GB1023104A - Improvements in corpuscular radiation instruments - Google Patents
Improvements in corpuscular radiation instrumentsInfo
- Publication number
- GB1023104A GB1023104A GB5471/64A GB547164A GB1023104A GB 1023104 A GB1023104 A GB 1023104A GB 5471/64 A GB5471/64 A GB 5471/64A GB 547164 A GB547164 A GB 547164A GB 1023104 A GB1023104 A GB 1023104A
- Authority
- GB
- United Kingdom
- Prior art keywords
- polepiece
- holder
- lens
- coupling part
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Abstract
1,023,104. Electron microscopes. SIEMENS & HALSKE A.G. Feb. 10, 1964 [Feb. 15, 1963], No. 5471/64. Heading H1D. An electron microscope which can also be used as a diffraction camera has a mechanism for moving the polepieces 6, 7 of the magnetic lens 3 longitudinally out of the bore 9 and then, by a swivelling action, out of the axis 16 of the beam. The polepiece system 5 is held in a holder 12 by pins 13 which engage longitudinal slots 17 in a fixed bush 15 of the holder 12 and inner threads 19 in a surrounding rotatable bush 20 so that on rotation of the bush 20 by means of the cog wheels 34, 35 and drive 11, the polepiece system is withdrawn without turning. The drive 11 also rotates a coupling part 29 around a shaft 27, and the shaft can be brought into operative connection with the coupling part 29 to effect a swivelling movement of the shaft and of the holder 12 fixed to it by an extension 15a. A coupling part 31, fixed to the shaft 27, is engaged with the coupling part 29 by means of the lever 30. A clamp 70 prevents swivelling of the holder 12 as long as the polepiece system 5 is still within the bore 9. An observation screen 47 is allowed to swivel under the action of a spring into the path of the beam after the holder 12 has been swivelled out of the way, but the screen may be held out of the beam path even when the holder is removed. To aid in withdrawing the polepiece system against the magnetic forces of the lens, a contact switch may be provided to reduce the number of ampere-turns, different contacts being closed as the polepiece system is withdrawn and the holder moved away. With an intermediate reduction in the number of ampere turns, the lens with a clear bore 9 may provide a long focus suitable for use in the diffraction camera arrangement. A similar contact switch may be used to operate a device for the indication of the position of the polepieces or of the holder. In suggested modifications only one polepiece may be removed from the lens, or upper and lower polepiece systems may be removed by similar upper and lower mechanisms, or a single mechanism may be used for successively removing both polepiece systems.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES83762A DE1192760B (en) | 1963-02-15 | 1963-02-15 | Arrangement in corpuscular beam devices, in particular electron microscopes, for removing and inserting pole shoe systems or parts thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1023104A true GB1023104A (en) | 1966-03-16 |
Family
ID=7511245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5471/64A Expired GB1023104A (en) | 1963-02-15 | 1964-02-10 | Improvements in corpuscular radiation instruments |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3316402A (en) |
| CH (1) | CH418481A (en) |
| DE (1) | DE1192760B (en) |
| GB (1) | GB1023104A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3445652A (en) * | 1965-09-28 | 1969-05-20 | Nippon Electron Optics Lab | Beam deflecting apparatus with deflection coils located within an electron microscope specimen chamber |
| DE1564674B1 (en) * | 1966-07-27 | 1971-07-29 | Siemens AG, 1000 Berlin u 8000 Munchf | Corpuscular beam device working on the pump, in particular an electron microscope, with a deflection system for the corpuscular beam and an object lock device |
| DE1614123B1 (en) * | 1967-02-24 | 1970-07-02 | Max Planck Gesellschaft | Corpuscular beam device, especially an electron microscope |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2369782A (en) * | 1943-04-01 | 1945-02-20 | Rca Corp | Electron lens system |
-
1963
- 1963-02-15 DE DES83762A patent/DE1192760B/en active Pending
-
1964
- 1964-01-07 CH CH9864A patent/CH418481A/en unknown
- 1964-01-20 US US338964A patent/US3316402A/en not_active Expired - Lifetime
- 1964-02-10 GB GB5471/64A patent/GB1023104A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH418481A (en) | 1966-08-15 |
| DE1192760B (en) | 1965-05-13 |
| US3316402A (en) | 1967-04-25 |
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