GB1263582A - Improvements in or relating to thin film deposition - Google Patents

Improvements in or relating to thin film deposition

Info

Publication number
GB1263582A
GB1263582A GB4618569A GB4618569A GB1263582A GB 1263582 A GB1263582 A GB 1263582A GB 4618569 A GB4618569 A GB 4618569A GB 4618569 A GB4618569 A GB 4618569A GB 1263582 A GB1263582 A GB 1263582A
Authority
GB
United Kingdom
Prior art keywords
chamber
discharge
evaporant
source
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4618569A
Inventor
Brian Cochrane Monachan
John Allen
Alexander James Napier Hope
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Optronics Ltd
Original Assignee
Thales Optronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Optronics Ltd filed Critical Thales Optronics Ltd
Priority to GB4618569A priority Critical patent/GB1263582A/en
Priority to NL7013403A priority patent/NL141582B/en
Priority to CH1352170A priority patent/CH532128A/en
Priority to DE19702045198 priority patent/DE2045198B2/en
Priority to FR7034073A priority patent/FR2062402A5/fr
Publication of GB1263582A publication Critical patent/GB1263582A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Abstract

1,263,582. Vacuum vapour deposition. BARR & STROUD Ltd. Aug.21, 1970 [Sept. 19, 1969], No.46185/69. Heading C7F. A method of depositing a thin film on a surface by evaporation within a vacuum chamber which includes a discharge source of electromagnetic energy for effecting cleaning of a said surface includes the steps of reducing the pressure within the chamber to approximately 10<SP>-5</SP> Torr, energizing said energy source, leaking gas into the chamber to raise the pressure therein to approximately 5 x 10<SP>-5</SP> Torr to enable a discharge from said source to be sustained; during said discharge heating the evaporant and confining heated evaporant in an enclosure, and releasing said heated evaporant after a predetermined time whereby the evaporant is deposited in thin film form on the surface. One or more layers may be deposited; substrates mentioned are glass, Si, Ge, arsenic triselenide and arsenic trisulphide; the coating may be MgF 2 or Al and the atmosphere air. The discharge source of electromagnetic energy may comprise a R.F. generator of 200 watts output at 10-20 MHz in conjunction with an amplifier and quarter-wavelength aerial; the latter may be outside a non-conducting, e.g. glass, chamber or inside a metal coating chamber. D.C. coils may be mounted outside the chamber to give a magnetic bottle effect to prevent discharge of R. F. energy via the chamber walls.
GB4618569A 1969-09-19 1969-09-19 Improvements in or relating to thin film deposition Expired GB1263582A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB4618569A GB1263582A (en) 1969-09-19 1969-09-19 Improvements in or relating to thin film deposition
NL7013403A NL141582B (en) 1969-09-19 1970-09-10 METHOD AND DEVICE FOR DEPOSITING A THIN LAYER ON A SURFACE.
CH1352170A CH532128A (en) 1969-09-19 1970-09-11 Process for vapor deposition of a thin layer
DE19702045198 DE2045198B2 (en) 1969-09-19 1970-09-12 METHOD AND DEVICE FOR GENERATING THIN COATINGS ON SURFACES BY EVAPORATING THE SUBSTANCE FORMING THE COATING IN VACUUM
FR7034073A FR2062402A5 (en) 1969-09-19 1970-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4618569A GB1263582A (en) 1969-09-19 1969-09-19 Improvements in or relating to thin film deposition

Publications (1)

Publication Number Publication Date
GB1263582A true GB1263582A (en) 1972-02-09

Family

ID=10440203

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4618569A Expired GB1263582A (en) 1969-09-19 1969-09-19 Improvements in or relating to thin film deposition

Country Status (5)

Country Link
CH (1) CH532128A (en)
DE (1) DE2045198B2 (en)
FR (1) FR2062402A5 (en)
GB (1) GB1263582A (en)
NL (1) NL141582B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4061800A (en) * 1975-02-06 1977-12-06 Applied Materials, Inc. Vapor desposition method
WO1997042648A1 (en) * 1996-05-09 1997-11-13 Applied Materials, Inc. Recessed coil for generating a plasma
US6254746B1 (en) 1996-05-09 2001-07-03 Applied Materials, Inc. Recessed coil for generating a plasma

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3518197A1 (en) * 1985-05-21 1986-11-27 Heinrich 7413 Gomaringen Grünwald METHOD FOR REMOVING METALIONS FROM BODIES OF GLASS, CERAMIC MATERIALS AND OTHER AMORPHOUS MATERIALS AND CRYSTALLINE MATERIALS

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4061800A (en) * 1975-02-06 1977-12-06 Applied Materials, Inc. Vapor desposition method
WO1997042648A1 (en) * 1996-05-09 1997-11-13 Applied Materials, Inc. Recessed coil for generating a plasma
US6254746B1 (en) 1996-05-09 2001-07-03 Applied Materials, Inc. Recessed coil for generating a plasma

Also Published As

Publication number Publication date
NL141582B (en) 1974-03-15
FR2062402A5 (en) 1971-06-25
DE2045198B2 (en) 1972-06-22
DE2045198A1 (en) 1971-04-01
CH532128A (en) 1972-12-31
NL7013403A (en) 1971-03-23

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