GB1168980A - Surface Finishing of Optical Elements - Google Patents

Surface Finishing of Optical Elements

Info

Publication number
GB1168980A
GB1168980A GB57968/66A GB5796866A GB1168980A GB 1168980 A GB1168980 A GB 1168980A GB 57968/66 A GB57968/66 A GB 57968/66A GB 5796866 A GB5796866 A GB 5796866A GB 1168980 A GB1168980 A GB 1168980A
Authority
GB
United Kingdom
Prior art keywords
depth
optical elements
dec
errors
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB57968/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of GB1168980A publication Critical patent/GB1168980A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Magnetic Heads (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,168,980. Coating optical elements by vapour deposition. PERKIN-ELMER CORP. Dec.28, 1966 [Dec.29, 1965], No. 57968/66. Heading C7F. [Also in Division G2] The surface of an optical element is finished to a desired contour by first determining the location and depth of errors in the contour of the surface and then vapour depositing a layer over the entire surface which is varied in depth in accordance with the depth of the errors at any particular location. An inter-ferogram is first taken of the surface from which a mask is made by etching a copper plate, and then material, e.g. silica, is deposited from a source 73 through the mask, whilst it is reciprocated, on to the element 12. A rotatable member 76 provides a radially uniform deposition.
GB57968/66A 1965-12-29 1966-12-28 Surface Finishing of Optical Elements Expired GB1168980A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51730365A 1965-12-29 1965-12-29

Publications (1)

Publication Number Publication Date
GB1168980A true GB1168980A (en) 1969-10-29

Family

ID=24059250

Family Applications (1)

Application Number Title Priority Date Filing Date
GB57968/66A Expired GB1168980A (en) 1965-12-29 1966-12-28 Surface Finishing of Optical Elements

Country Status (2)

Country Link
US (1) US3503781A (en)
GB (1) GB1168980A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113684461A (en) * 2021-08-16 2021-11-23 上海济物光电技术有限公司 SIC reflector surface modification process method with surface shape correction capability

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3664295A (en) * 1970-11-02 1972-05-23 Gte Sylvania Inc Means for achieving a controlled gradient density coating on a light attenuation medium
US3773541A (en) * 1970-11-02 1973-11-20 Gte Sylvania Inc Process for achieving a controlled gradient density coating on a light attenuation medium
US6168832B1 (en) 1997-01-20 2001-01-02 Coherent, Inc. Three-dimensional masking method for control of coating thickness
GB9701114D0 (en) * 1997-01-20 1997-03-12 Coherent Optics Europ Ltd Three-dimensional masking method for control of optical coating thickness
JP3505067B2 (en) * 1997-07-17 2004-03-08 松下電器産業株式会社 Light amount correction filter manufacturing apparatus and color picture tube manufacturing method using light amount correction filter manufactured by this apparatus

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB569046A (en) * 1942-12-16 1945-05-02 Frank Twyman Method and apparatus for improving optical elements
US2432950A (en) * 1943-09-24 1947-12-16 Bausch & Lomb Apparatus for making optical wedges
US2408614A (en) * 1944-07-18 1946-10-01 Rca Corp Surface coating apparatus
US2549926A (en) * 1947-05-02 1951-04-24 American Optical Corp Apparatus for making optical devices
US2771055A (en) * 1952-04-25 1956-11-20 Technicolor Corp Apparatus for coating optical interference layers
US2954301A (en) * 1957-06-27 1960-09-27 Allied Chem Process for bonding freshly applied hydraulic cement materials to surfaces
NL276676A (en) * 1961-04-13
US3117025A (en) * 1961-08-31 1964-01-07 Space Technology Lab Inc Thin filming apparatus
NL285523A (en) * 1961-11-24
US3230109A (en) * 1961-12-18 1966-01-18 Bell Telephone Labor Inc Vapor deposition method and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113684461A (en) * 2021-08-16 2021-11-23 上海济物光电技术有限公司 SIC reflector surface modification process method with surface shape correction capability

Also Published As

Publication number Publication date
US3503781A (en) 1970-03-31

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