GB1061484A - Vacuum deposition apparatus for materials in sheet form - Google Patents

Vacuum deposition apparatus for materials in sheet form

Info

Publication number
GB1061484A
GB1061484A GB14581/64A GB1458164A GB1061484A GB 1061484 A GB1061484 A GB 1061484A GB 14581/64 A GB14581/64 A GB 14581/64A GB 1458164 A GB1458164 A GB 1458164A GB 1061484 A GB1061484 A GB 1061484A
Authority
GB
United Kingdom
Prior art keywords
holders
sheets
magazines
magazine
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB14581/64A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Glass Europe SA
Original Assignee
Glaverbel Belgium SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel Belgium SA filed Critical Glaverbel Belgium SA
Publication of GB1061484A publication Critical patent/GB1061484A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)

Abstract

Vacuum deposition apparatus in which sheets of material are coated comprises a vacuum chamber containing first and second magazines for sheets before and after coating and a mechanism for transferring the sheets from one magazine to the other. In one embodiment, Fig. 1 (dwgs. not shown), the magazines (12), (16) are formed by angle members (11), (15) attached to rails (7) mounted on a ring (9) supported by and rotatable on a track (6) in the upper part of a cylindrical vacuum tank (1), the lower part containing a vapour source (5). Holders (13) containing glass sheets (14) are stacked in magazine (12) and the lowest holder is pushed into magazine (16) by a rack (19) operated by a motor driven pinion 21. The magazine assembly is rotated on the track (6) and the lowest sheets coated. After coating the assembly is stopped, two lowest holders are transferred to magazine (16) by rack (19) and coating is repeated. To facilitate transfer the front and back edges of the holders are bevelled. A notch (27), Fig. 2, engaging a magnetic latch (28), Fig. 1, ensures the locking of the ring (9) during the transfer of holders. Alternatively the magazines may comprise endless chains (30), Figs. 4, 5, carrying lugs (31) and stretched over toothed wheels (32) mounted on shafts (33). The holders are attached to the lugs and are moved vertically by motors (36), (40) operating worm and gear arrangements (38), (39) and (42), (43) and are transferred as before. In an embodiment enabling both faces of the sheets to be coated the holders, having notches (56), Fig. 8, instead of bevelled edges are transferred between magazines by a motor driven rocking frame (46), Fig. 7. This frame rotates on a horizontal axis (45) between and beneath the magazines, the holders being placed on and removed from the frame by the chains 30. The frame is provided with two sets of fingers (53), (53') the upper set of which coincide with the notches (56) during loading and unloading of the holder and which are moved sideways to maintain the holder in position during rotation. If only one face is to be coated using this embodiment, each holder carries two sheets. The vapour may be produced by electric discharge between movable electrodes (61) Fig. 10.
GB14581/64A 1963-05-09 1964-04-08 Vacuum deposition apparatus for materials in sheet form Expired GB1061484A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU43713 1963-05-09

Publications (1)

Publication Number Publication Date
GB1061484A true GB1061484A (en) 1967-03-15

Family

ID=19723388

Family Applications (1)

Application Number Title Priority Date Filing Date
GB14581/64A Expired GB1061484A (en) 1963-05-09 1964-04-08 Vacuum deposition apparatus for materials in sheet form

Country Status (5)

Country Link
US (1) US3321092A (en)
DE (1) DE1521258B2 (en)
ES (1) ES299338A1 (en)
GB (1) GB1061484A (en)
LU (1) LU43713A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109957778A (en) * 2017-12-14 2019-07-02 湘潭宏大真空技术股份有限公司 Transmission rotating device for double-sided glass plated film

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3516386A (en) * 1965-07-16 1970-06-23 Boeing Co Thin film deposition fixture
CA953905A (en) * 1970-02-05 1974-09-03 Richard H. Edwards Multi-layer coating apparatus, system and method
US3721210A (en) * 1971-04-19 1973-03-20 Texas Instruments Inc Low volume deposition reactor
US4113082A (en) * 1976-05-17 1978-09-12 Airco, Inc. Apparatus and method for storing and transporting substrates in a batch-type vacuum process
CN116497321B (en) * 2023-03-24 2023-10-13 苏州星蓝纳米技术有限公司 Feeding conveying trolley convenient for cutter coating

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2333285A (en) * 1941-07-16 1943-11-02 Harry A Wellnitz Block-mold pallet cleaning machine
US2602386A (en) * 1949-07-28 1952-07-08 Roger L Brigham Cut film adapter for serial photography for photographic cameras
US2745767A (en) * 1951-07-23 1956-05-15 Alois Vogt Dr Process and apparatus for treating by vapour deposition a plurality of articles introduced at several levels, while maintaining the same vacuum
US2940327A (en) * 1954-04-15 1960-06-14 Sylvania Electric Prod Traying device
US2749120A (en) * 1955-02-01 1956-06-05 Parker Stamp Works Inc Apparatus for stacking plates
US3104180A (en) * 1959-07-02 1963-09-17 Bernard Marie Maurice Gilbert Apparatus for sequentially vapor metallizing a number of articles in a bell unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109957778A (en) * 2017-12-14 2019-07-02 湘潭宏大真空技术股份有限公司 Transmission rotating device for double-sided glass plated film

Also Published As

Publication number Publication date
US3321092A (en) 1967-05-23
ES299338A1 (en) 1964-07-01
LU43713A1 (en) 1964-11-09
DE1521258A1 (en) 1969-07-24
DE1521258B2 (en) 1972-03-16

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