GB1009601A - Improvements in electron beam equipment - Google Patents

Improvements in electron beam equipment

Info

Publication number
GB1009601A
GB1009601A GB8940/62A GB894062A GB1009601A GB 1009601 A GB1009601 A GB 1009601A GB 8940/62 A GB8940/62 A GB 8940/62A GB 894062 A GB894062 A GB 894062A GB 1009601 A GB1009601 A GB 1009601A
Authority
GB
United Kingdom
Prior art keywords
lens unit
top plate
magnetic lens
electron beam
march
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8940/62A
Inventor
William Charles Nixon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hilger and Watts Ltd
Original Assignee
Hilger and Watts Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL289910D priority Critical patent/NL289910A/xx
Application filed by Hilger and Watts Ltd filed Critical Hilger and Watts Ltd
Priority to GB8940/62A priority patent/GB1009601A/en
Priority to FR18180A priority patent/FR1349083A/en
Priority to DEE24442A priority patent/DE1253836B/en
Priority to US266621A priority patent/US3248542A/en
Publication of GB1009601A publication Critical patent/GB1009601A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/82—Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3005—Observing the objects or the point of impact on the object

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,009,601. Electric discharge tubes. HILGER & WATTS Ltd. March 1, 1963 [March 8, 1962], No. 8940/62. Heading H1D. An electron beam equipment comprises a plurality of separate components which are adapted to be detachably superimposed one upon another in the form of a vertical column to define an evacuable space through which an electron beam can be directed, the components being assembled in various ways to permit an extended range of investigations or operations to be carried out with the equipment. As shown, a plurality of columns support a top plate 13 beneath which is mounted an electron gun unit 15. The top plate is adapted to receive various components such as a magnetic lens unit 31, intermediate chamber 32 and top chamber 33. The vacuum is maintained through connections 23. The magnetic lens unit is transversely positioned by screws 29 being supported on the top plate by low-friction elements 24, Fig. 5, and sealed by an 0-ring 22. The top and intermediate plates are spaced by rods 26. In a modification, spacing tubes are threaded on a long rod. The magnetic lens unit may incorporate a transversely disposed beam adjusting device comprising a radially movable stem having a plurality of apertures, Fig. 6, not shown.
GB8940/62A 1962-03-08 1962-03-08 Improvements in electron beam equipment Expired GB1009601A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL289910D NL289910A (en) 1962-03-08
GB8940/62A GB1009601A (en) 1962-03-08 1962-03-08 Improvements in electron beam equipment
FR18180A FR1349083A (en) 1962-03-08 1963-03-07 Improvements to electron beam equipment
DEE24442A DE1253836B (en) 1962-03-08 1963-03-07 Electron beam device
US266621A US3248542A (en) 1962-03-08 1963-03-20 Electron beam devices having plural chambers designed to be assembled and disassembled

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8940/62A GB1009601A (en) 1962-03-08 1962-03-08 Improvements in electron beam equipment

Publications (1)

Publication Number Publication Date
GB1009601A true GB1009601A (en) 1965-11-10

Family

ID=9862258

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8940/62A Expired GB1009601A (en) 1962-03-08 1962-03-08 Improvements in electron beam equipment

Country Status (5)

Country Link
US (1) US3248542A (en)
DE (1) DE1253836B (en)
FR (1) FR1349083A (en)
GB (1) GB1009601A (en)
NL (1) NL289910A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3327114A (en) * 1964-06-23 1967-06-20 Alfred F Diorio Low-angle x-ray diffraction camera comprising releasably connected sections and adjustable beam apertures and stops
US3514596A (en) * 1967-10-17 1970-05-26 Picker Corp Spot filmer for x-ray radiographing which minimizes patient-to-film distance
US3814356A (en) * 1970-10-02 1974-06-04 J Coleman Electron microscope
US3809899A (en) * 1972-08-17 1974-05-07 Tektronix Inc Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
US3872305A (en) * 1972-12-06 1975-03-18 Jeol Ltd Convertible scanning electron microscope
DE2702439C3 (en) * 1977-01-19 1980-08-07 Siemens Ag, 1000 Berlin Und 8000 Muenchen Long focal length magnetic lens for corpuscular beam optical imaging of a large object
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US20180182605A1 (en) * 2016-12-22 2018-06-28 Thermo Finnigan Llc Aligning ion optics by aperture sighting

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2319061A (en) * 1941-01-31 1943-05-11 Rca Corp Demountable electron gun
DE892491C (en) * 1941-03-18 1953-10-08 Aeg Dismountable, multi-stage, multi-part overmicroscope
US2405306A (en) * 1944-01-31 1946-08-06 Rca Corp Electronic microanalyzer monitoring
NL300306A (en) * 1955-06-14
US3080481A (en) * 1959-04-17 1963-03-05 Sprague Electric Co Method of making transistors

Also Published As

Publication number Publication date
FR1349083A (en) 1964-01-10
US3248542A (en) 1966-04-26
NL289910A (en)
DE1253836B (en) 1967-11-09

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