GB1255292A - Improvements in or relating to piezoelectric transducers - Google Patents
Improvements in or relating to piezoelectric transducersInfo
- Publication number
- GB1255292A GB1255292A GB532570A GB532570A GB1255292A GB 1255292 A GB1255292 A GB 1255292A GB 532570 A GB532570 A GB 532570A GB 532570 A GB532570 A GB 532570A GB 1255292 A GB1255292 A GB 1255292A
- Authority
- GB
- United Kingdom
- Prior art keywords
- sets
- layer
- grating
- separated
- electrode spacing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
- H03H9/14508—Polyphase SAW transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
- H03H9/14505—Unidirectional SAW transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14538—Formation
Abstract
1,255,292. Piezoelectric transducers. MARCONI CO. Ltd. 10 Nov., 1970 [4 Feb., 1970], No. 5325/70. Heading H3U. A transducer for a delay line comprises two sets 1, 2 of interleaved electrodes forming an interdigital line grating, the sets being separated from each other by a layer 4 of insulating material, e.g. aluminium oxide, silicon oxide or silicon nitride applied by radio frequency sputtering. The interposed layer 4 prevents short circuits between the sets 1, 2 resulting from manufacturing difficulties when the electrode spacing is extremely small. If the electrode spacing is ten microns the layer 4 may be one micron thick. The grating is formed on a piezoelectric body 3 and covered by an insulating layer 5. The grating may comprise more than two sets of interleaved electrodes and in another embodiment (Figs. 3, 4, not shown) there are three superposed sets separated from each other by two insulating layers.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB532570A GB1255292A (en) | 1970-02-04 | 1970-02-04 | Improvements in or relating to piezoelectric transducers |
NL7100685A NL7100685A (en) | 1970-02-04 | 1971-01-19 | |
FR7103006A FR2077140A5 (en) | 1970-02-04 | 1971-01-29 | |
DE19712104399 DE2104399A1 (en) | 1970-02-04 | 1971-01-30 | Piezoelectric converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB532570A GB1255292A (en) | 1970-02-04 | 1970-02-04 | Improvements in or relating to piezoelectric transducers |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1255292A true GB1255292A (en) | 1971-12-01 |
Family
ID=9793998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB532570A Expired GB1255292A (en) | 1970-02-04 | 1970-02-04 | Improvements in or relating to piezoelectric transducers |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE2104399A1 (en) |
FR (1) | FR2077140A5 (en) |
GB (1) | GB1255292A (en) |
NL (1) | NL7100685A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4162466A (en) * | 1977-09-28 | 1979-07-24 | University Of Illinois Foundation | Surface acoustic wave resonator |
US9541330B2 (en) | 2013-07-17 | 2017-01-10 | Whirlpool Corporation | Method for drying articles |
US10006163B2 (en) | 2015-03-23 | 2018-06-26 | Whirlpool Corporation | Apparatus for drying articles |
US10024899B2 (en) | 2013-10-16 | 2018-07-17 | Whirlpool Corporation | Method and apparatus for detecting an energized e-field |
US10246813B2 (en) | 2013-12-09 | 2019-04-02 | Whirlpool Corporation | Method for drying articles |
US10323881B2 (en) | 2013-10-02 | 2019-06-18 | Whirlpool Corporation | Method and apparatus for drying articles |
US10533798B2 (en) | 2013-08-14 | 2020-01-14 | Whirlpool Corporation | Appliance for drying articles |
US10837702B2 (en) | 2013-08-23 | 2020-11-17 | Whirlpool Corporation | Appliance for drying articles |
-
1970
- 1970-02-04 GB GB532570A patent/GB1255292A/en not_active Expired
-
1971
- 1971-01-19 NL NL7100685A patent/NL7100685A/xx unknown
- 1971-01-29 FR FR7103006A patent/FR2077140A5/fr not_active Expired
- 1971-01-30 DE DE19712104399 patent/DE2104399A1/en active Pending
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4162466A (en) * | 1977-09-28 | 1979-07-24 | University Of Illinois Foundation | Surface acoustic wave resonator |
US9541330B2 (en) | 2013-07-17 | 2017-01-10 | Whirlpool Corporation | Method for drying articles |
US11655583B2 (en) | 2013-07-17 | 2023-05-23 | Whirlpool Corporation | Method for drying articles |
US10184718B2 (en) | 2013-07-17 | 2019-01-22 | Whirlpool Corporation | Method for drying articles |
US10816265B2 (en) | 2013-07-17 | 2020-10-27 | Whirlpool Corporation | Method for drying articles |
US10533798B2 (en) | 2013-08-14 | 2020-01-14 | Whirlpool Corporation | Appliance for drying articles |
US10823502B2 (en) | 2013-08-14 | 2020-11-03 | Whirlpool Corporation | Appliance for drying articles |
US11459696B2 (en) | 2013-08-23 | 2022-10-04 | Whirlpool Corporation | Appliance for drying articles |
US10837702B2 (en) | 2013-08-23 | 2020-11-17 | Whirlpool Corporation | Appliance for drying articles |
US10323881B2 (en) | 2013-10-02 | 2019-06-18 | Whirlpool Corporation | Method and apparatus for drying articles |
US11029088B2 (en) | 2013-10-02 | 2021-06-08 | Whirlpool Corporation | Method and apparatus for drying articles |
US11686037B2 (en) | 2013-10-02 | 2023-06-27 | Whirlpool Corporation | Method and apparatus for drying articles |
US10816586B2 (en) | 2013-10-16 | 2020-10-27 | Whirlpool Corporation | Method and apparatus for detecting an energized e-field |
US10024899B2 (en) | 2013-10-16 | 2018-07-17 | Whirlpool Corporation | Method and apparatus for detecting an energized e-field |
US11519130B2 (en) | 2013-10-16 | 2022-12-06 | Whirlpool Corporation | Method and apparatus for detecting an energized e-field |
US10246813B2 (en) | 2013-12-09 | 2019-04-02 | Whirlpool Corporation | Method for drying articles |
US10655270B2 (en) | 2015-03-23 | 2020-05-19 | Whirlpool Corporation | Apparatus for drying articles |
US11078619B2 (en) | 2015-03-23 | 2021-08-03 | Whirlpool Corporation | Apparatus for drying articles |
US10006163B2 (en) | 2015-03-23 | 2018-06-26 | Whirlpool Corporation | Apparatus for drying articles |
US11692298B2 (en) | 2015-03-23 | 2023-07-04 | Whirlpool Corporation | Method of drying articles |
Also Published As
Publication number | Publication date |
---|---|
NL7100685A (en) | 1971-08-06 |
FR2077140A5 (en) | 1971-10-15 |
DE2104399A1 (en) | 1971-08-12 |
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