GB1523841A - Process for the production of a thin-film resistor - Google Patents

Process for the production of a thin-film resistor

Info

Publication number
GB1523841A
GB1523841A GB536377A GB536377A GB1523841A GB 1523841 A GB1523841 A GB 1523841A GB 536377 A GB536377 A GB 536377A GB 536377 A GB536377 A GB 536377A GB 1523841 A GB1523841 A GB 1523841A
Authority
GB
United Kingdom
Prior art keywords
thin
production
film resistor
feb
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB536377A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resista Fabrik Elektrischer Widerstande GmbH
Original Assignee
Resista Fabrik Elektrischer Widerstande GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Resista Fabrik Elektrischer Widerstande GmbH filed Critical Resista Fabrik Elektrischer Widerstande GmbH
Publication of GB1523841A publication Critical patent/GB1523841A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1523841 Cathode sputtering RESISTA FABRIK ELEKTRISCHER WIDERSTANDE GmbH 9 Feb 1977 [10 Feb 1976] 05363/77 Heading C7F [Also in Division H1] In the formation of thin film resistors, Ni-Cr-Au is sputtered in an oxygen-containing atmosphere, e.g. air. The film may be subsequently tempered and lacquered. By varying the partial pressure of oxygen, metallic and/or oxidic films may be deposited.
GB536377A 1976-02-10 1977-02-09 Process for the production of a thin-film resistor Expired GB1523841A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762605174 DE2605174B2 (en) 1976-02-10 1976-02-10 Process for the production of thin-film resistance elements

Publications (1)

Publication Number Publication Date
GB1523841A true GB1523841A (en) 1978-09-06

Family

ID=5969497

Family Applications (1)

Application Number Title Priority Date Filing Date
GB536377A Expired GB1523841A (en) 1976-02-10 1977-02-09 Process for the production of a thin-film resistor

Country Status (2)

Country Link
DE (1) DE2605174B2 (en)
GB (1) GB1523841A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2154658A (en) * 1984-02-28 1985-09-11 Diesel Kiki Co Valve unit including a switch
GB2158104A (en) * 1984-05-04 1985-11-06 Diesel Kiki Co Method for producing a thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2154658A (en) * 1984-02-28 1985-09-11 Diesel Kiki Co Valve unit including a switch
GB2158104A (en) * 1984-05-04 1985-11-06 Diesel Kiki Co Method for producing a thin film

Also Published As

Publication number Publication date
DE2605174B2 (en) 1978-07-27
DE2605174A1 (en) 1977-08-11

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee