GB1484463A - Method of aligning a protective mask - Google Patents
Method of aligning a protective maskInfo
- Publication number
- GB1484463A GB1484463A GB1314974A GB1314974A GB1484463A GB 1484463 A GB1484463 A GB 1484463A GB 1314974 A GB1314974 A GB 1314974A GB 1314974 A GB1314974 A GB 1314974A GB 1484463 A GB1484463 A GB 1484463A
- Authority
- GB
- United Kingdom
- Prior art keywords
- holder
- mask
- holes
- reference edges
- edges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1484463 Positioning mask on workpiece MARCONI CO Ltd 28 Jan 1975 [23 March 1974] 13149/74 Heading B4X [Also in Division B6] A protective mask is aligned on a surface, e.g. of a quartz crystal 4, or thin film printed circuit arrangement by arranging the surface in a holder 1 and in a predetermined position in relation to two non-parallel reference edges of the holder 1, positioning a mask 7 (also provided with two non-parallel reference edges and at least one aperture 8 spaced in predetermined relation to the reference edges thereof) adjacent the holder, providing a reference member e.g. of a tensioning jig and urging the reference edges of the mask and the holder into contact with the member so that the aperture(s) 8 in the mask is/are aligned with the surface. As shown quartz crystals 4 are mounted in apertures 3 provided in the holder 1 positioned between two masks 7 in turn positioned between two rectangular clamping plates 9, 10, having holes 11 which overlay apertures 8. The whole is assembled as a sandwich by threaded studs 12 on lower plate 9 passing through aligned clearance holes 5 in holder 1, masks 7 and top plate 10, with nuts 13 not tightened. The edges of square holes 6 in the holder and masks provide the reference edges. The sandwich is mounted on a stepped bed (20, Fig. 2) of a tensioning jig carrying a fixed circularly sectioned elongate rod (21) and vertical limb (27) secured to a piston (25) for passing through the holes 6, to provide accurate alignment between apertures 8 and crystals 4. The mask alignment is necessary for the accurate vacuum deposition of metal electrodes on opposite faces of quartz crystals for an electrical circuit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1314974A GB1484463A (en) | 1975-01-28 | 1975-01-28 | Method of aligning a protective mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1314974A GB1484463A (en) | 1975-01-28 | 1975-01-28 | Method of aligning a protective mask |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1484463A true GB1484463A (en) | 1977-09-01 |
Family
ID=10017775
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1314974A Expired GB1484463A (en) | 1975-01-28 | 1975-01-28 | Method of aligning a protective mask |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1484463A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1318541A2 (en) * | 2001-12-10 | 2003-06-11 | Eastman Kodak Company | Aligning mask segments to provide an assembled mask for producing oled devices |
EP2239769A1 (en) * | 2008-01-25 | 2010-10-13 | Consejo Superior De Investigaciones Científicas | Self-aligned metal mask assembly for selectively depositing thin films on microelectronic substrates and devices, and method of use |
CN103668054A (en) * | 2013-11-26 | 2014-03-26 | 北京遥测技术研究所 | Masking tool for evaporation of electrodes of micro-mechanical quartz sensor |
CN110450082A (en) * | 2018-05-08 | 2019-11-15 | 中冶宝钢技术服务有限公司 | A kind of diaphragm group assembling tool and its application method |
CN113862668A (en) * | 2021-09-11 | 2021-12-31 | 南京中电熊猫晶体科技有限公司 | Coating clamp with adjustable electrode size and eccentricity and method thereof |
-
1975
- 1975-01-28 GB GB1314974A patent/GB1484463A/en not_active Expired
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1318541A2 (en) * | 2001-12-10 | 2003-06-11 | Eastman Kodak Company | Aligning mask segments to provide an assembled mask for producing oled devices |
EP1318541A3 (en) * | 2001-12-10 | 2004-12-15 | Eastman Kodak Company | Aligning mask segments to provide an assembled mask for producing oled devices |
EP2239769A1 (en) * | 2008-01-25 | 2010-10-13 | Consejo Superior De Investigaciones Científicas | Self-aligned metal mask assembly for selectively depositing thin films on microelectronic substrates and devices, and method of use |
JP2011510179A (en) * | 2008-01-25 | 2011-03-31 | コンセホ・スペリオール・デ・インベスティガシオネス・シエンティフィカス | Self-aligned metal mask assembly for selective deposition of thin films on microelectronic substrates and methods of use thereof |
EP2239769A4 (en) * | 2008-01-25 | 2011-07-20 | Consejo Superior Investigacion | Self-aligned metal mask assembly for selectively depositing thin films on microelectronic substrates and devices, and method of use |
CN103668054A (en) * | 2013-11-26 | 2014-03-26 | 北京遥测技术研究所 | Masking tool for evaporation of electrodes of micro-mechanical quartz sensor |
CN103668054B (en) * | 2013-11-26 | 2015-10-21 | 北京遥测技术研究所 | A kind of mask frock of quartz micro mechanical sensor electrode evaporation |
CN110450082A (en) * | 2018-05-08 | 2019-11-15 | 中冶宝钢技术服务有限公司 | A kind of diaphragm group assembling tool and its application method |
CN110450082B (en) * | 2018-05-08 | 2021-04-13 | 中冶宝钢技术服务有限公司 | Diaphragm set assembling tool and using method thereof |
CN113862668A (en) * | 2021-09-11 | 2021-12-31 | 南京中电熊猫晶体科技有限公司 | Coating clamp with adjustable electrode size and eccentricity and method thereof |
CN113862668B (en) * | 2021-09-11 | 2024-03-12 | 南京中电熊猫晶体科技有限公司 | Electrode size and eccentricity adjustable coating clamp and method thereof |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |