GB1400543A - Piezoelectric high frequency thickness resonator and manu facturing method for the same - Google Patents
Piezoelectric high frequency thickness resonator and manu facturing method for the sameInfo
- Publication number
- GB1400543A GB1400543A GB3760672A GB3760672A GB1400543A GB 1400543 A GB1400543 A GB 1400543A GB 3760672 A GB3760672 A GB 3760672A GB 3760672 A GB3760672 A GB 3760672A GB 1400543 A GB1400543 A GB 1400543A
- Authority
- GB
- United Kingdom
- Prior art keywords
- piezo
- high frequency
- same
- aug
- recesses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 4
- 229910052786 argon Inorganic materials 0.000 abstract 2
- 239000002305 electric material Substances 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Abstract
1400543 Piezo-electric devices; gas discharge apparatus NIPPON TELEGRAPH & TELEPHONE PUBLIC CORP 11 Aug 1972 [12 Aug 1971] 37606/72 Headings H1D and H1E A high-frequency thickness resonator consists of a plate of piezo-electric material with at least one recess at least two microns deep formed in at least one side thereof to produce a reduced portion 31, 32 of thickness 1 to 30 microns with electrodes 36, 37, 38, 39 formed on the reduced portions and extending on to the thicker portions for receiving connections. The recesses can be formed by ionic etching in a gas discharge vessel (1), Fig. 1 (not shown) containing argon or argon and oxygen at 10<SP>-3</SP> torr. A discharge is maintained between electrodes 6 and the piezo-electric material is masked to expose the areas where recesses are required and a r.f. source is connected to a support holding the plate and mask to cause bombardment by ions. A water cooler can be provided for the support.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6124971A JPS4827689A (en) | 1971-08-12 | 1971-08-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1400543A true GB1400543A (en) | 1975-07-16 |
Family
ID=13165756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3760672A Expired GB1400543A (en) | 1971-08-12 | 1972-08-11 | Piezoelectric high frequency thickness resonator and manu facturing method for the same |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS4827689A (en) |
DE (1) | DE2239696C3 (en) |
GB (1) | GB1400543A (en) |
NL (1) | NL7210965A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2247776A (en) * | 1990-09-07 | 1992-03-11 | Toyo Communication Equip | Piezo electric resonator |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5371595A (en) * | 1976-12-08 | 1978-06-26 | Fujikoshi Kikai Kogyo Kk | Piezooelectric resonator |
JPS5871709A (en) * | 1981-10-26 | 1983-04-28 | Seiko Instr & Electronics Ltd | Oscillator |
JPS58157213A (en) * | 1982-03-15 | 1983-09-19 | Toyo Commun Equip Co Ltd | Manufacture and construction of chip oscillator |
JPS59128814A (en) * | 1983-01-13 | 1984-07-25 | Nippon Dempa Kogyo Co Ltd | Piezoelectric oscillator |
JPS59128813A (en) * | 1983-01-13 | 1984-07-25 | Nippon Dempa Kogyo Co Ltd | Piezoelectric oscillator |
JPS59128812A (en) * | 1983-01-13 | 1984-07-25 | Nippon Dempa Kogyo Co Ltd | Piezoelectric oscillator |
JPS613513A (en) * | 1984-06-18 | 1986-01-09 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
JPH0257625U (en) * | 1988-10-20 | 1990-04-25 | ||
JPH03139911A (en) * | 1989-10-25 | 1991-06-14 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
US6787048B2 (en) * | 2001-03-05 | 2004-09-07 | Agilent Technologies, Inc. | Method for producing thin bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method |
-
1971
- 1971-08-12 JP JP6124971A patent/JPS4827689A/ja active Pending
-
1972
- 1972-08-11 GB GB3760672A patent/GB1400543A/en not_active Expired
- 1972-08-11 DE DE19722239696 patent/DE2239696C3/en not_active Expired
- 1972-08-11 NL NL7210965A patent/NL7210965A/xx unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2247776A (en) * | 1990-09-07 | 1992-03-11 | Toyo Communication Equip | Piezo electric resonator |
Also Published As
Publication number | Publication date |
---|---|
DE2239696B2 (en) | 1975-04-17 |
JPS4827689A (en) | 1973-04-12 |
NL7210965A (en) | 1973-02-14 |
DE2239696C3 (en) | 1975-11-27 |
DE2239696A1 (en) | 1973-02-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |