substances 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 17
- 210000004027 cell Anatomy 0.000 claims 9
- 230000003647 oxidation Effects 0.000 claims 9
- 238000007254 oxidation reaction Methods 0.000 claims 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 8
- 229910052698 phosphorus Inorganic materials 0.000 claims 8
- 239000011574 phosphorus Substances 0.000 claims 8
- 229910052796 boron Inorganic materials 0.000 claims 6
- 238000009792 diffusion process Methods 0.000 claims 6
- 230000006641 stabilisation Effects 0.000 claims 6
- 238000011105 stabilization Methods 0.000 claims 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims 5
- 230000015572 biosynthetic process Effects 0.000 claims 5
- 150000004767 nitrides Chemical class 0.000 claims 5
- 230000008569 process Effects 0.000 claims 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 5
- 239000012535 impurity Substances 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 3
- 229910052782 aluminium Inorganic materials 0.000 claims 3
- 239000003990 capacitor Substances 0.000 claims 3
- 239000007943 implant Substances 0.000 claims 3
- 238000003860 storage Methods 0.000 claims 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
- 230000008901 benefit Effects 0.000 claims 2
- 239000003795 chemical substances by application Substances 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 2
- 230000000295 complement effect Effects 0.000 claims 2
- 238000011109 contamination Methods 0.000 claims 2
- 230000000694 effects Effects 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- 239000001301 oxygen Substances 0.000 claims 2
- 230000009467 reduction Effects 0.000 claims 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 1
- 238000010420 art technique Methods 0.000 claims 1
- 239000012298 atmosphere Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- -1 boron ions Chemical class 0.000 claims 1
- 239000000969 carrier Substances 0.000 claims 1
- 238000001311 chemical methods and process Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000004891 communication Methods 0.000 claims 1
- 238000007796 conventional method Methods 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 230000007547 defect Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 230000001066 destructive effect Effects 0.000 claims 1
- 230000006870 function Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims 1
- 230000001939 inductive effect Effects 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 230000000873 masking effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000001465 metallisation Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 230000003071 parasitic effect Effects 0.000 claims 1
- 210000000352 storage cell Anatomy 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/35—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices with charge storage in a depletion layer, e.g. charge coupled devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/403—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
- G11C11/404—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with one charge-transfer gate, e.g. MOS transistor, per cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/41—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
- G11C11/412—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger using field-effect transistors only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Semiconductor Memories (AREA)
- Element Separation (AREA)
- Local Oxidation Of Silicon (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
- Non-Volatile Memory (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US76239877A | 1977-01-26 | 1977-01-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1595548A true GB1595548A (en) | 1981-08-12 |
Family
ID=25064929
Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3022/78A Expired GB1595543A (en) | 1977-01-26 | 1978-01-25 | Memory cell |
GB32523/79A Expired GB1595545A (en) | 1977-01-26 | 1978-01-25 | Method for forming high definition layers in a semiconductor device |
GB32524/79A Expired GB1595546A (en) | 1977-01-26 | 1978-01-25 | Method for making a semiconductor device |
GB19043/80A Expired GB1595548A (en) | 1977-01-26 | 1978-01-25 | Method for preparing a substrate surface of and a method of making a semiconductor device |
GB32525/79A Expired GB1595547A (en) | 1977-01-26 | 1978-01-25 | Method for forming very small contact windows in a semiconductor device |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3022/78A Expired GB1595543A (en) | 1977-01-26 | 1978-01-25 | Memory cell |
GB32523/79A Expired GB1595545A (en) | 1977-01-26 | 1978-01-25 | Method for forming high definition layers in a semiconductor device |
GB32524/79A Expired GB1595546A (en) | 1977-01-26 | 1978-01-25 | Method for making a semiconductor device |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB32525/79A Expired GB1595547A (en) | 1977-01-26 | 1978-01-25 | Method for forming very small contact windows in a semiconductor device |
Country Status (5)
Country | Link |
---|---|
JP (10) | JPS5394190A (ja) |
DE (1) | DE2802048A1 (ja) |
FR (5) | FR2382768A1 (ja) |
GB (5) | GB1595543A (ja) |
IT (1) | IT1089299B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1089299B (it) * | 1977-01-26 | 1985-06-18 | Mostek Corp | Procedimento per fabbricare un dispositivo semiconduttore |
JPS5713772A (en) * | 1980-06-30 | 1982-01-23 | Hitachi Ltd | Semiconductor device and manufacture thereof |
GB2290167B (en) * | 1994-06-08 | 1999-01-20 | Hyundai Electronics Ind | Method for fabricating a semiconductor device |
US9954176B1 (en) | 2016-10-06 | 2018-04-24 | International Business Machines Corporation | Dielectric treatments for carbon nanotube devices |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1053069A (ja) * | 1963-06-28 | |||
GB1175392A (en) * | 1966-09-14 | 1969-12-23 | Hitachi Ltd | Method of Treating Protective Coatings for Semiconductor Devices |
US3590477A (en) | 1968-12-19 | 1971-07-06 | Ibm | Method for fabricating insulated-gate field effect transistors having controlled operating characeristics |
NL7005296A (ja) * | 1969-04-15 | 1970-10-19 | ||
US3825997A (en) * | 1969-10-02 | 1974-07-30 | Sony Corp | Method for making semiconductor device |
DE2040180B2 (de) | 1970-01-22 | 1977-08-25 | Intel Corp, Mountain View, Calif. (V.St.A.) | Verfahren zur verhinderung von mechanischen bruechen einer duennen, die oberflaeche eines halbleiterkoerpers ueberdeckende isolierschichten ueberziehenden elektrisch leitenden schicht |
NL7109327A (ja) * | 1970-07-10 | 1972-01-12 | ||
US3811974A (en) * | 1971-07-19 | 1974-05-21 | North American Rockwell | Silicon nitride-silicon oxide etchant |
JPS5112507B2 (ja) | 1971-10-22 | 1976-04-20 | ||
JPS5139835B2 (ja) * | 1971-12-27 | 1976-10-29 | ||
DE2218035A1 (de) * | 1972-04-14 | 1973-10-31 | Vepa Ag | Verfahren und vorrichtung zum kontinuierlichen fixieren und schrumpfen von synthese-fasern |
DE2320195A1 (de) | 1972-04-24 | 1973-12-13 | Standard Microsyst Smc | Durch ionenimplantation hergestellter speicherfeldeffekt-transistor mit siliciumbasis |
US3810795A (en) * | 1972-06-30 | 1974-05-14 | Ibm | Method for making self-aligning structure for charge-coupled and bucket brigade devices |
JPS5910073B2 (ja) * | 1972-10-27 | 1984-03-06 | 株式会社日立製作所 | シリコン・ゲ−トmos型半導体装置の製造方法 |
US3898105A (en) * | 1973-10-25 | 1975-08-05 | Mostek Corp | Method for making FET circuits |
JPS50123274A (ja) * | 1974-03-15 | 1975-09-27 | ||
JPS5912495B2 (ja) | 1974-10-01 | 1984-03-23 | カブシキガイシヤ ニツポンジドウシヤブヒンソウゴウケンキユウシヨ | 衝突検知装置 |
US3984822A (en) * | 1974-12-30 | 1976-10-05 | Intel Corporation | Double polycrystalline silicon gate memory device |
JPS51114079A (en) * | 1975-03-31 | 1976-10-07 | Fujitsu Ltd | Construction of semiconductor memory device |
JPS51118393A (en) * | 1975-04-10 | 1976-10-18 | Matsushita Electric Ind Co Ltd | Semicondector unit |
JPS51118392A (en) | 1975-04-10 | 1976-10-18 | Matsushita Electric Ind Co Ltd | Manuforcturing process for semiconductor unit |
US4002511A (en) * | 1975-04-16 | 1977-01-11 | Ibm Corporation | Method for forming masks comprising silicon nitride and novel mask structures produced thereby |
US4012757A (en) * | 1975-05-05 | 1977-03-15 | Intel Corporation | Contactless random-access memory cell and cell pair |
JPS51142982A (en) * | 1975-05-05 | 1976-12-08 | Intel Corp | Method of producing single crystal silicon ic |
JPS51139263A (en) * | 1975-05-28 | 1976-12-01 | Hitachi Ltd | Method of selective oxidation of silicon substrate |
NL7506594A (nl) * | 1975-06-04 | 1976-12-07 | Philips Nv | Werkwijze voor het vervaardigen van een halfge- leiderinrichting en halfgeleiderinrichting ver- vaardigd met behulp van de werkwijze. |
IT1061530B (it) * | 1975-06-12 | 1983-04-30 | Ncr Co | Metodo per la formazione di connessioni elettriche in regioni selezionate di una superficie di un dispositivo semiconduttore a circuito integrato |
DE2532594B2 (de) * | 1975-07-21 | 1980-05-22 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Halbleiterspeicher |
GB1540450A (en) | 1975-10-29 | 1979-02-14 | Intel Corp | Self-aligning double polycrystalline silicon etching process |
US4240092A (en) | 1976-09-13 | 1980-12-16 | Texas Instruments Incorporated | Random access memory cell with different capacitor and transistor oxide thickness |
JPS6034270B2 (ja) * | 1976-01-12 | 1985-08-07 | テキサス・インスツルメンツ・インコ−ポレイテツド | 半導体メモリ装置およびその製造方法 |
US4112575A (en) * | 1976-12-20 | 1978-09-12 | Texas Instruments Incorporated | Fabrication methods for the high capacity ram cell |
IT1089299B (it) * | 1977-01-26 | 1985-06-18 | Mostek Corp | Procedimento per fabbricare un dispositivo semiconduttore |
FR2584786B1 (fr) * | 1985-07-15 | 1989-10-27 | Valeo | Montage de butee de debrayage et butee de debrayage propre a un tel montage |
-
1977
- 1977-12-30 IT IT31506/77A patent/IT1089299B/it active
-
1978
- 1978-01-18 DE DE19782802048 patent/DE2802048A1/de active Granted
- 1978-01-25 FR FR7802068A patent/FR2382768A1/fr active Granted
- 1978-01-25 GB GB3022/78A patent/GB1595543A/en not_active Expired
- 1978-01-25 GB GB32523/79A patent/GB1595545A/en not_active Expired
- 1978-01-25 GB GB32524/79A patent/GB1595546A/en not_active Expired
- 1978-01-25 GB GB19043/80A patent/GB1595548A/en not_active Expired
- 1978-01-25 GB GB32525/79A patent/GB1595547A/en not_active Expired
- 1978-01-26 JP JP679578A patent/JPS5394190A/ja active Pending
- 1978-06-08 FR FR7817174A patent/FR2382767A1/fr active Granted
- 1978-06-08 FR FR7817175A patent/FR2382770A1/fr active Granted
- 1978-06-08 FR FR7817176A patent/FR2382745A1/fr active Granted
- 1978-06-08 FR FR7817173A patent/FR2382769A1/fr active Granted
-
1981
- 1981-08-07 JP JP56123141A patent/JPS5760852A/ja active Pending
-
1987
- 1987-01-29 JP JP62017431A patent/JPS62290181A/ja active Pending
- 1987-01-29 JP JP62017428A patent/JPS62290147A/ja active Pending
- 1987-01-29 JP JP62017429A patent/JPS62290180A/ja active Pending
- 1987-01-29 JP JP62017430A patent/JPS62290152A/ja active Granted
-
1991
- 1991-08-19 JP JP1991065301U patent/JPH04107840U/ja active Pending
-
1995
- 1995-10-09 JP JP7261450A patent/JPH0918003A/ja active Pending
- 1995-10-09 JP JP7261375A patent/JP2720911B2/ja not_active Expired - Lifetime
- 1995-10-09 JP JP7261151A patent/JPH098299A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2382768B1 (ja) | 1983-06-10 |
JPS62290152A (ja) | 1987-12-17 |
JPS5760852A (en) | 1982-04-13 |
JPH0917799A (ja) | 1997-01-17 |
JPH04107840U (ja) | 1992-09-17 |
FR2382745A1 (fr) | 1978-09-29 |
JPS62290147A (ja) | 1987-12-17 |
DE2802048C2 (ja) | 1993-02-11 |
FR2382768A1 (fr) | 1978-09-29 |
JPS62290180A (ja) | 1987-12-17 |
JPS5394190A (en) | 1978-08-17 |
IT1089299B (it) | 1985-06-18 |
JPH098299A (ja) | 1997-01-10 |
GB1595543A (en) | 1981-08-12 |
JPH0918003A (ja) | 1997-01-17 |
FR2382745B1 (ja) | 1983-06-03 |
GB1595547A (en) | 1981-08-12 |
FR2382770B1 (ja) | 1983-06-03 |
FR2382767B1 (ja) | 1983-06-03 |
JPS62290181A (ja) | 1987-12-17 |
GB1595545A (en) | 1981-08-12 |
FR2382767A1 (fr) | 1978-09-29 |
GB1595546A (en) | 1981-08-12 |
JP2720911B2 (ja) | 1998-03-04 |
FR2382769A1 (fr) | 1978-09-29 |
DE2802048A1 (de) | 1978-07-27 |
FR2382770A1 (fr) | 1978-09-29 |
FR2382769B1 (ja) | 1983-06-03 |
JPH0362300B2 (ja) | 1991-09-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PE20 | Patent expired after termination of 20 years |
Effective date: 19980124 |