GB1446015A - Corpuscular beam devices with adjustable object stages - Google Patents

Abstract

1446015 Electron microscopes MAXPLANCK-GES ZUR FÍRDERUNG DER WISSENSCHAFTEN EV GÍTTINGENT 23 July 1973 [21 July 1972] 35091/73 Heading H1D An electron microscope object stage comprises mechanically independent means for moving an object linearly and rotationally and means for selectively coupling the object to either means. The stage includes an object table 6 which is moved linearly in two directions by push rods 10 and carries an inset 13 rotated by flexible shaft 16. An object cartridge 14 with an object carrier 18 is supported in an insert 13. The object carrier 18 is held on the cartridge 14 by a clamp with 2, 3 or 4 jaws 25 .... 28. The independent means for rotating the object comprise a rod 20 with a cut out 23 which receives the object carrier when the jaws are opened. The jaws are spring biased and opened in sequence. The carrier 18 is coupled to the rod 20 by means of grease or by direct adhesion if both surfaces are highly polished. The cartridge is subsequently raised to allow the rod 20 to be rotated freely. In another embodiment the carrier 18 is inserted into a cap (33) Fig. 5 (not shown) held by springs (34) which allow it only to slide in the cut out 23. During movement of the table the jaws are clamped to the cap and are released to enable rod 20 to be rotated. Alternatively the carrier may comprise two parts slidable with respect to each other, only the lower part being inserted in cut out 23. The rod 20 may carry means for rotating the object carrier about an axis perpendicular to the plane of the cut out. The rod 20 may be replaced by a disc rotating about an axis inclined at 45 degrees to the microscope axis Fig. 11 (not shown). The object carrier may be a multi-holed diaphragm. The position of rod 20 may be automatically adjusted as described in Specification 1,445,406.