GB1096261A - Apparatus for electronic bombardment of a target - Google Patents

Apparatus for electronic bombardment of a target

Info

Publication number
GB1096261A
GB1096261A GB625565A GB625565A GB1096261A GB 1096261 A GB1096261 A GB 1096261A GB 625565 A GB625565 A GB 625565A GB 625565 A GB625565 A GB 625565A GB 1096261 A GB1096261 A GB 1096261A
Authority
GB
United Kingdom
Prior art keywords
shafts
feb
wheels
frames
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB625565A
Other languages
English (en)
Inventor
Marcel Meulemans
Maurice Henuset
Paul Groeseneken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Publication of GB1096261A publication Critical patent/GB1096261A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
GB625565A 1964-02-14 1965-02-12 Apparatus for electronic bombardment of a target Expired GB1096261A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6401328A NL6401328A (xx) 1964-02-14 1964-02-14

Publications (1)

Publication Number Publication Date
GB1096261A true GB1096261A (en) 1967-12-20

Family

ID=19789292

Family Applications (1)

Application Number Title Priority Date Filing Date
GB625565A Expired GB1096261A (en) 1964-02-14 1965-02-12 Apparatus for electronic bombardment of a target

Country Status (5)

Country Link
BE (1) BE659687A (xx)
DE (1) DE1224853B (xx)
GB (1) GB1096261A (xx)
LU (1) LU47965A1 (xx)
NL (1) NL6401328A (xx)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2793882A (en) * 1955-10-21 1957-05-28 Charles L Keck Manifolding device
NL255393A (xx) * 1960-07-12
BE554195A (xx) * 1964-04-15

Also Published As

Publication number Publication date
DE1224853B (de) 1966-09-15
LU47965A1 (xx) 1966-08-11
NL6401328A (xx) 1965-08-16
BE659687A (xx) 1965-05-28

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