GB1400011A - Rotary vacuum pumps - Google Patents

Rotary vacuum pumps

Info

Publication number
GB1400011A
GB1400011A GB235172A GB235172A GB1400011A GB 1400011 A GB1400011 A GB 1400011A GB 235172 A GB235172 A GB 235172A GB 235172 A GB235172 A GB 235172A GB 1400011 A GB1400011 A GB 1400011A
Authority
GB
United Kingdom
Prior art keywords
oxygen
pump
vacuum pumps
rotary vacuum
lubricant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB235172A
Inventor
Leslie Arthur Holland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
British Oxigen Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Oxigen Ltd filed Critical British Oxigen Ltd
Priority to GB235172A priority Critical patent/GB1400011A/en
Priority to DE2302376A priority patent/DE2302376A1/en
Publication of GB1400011A publication Critical patent/GB1400011A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/509—Self lubricating materials; Solid lubricants

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Lubricants (AREA)

Abstract

1400011 Molecular pumps BRITISH OXYGEN CO Ltd, [trading as EDWARDS HIGH VACUUM INTERNATIONAL] 17 Jan 1973 [18 Jan1972] 2351/72 Heading F1C The bearings of a turbomolecular vacuum pump are lubricated with a liquid lubricant including or consisting of one or more perfluoroalkyl polyethers. Such lubricants, consisting only of fluorine, carbon and oxygen, cannot give off hydrogen, which would reduce pumping performance. Also, the vapour given off by the lubricant is resistant to polymerization when bombarded by electrons and positive ions in an electron microscope, a sputtering deposition system or other apparatus evacuated by the pump and producing high-energy electrical particles, whereby the formation of contaminent films on electrodes, targets and other surfaces is largely avoided.
GB235172A 1972-01-18 1972-01-18 Rotary vacuum pumps Expired GB1400011A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB235172A GB1400011A (en) 1972-01-18 1972-01-18 Rotary vacuum pumps
DE2302376A DE2302376A1 (en) 1972-01-18 1973-01-18 MOLECULAR VACUUM PUMP

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB235172A GB1400011A (en) 1972-01-18 1972-01-18 Rotary vacuum pumps

Publications (1)

Publication Number Publication Date
GB1400011A true GB1400011A (en) 1975-07-16

Family

ID=9738038

Family Applications (1)

Application Number Title Priority Date Filing Date
GB235172A Expired GB1400011A (en) 1972-01-18 1972-01-18 Rotary vacuum pumps

Country Status (2)

Country Link
DE (1) DE2302376A1 (en)
GB (1) GB1400011A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0223251A2 (en) * 1985-11-20 1987-05-27 AUSIMONT S.p.A. Use of perfluoropolyethers in mechanical pumps

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19634095A1 (en) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Entry stage for a double-flow gas friction pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0223251A2 (en) * 1985-11-20 1987-05-27 AUSIMONT S.p.A. Use of perfluoropolyethers in mechanical pumps
EP0223251A3 (en) * 1985-11-20 1989-07-19 Ausimont S.P.A. Use of perfluoropolyethers in mechanical pumps

Also Published As

Publication number Publication date
DE2302376A1 (en) 1973-08-02

Similar Documents

Publication Publication Date Title
GB1245153A (en) Improvements in or relating to mass spectrometer leak detectors
ES399507A1 (en) Metal oxide films
GB1420061A (en) Sputtering method and apparatus
GB2168724A (en) Ion plating on elongated member
CN204898063U (en) Niobium sputter pump and vacuum system
GB1400011A (en) Rotary vacuum pumps
US2988657A (en) Ion pump
US3198422A (en) Vacuum sputtering pump
US3684401A (en) Cathode-getter materials for sputter-ion pumps
GB1134231A (en) Improvements in or relating to ion vacuum pumps
GB949219A (en) Improvements in or relating to ion pumps
GB1228207A (en)
GB1158486A (en) Improvements in Triode Ionic Vacuum Pump
GB1420545A (en) Evaporation by electron beans
GB1021064A (en) Improvements in or relating to vacuum ion pumps
Dennis et al. 10. Further developments with single structure vapour pumping groups
GB1049125A (en) Ion pump
GB951866A (en) Vacuum pumps
GB1163496A (en) Improvements in or relating to Radio Frequency Sputtering
GB1368454A (en) Electrets
GB1003212A (en) Improvements in vacuum pumps of the ionization and evaporation type
US2958454A (en) Vacuum seal
Audi Pumping mechanism for different gases in ion pumps with different configurations
GB1166943A (en) Cathode Arrangements for Getter Ion Pumps
Spalvins Radiofrequency-sputtered coatings for lubrication system components and other complex surfaces

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee